Metastable atom bombardment source
    6.
    发明授权
    Metastable atom bombardment source 失效
    亚稳原子轰击源

    公开(公告)号:US6124675A

    公开(公告)日:2000-09-26

    申请号:US88079

    申请日:1998-06-01

    CPC分类号: H01J49/102 H01J27/04

    摘要: The metastable atom bombardment source provides a charged particle free beam of metastable species that can be used to bombard and ionize organic and inorganic substances in a gas phase. The metastable atoms are produced by inducing a discharge in a gas (rare gases or small molecules). The discharge is curved between the cathode and anode, with the cathode located in a medium pressure zone and the anode located off-axis in a low pressure zone; A nozzle located between the cathode and the anode provides a collimated beam of metastable atoms of low kinetic energy that is directed at an ion volume containing the substances to be analyzed.

    摘要翻译: 亚稳态原子轰击源提供了一种可带电粒子的亚稳态物质束,可用于轰击和离子化气相中的有机和无机物质。 亚稳态原子通过在气体(稀有气体或小分子)中的排放而产生。 放电在阴极和阳极之间弯曲,阴极位于中压区域,阳极位于低压区域的轴外; 位于阴极和阳极之间的喷嘴提供准直的低动能的亚稳态原子束,其指向含有待分析物质的离子体积。