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1.发明授权Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces 有权用于在微型工件加工过程中增强传质的鞍座和外壳公开(公告)号：US07390383B2
公开(公告)日：2008-06-24
申请号：US10734098
申请日：2003-12-11
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.
摘要翻译： 公开了用于处理微特征工件的鞍座和外壳。 具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。 桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。 桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。 相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。 桨叶的往复行程可能会转移以进一步减少阴影。
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2.发明授权Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods 有权具有多个电极和/或封闭的往复式桨的反应器及相关方法公开(公告)号：US07390382B2
公开(公告)日：2008-06-24
申请号：US10734100
申请日：2003-12-11
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece. An electric field control element positioned between the electrodes and the workpiece circumferentially varies the effect of the thieving electrode current to account for effects created by elongated paddles as they oscillate proximate to the workpiece.
摘要翻译： 公开了具有多个电极和/或封闭的往复式叶片的反应器。 反应器可以包括与处理位置间隔开的多个电极，以提供靠近处理位置的虚拟电极，用于将材料转移到工件或从工件传送材料。 可以将磁体定位成靠近处理平面以定向沉积在工件上的感应敏感材料。 电极可以从反应器中移除，而不会使它们通过磁体，以减少电极和磁体之间的干扰。 工件可以由可旋转的工件支撑件承载以使工件定向以进行加工。 电极中的至少一个可以作为电流窃贼工作，以减少在工件周边处的终端效应。 定位在电极和工件之间的电场控制元件周向地改变了窃电电极电流的影响，以解决细长桨叶在靠近工件振荡时产生的效应。
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3.发明授权Integrated microfeature workpiece processing tools with registration systems for paddle reactors 有权集成的微型工件加工工具，具有桨式反应堆的配准系统公开(公告)号：US07393439B2
公开(公告)日：2008-07-01
申请号：US10733807
申请日：2003-12-11
CPC分类号： C25D17/001 , C25D17/02 , C25D21/10
摘要： Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.
摘要翻译： 公开了具有配准系统的安装模块的工具。 安装模块包括用于精确定位处理室的定位元件和将工件移至和离开处理室的输送系统。 模块的定位元件之间的相对位置是固定的，使得当处理室被移除并被另一处理室更换时，输送系统不需要重新校准。 处理室包括用于在工件的处理表面处搅拌处理液体的桨装置。 处理室中的桨装置，处理室和电极被配置为减少由工件表面上的桨形成的电阴影的可能性，并且当桨叶往复运动时考虑对电场的三维效应 相对于工件。
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公开(公告)号：US07281741B2
公开(公告)日：2007-10-16
申请号：US10195137
申请日：2002-07-11
申请人： Daniel J. Woodruff , Thomas H. Oberlitner , Randy A. Harris , James J. Erickson , Douglas W. Carr
发明人： Daniel J. Woodruff , Thomas H. Oberlitner , Randy A. Harris , James J. Erickson , Douglas W. Carr
IPC分类号： B66C1/42
CPC分类号： H01L21/67259 , H01L21/68707 , Y10S294/907
摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
摘要翻译： 终端效应器可用于掌握微电子工件以便通过自动运输装置进行处理。 一个这样的端部执行器包括多个端部执行器和适于检测至少一个基台的工件的边缘的接合的检测器。 替代的末端执行器包括至少三个邻接部分，其中至少一个邻接部分弹性地连接到致动器，用于在缩回位置和展开位置之间移动，其中它接合工件。
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5.发明授权Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces 失效具有自动校准系统的集成工具和可互换的湿加工部件，用于加工微型工件公开(公告)号：US07313462B2
公开(公告)日：2007-12-25
申请号：US10860385
申请日：2004-06-03
IPC分类号： G06F19/00
CPC分类号： H01L21/6723 , B01D61/425 , C25D17/00 , H01L21/67005 , H01L21/6719 , H01L21/67742 , H01L21/68707
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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6.发明申请Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods 审中-公开用于处理微型工件的受保护磁体和磁体屏蔽以及相关的系统和方法公开(公告)号：US20080178460A1
公开(公告)日：2008-07-31
申请号：US11700263
申请日：2007-01-29
IPC分类号： H01S4/00
CPC分类号： H01L21/6723 , H01L21/67173 , H01L21/6719 , Y10T29/49002
摘要： Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods are disclosed. A tool in accordance with one embodiment includes a process chamber having a process location for processing microfeature workpieces, a support positioned to carry a microfeature workpiece at the process location, a transfer device movable relative to the support to move the microfeature workpieces to and from the support, and a magnet positioned adjacent to the process chamber to magnetically orient materials applied to the microfeature workpieces. The tool can include other features, including an enclosure positioned around the magnet to chemically isolate the magnet from chemicals delivered to and carried in the process chamber, a shield positioned between the magnet and the motion path of the transfer device, magnetically conductive return paths positioned proximate to the magnet, and/or shields positioned around the motors carried by the tool.
