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公开(公告)号：US07127901B2
公开(公告)日：2006-10-31
申请号：US09909863
申请日：2001-07-20
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce R. Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce R. Andeen , Y. Roberto Than , Joseph Chopy, Jr.
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
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公开(公告)号：US07788942B2
公开(公告)日：2010-09-07
申请号：US11590673
申请日：2006-10-31
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译： 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。
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公开(公告)号：US08869552B2
公开(公告)日：2014-10-28
申请号：US13605738
申请日：2012-09-06
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译： 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过感应过多的稀疏氦和相应地重新分配制冷剂，向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。
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公开(公告)号：US08261562B2
公开(公告)日：2012-09-11
申请号：US12848681
申请日：2010-08-02
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译： 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。
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公开(公告)号：US20100313583A1
公开(公告)日：2010-12-16
申请号：US12848681
申请日：2010-08-02
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, JR.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, JR.
IPC分类号： F25B45/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译： 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。
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公开(公告)号：US20130019620A1
公开(公告)日：2013-01-24
申请号：US13605738
申请日：2012-09-06
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Robert Than , Joseph Chopy, JR.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Robert Than , Joseph Chopy, JR.
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译： 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过感应过多的稀疏氦和相应地重新分配制冷剂，向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。
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7.发明授权Method and apparatus for detecting and measuring state of fullness in cryopumps 有权用于检测和测量低温泵充满状态的方法和装置公开(公告)号：US07320224B2
公开(公告)日：2008-01-22
申请号：US10763056
申请日：2004-01-21
IPC分类号： B01D8/00
CPC分类号： F04B37/08
摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
摘要翻译： 本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。 离子计或其他总压力表与泵的冷凝或吸附面板接触。 例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。 在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。 通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。
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8.发明授权
公开(公告)号：US5862671A
公开(公告)日：1999-01-26
申请号：US848973
申请日：1997-05-02
申请人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
发明人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
CPC分类号： F04B37/085 , Y10S417/901
摘要： A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
摘要翻译： 在清洗过程中，通过对低温泵进行粗加工来再生低温泵。 首先在高温模式下进行吹扫和粗加工，然后在较低的环境温度模式下进行。 在较低温度模式下，低温冰箱打开。 如果系统在较低温度下进行粗加工后未能进行粗糙试验，则会在粗阀打开时重新进行。
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公开(公告)号：US20140130527A1
公开(公告)日：2014-05-15
申请号：US14001803
申请日：2012-03-05
申请人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
发明人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
IPC分类号： F25B49/02
CPC分类号： F25B49/022 , A01N63/02 , G01N33/5085
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
摘要翻译： 制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。 该系统采用多个传感器来监测和调节整个制冷剂供应，以向每个低温冰箱输送适当的制冷剂供应。 供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。 通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。 通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。 如果对制冷剂的总需求超过压缩机的容量，则调节多个冰箱内的冰箱的速度。
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公开(公告)号：US20110126554A1
公开(公告)日：2011-06-02
申请号：US12950080
申请日：2010-11-19
IPC分类号： F25B9/00
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译： 低温冰箱具有制冷缸和至少两个置换器。 每个置换器在制冷气瓶中往复运动，并使制冷气体通过制冷气瓶。 再生器冷却制冷气体，气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。 冰箱还具有可操作地连接到置换器的线性电动机，并且线性电动机以往复运动驱动置换器。 提供位置传感器以在往复运动期间确定置换器的参数。 控制器可操作地连接到线性电动机以控制线性电动机。 控制器在往复运动期间控制两个置换器的参数。 该参数可以是用于低温冰箱的温度控制的置换器的行程长度，行程速度，冲程相位或另一参数。 低温冰箱还可以包括消除振动的装置。
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