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公开(公告)号：US06323616B1
公开(公告)日：2001-11-27
申请号：US09564300
申请日：2000-05-03
IPC分类号： B25J918
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus having input and output robotic systems directed by a programmed controller. Each system has components including a robot, a twist and rotate, and a carrier and automated carrier rail. The input system is for removing wafers from their wafer pod, placing them in the carrier and transporting them via the rail to a wafer processing area. The output system performs the reverse operation, taking wafers from a carrier following processing and placing them in a pod. Each robot includes a plurality of interconnected, articulated cantilevered arms. The last one of the arms has a wand on one end and a laser emitter detector on the other end, and operates in cooperation with the controller to provide location detection of system components. The controller also includes circuitry for sensing contact of the wand with an object by measuring the increased robot motor torque occurring upon contact. The controller is pre-programmed with approximate physical dimensions of the system components and their relative positions. The controller is additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data. The process of precision teaching/calibration begins by placing a pod calibration fixture on a pedestal. The controller then directs the input robot to sense the fixture position, which gives the controller precise data relating to the position of a pod on the pedestal. The robot then senses the position of the twist and rotate components. The process begins by sensing the height of two arms of the twist and rotate, and the controller adjusts the arm heights until they are level. The controller then directs the robot to sense the R and &thgr; dimensions of the twist and rotate, and these precise dimensions are saved in the controller.
摘要翻译： 具有由编程控制器引导的输入和输出机器人系统的晶片处理装置。 每个系统具有包括机器人，扭转和旋转以及载体和自动化载体轨道的部件。 输入系统用于从晶片盒中移除晶片，将它们放置在载体中并通过导轨传送到晶片处理区域。 输出系统执行反向操作，从处理后的载体中取出晶片并将其放入容器中。 每个机器人包括多个互连的铰接悬臂。 最后一个臂在一端具有一个魔杖，另一端具有激光发射器检测器，并与控制器协同工作，以提供系统组件的位置检测。 控制器还包括用于通过测量接触时发生的增加的机器人马达扭矩来感测魔杖与物体的接触的电路。 控制器预编程有系统组件的近似物理尺寸及其相对位置。 控制器还被编程为自动执行精密校准/教学程序以收集更精确的位置数据。 精确教学/校准的过程开始于将荚式校准夹具放置在基座上。 然后，控制器引导输入机器人感测夹具位置，这为控制器提供与基座上的荚的位置有关的精确数据。 机器人然后感测扭转的位置并旋转部件。 该过程通过感测扭转和旋转的两个臂的高度开始，并且控制器调整臂高度直到它们平坦。 然后，控制器引导机器人感测扭转的R和θ尺寸并旋转，并将这些精确的尺寸保存在控制器中。
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公开(公告)号：US06304051B1
公开(公告)日：2001-10-16
申请号：US09592314
申请日：2000-06-13
IPC分类号： B25J918
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Briefly, a preferred embodiment of the present invention includes a wafer carrier buffer for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer has a sliding carrier first input apparatus for taking a carrier from outside the buffer through a buffer input door and into the buffer interior. A buffer controller is included for directing robotic apparatus to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for delivery of wafers to processing. The robotic apparatus also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need of calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.
摘要翻译： 简而言之，本发明的优选实施例包括晶片载体缓冲器，用于存储多个载体，所述载体包含等待在相邻的晶片处理系统中进行处理的晶片，或等待从处理后的缓冲器中取出。 缓冲器具有滑动载体第一输入装置，用于通过缓冲器输入门将缓冲器外部的载体从缓冲器中取出并进入缓冲器内部。 包括一个缓冲控制器，用于引导机器人装置从输入装置中取出载体，并将其放置在多个载体存储位置中的所选择的一个，并从载体存储位置到第一输出，以将晶片传送到处理。 机器人装置还将空载体输送到用于从处理区域接收晶片的第二输入装置，以及用于将具有经处理的晶片的载体输送到第二滑动输出装置，以通过缓冲器输出门从缓冲器移除。 控制器被编程为引导所有载波存储位置和输入和输出位置的自动校准。 机器人装置包括用于检测由机器人在载体存放位置放置的校准夹具上的凸缘的位置的传感器。 凸缘精确地定位在固定装置上，以对应于每个载体上的类似凸缘，其用于与机器人装置上的用于移动载体的工具接合。 优选地通过引导机器人装置将校准夹具放置在需要校准的位置，然后用传感器装置感测夹具法兰的精确位置来进行校准。 然后，控制器计算将载波准确放置在该位置所需的坐标。 对于每个载波存储位置和输入和输出位置重复该过程。
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公开(公告)号：US06242879B1
公开(公告)日：2001-06-05
申请号：US09524025
申请日：2000-03-13
申请人： Paul Sagues , Robert T. Wiggers , Steven M. Kraft
发明人： Paul Sagues , Robert T. Wiggers , Steven M. Kraft
IPC分类号： G03B1910
CPC分类号： G03F7/7075 , H01L21/67766 , H01L21/67778
摘要： A method and apparatus for automatically calibrating the precise positioning of a wafer handling robot relative to a target structure is disclosed. The apparatus comprises a machine controller connected to robot having an end-effector with three degrees of movement. The controller has a memory with stored rough distance and geometrical data defining the general location of structural features of the target structure. The robot is programmed to move toward the target structure in a series of sequential movements, each movement culminating with the robot end-effector touching a preselected exterior feature of the target structure. Each touching of the end-effector is sensed and provides data for the controller which then calculates the precise location of the target structure. The data accumulated during a series of touching steps by the robot end-effector is utilized by the controller to provide a precise calibrated control program for future operation of the robot.