摘要翻译： 公开了用于处理微特征工件的保护磁体和磁体屏蔽以及相关的系统和方法。 根据一个实施例的工具包括具有用于处理微特征工件的处理位置的处理室，位于处理位置处承载微特征工件的支撑件，可相对于支撑件移动的传送装置，以将微特征工件移动到和/ 支撑件和邻近处理室定位的磁体，以磁性地定向施加到微特征工件上的材料。 该工具可以包括其他特征，包括围绕磁体定位的壳体，以将磁体与输送到处理室中并携带的化学物质隔离，位于磁体和传送装置的运动路径之间的屏蔽层，定位的导磁返回路径 靠近磁体，和/或由工具承载的电机周围的屏蔽件。
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公开(公告)号：US07334826B2
公开(公告)日：2008-02-26
申请号：US10194939
申请日：2002-07-11
CPC分类号： H01L21/67259 , H01L21/68707 , Y10S294/907 , Y10S414/141
摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of abutments and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments.
摘要翻译： 终端效应器可用于掌握微电子工件以便通过自动运输装置进行处理。 一个这样的端部执行器包括多个邻接件和适于检测至少一个邻接件的工件的边缘的接合的检测器。
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8.发明授权Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems 有权集成工具，可互换的湿加工部件，用于加工微型工件和自动校准系统公开(公告)号：US07198694B2
公开(公告)日：2007-04-03
申请号：US10861240
申请日：2004-06-03
申请人： Daniel J. Woodruff , Jeffry Alan Davis , Randy A. Harris , David P. Mattson , James J. Erickson , Matthew C. Egloff
发明人： Daniel J. Woodruff , Jeffry Alan Davis , Randy A. Harris , David P. Mattson , James J. Erickson , Matthew C. Egloff
IPC分类号： C23F1/00 , H01L21/306 , C25C7/00 , B05C9/00
CPC分类号： H01L21/6719
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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9.发明授权公开(公告)号：US06976822B2
公开(公告)日：2005-12-20
申请号：US10620326
申请日：2003-07-14
IPC分类号： H01L21/00 , H01L21/687 , B66C1/00
CPC分类号： H01L21/67265 , H01L21/68707 , Y10S294/907
摘要： Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention includes a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece. The body, for example, can be a paddle or a fork. The passive end-effector can also include a plurality of passive abutments that are carried by the body. The abutments are located along the circle, and the abutments are configured to support the workpiece in a plane spaced apart from the body. The abutments, for example, can each include an inclined surface that slopes downwardly toward a central region of the circle to support only the edge of the workpiece in a manner that suspends or otherwise spaces the workpiece in a plane that is spaced apart from the body. The passive end-effector can further include a sensor assembly that is carried by the body. The sensor includes an engagement member positioned at least partially within the circle, and the engagement member is configured to move generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector. The passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane of the workpiece.
摘要翻译： 用于处理具有围绕第一直径的周边边缘的微电子工件的被动端部执行器。 在一个实施例中，根据本发明的被动端部执行器包括主体，该主体具有沿着对应于工件的第一直径的圆的多个接触位置。 例如，身体可以是桨或叉子。 被动端部执行器还可以包括被身体携带的多个被动基台。 支座沿着圆形定位，并且支座构造成在与主体间隔开的平面中支撑工件。 例如，支座可以各自包括向圆形的中心区域向下倾斜的倾斜表面，以仅以工件的边缘方式支撑，该方式将工件悬挂在或以其它方式将物体间隔开在与主体间隔开的平面中 。 被动端部执行器还可以包括由身体承载的传感器组件。 传感器包括至少部分地定位在圆内的接合构件，并且接合构件构造成当工件被装载在末端执行器上并从其卸载时大致横向于平面移动。 被动端部执行器不包括对平行于工件平面的工件边缘施加力的有效构件。
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公开(公告)号：US09415172B2
公开(公告)日：2016-08-16
申请号：US13451212
申请日：2012-04-19
IPC分类号： A61M5/32
CPC分类号： A61M5/3245 , A61M5/3243 , A61M5/3275 , A61M2005/3114 , A61M2005/3126 , A61M2005/3253
摘要： The disclosure pertains to a safety syringe having a retractable needle shield which is capable of being retracted to expose the needle for use; being advanced to a needle shielding position; and, if desired, of being removed from the syringe with the shielded needle safely contained within the retractable needle shield via a frangible segment between the syringe barrel and the needle/needle shield components. The disclosure further pertains to a method of using the safety syringe having a retractable needle shield.
摘要翻译： 本发明涉及一种安全注射器，该安全注射器具有能够缩回以露出针头以便使用的可伸缩针罩; 前进到针屏蔽位置; 并且如果需要，从注射器中取出，其中屏蔽针通过注射器筒和针/针护罩部件之间的易碎部分安全地容纳在可缩回针护罩内。 本发明还涉及一种使用具有可伸缩针罩的安全注射器的方法。
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