摘要翻译： 公开了一种用于自动校准晶片处理机器人相对于目标结构的精确定位的方法和装置。 该装置包括连接到机器人的机器控制器，其具有三个运动程度的末端执行器。 控制器具有存储有粗略距离的存储器和定义目标结构的结构特征的一般位置的几何数据。 机器人被编程为以一系列顺序移动朝着目标结构移动，每个运动最终导致机器人末端执行器接触目标结构的预选的外部特征。 检测到末端执行器的每次触摸并提供控制器的数据，然后控制器计算目标结构的精确位置。 由机器人末端执行器进行的一系列触摸步骤期间累积的数据由控制器利用，为机器人的未来操作提供精确的校准控制程序。
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公开(公告)号：US20120099239A1
公开(公告)日：2012-04-26
申请号：US13281394
申请日：2011-10-25
申请人： Paul Sagues , Mauritz Botha , Larry Brasfield
发明人： Paul Sagues , Mauritz Botha , Larry Brasfield
IPC分类号： H01H47/00
CPC分类号： H01F7/064 , H01F7/1805 , H01F2007/062
摘要： A configurable, connectorized method and apparatus for driving a solenoid coil reduces energy consumption and heating of the solenoid coil, allows detection of the solenoid state, and simplifies connections to the solenoid.
摘要翻译： 用于驱动螺线管线圈的可配置的，连接的方法和装置降低了电磁线圈的能量消耗和加热，允许检测螺线管状态，并且简化了与螺线管的连接。
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公开(公告)号：US20070255879A1
公开(公告)日：2007-11-01
申请号：US11801127
申请日：2007-05-07
申请人： Paul Sagues , Larry Brasfield
发明人： Paul Sagues , Larry Brasfield
IPC分类号： G06F13/00
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.
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6.发明申请System for programmed control of signal input and output to and from cable conductors 有权用于编程控制信号输入和输出到电缆导体的系统公开(公告)号：US20060155900A1
公开(公告)日：2006-07-13
申请号：US11296134
申请日：2005-12-06
申请人： Paul Sagues , Larry Brasfield
发明人： Paul Sagues , Larry Brasfield
IPC分类号： G06F13/38
CPC分类号： G05B19/0423 , G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144 , G05B2219/21116 , G05B2219/25258 , G05B2219/25321
摘要： An input/output module for implementing directions from a controller for sending and receiving signals to and from devices. The input/output module includes a microprocessor for communication with, and receiving programming from the controller. The input/output module further includes device communication connectors, each having number of pins, each pin for interconnection with a cable conductor to a device. The input/output module has an ASIC for each of the pins, providing a controlled interface with the corresponding pin. Each ASIC has interconnection apparatus, selectable by the microprocessor for providing a particular interface with the pin served by the ASIC.
摘要翻译： 一个输入/输出模块，用于实现来自控制器的方向，用于向设备发送和接收信号。 输入/输出模块包括用于与控制器进行通信和从控制器接收编程的微处理器。 输入/输出模块还包括每个具有多个引脚的设备通信连接器，每个引脚用于将电缆导体与设备互连。 输入/输出模块具有针对每个引脚的ASIC，为相应引脚提供受控接口。 每个ASIC具有互连装置，可由微处理器选择，以提供由ASIC服务的引脚的特定接口。
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公开(公告)号：US4619237A
公开(公告)日：1986-10-28
申请号：US799277
申请日：1985-11-18
CPC分类号： F02D31/001 , F02D41/06
摘要： A method and apparatus for starting a cold internal combustion engine under optimum conditions. Engine r.p.m. is maintained to a desired value until either the car is started, driven, or the temperature of the engine reaches a predetermined value, whichever first occurs. During this time, the ratio between the air and fuel fed to the engine is kept at the optimum values corresponding to the prevailing engine conditions during this time.
摘要翻译： 一种在最佳条件下启动冷内燃机的方法和装置。 发动机转速 被保持到期望值，直到轿厢开始，被驱动，或者发动机的温度达到预定值，无论哪一个发生。 在此期间，供给发动机的空气和燃料之间的比例保持在与此时间内的主要发动机条件相对应的最佳值。
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公开(公告)号：US07822896B1
公开(公告)日：2010-10-26
申请号：US12106968
申请日：2008-04-21
申请人： Paul Sagues , Larry Brasfield , Peter K. Moy
发明人： Paul Sagues , Larry Brasfield , Peter K. Moy
IPC分类号： G06F13/00
CPC分类号： G05B19/054 , G05B2219/1105 , G05B2219/1138 , G05B2219/1144
摘要： An input/output module includes a device communication connector apparatus for connecting at least one conductor between the module and at least one device and interface apparatus for causing the module to place any of a plurality of signals on any of a plurality of contacts of the device communication connector apparatus. The interface apparatus includes at least one electronic integrated circuit providing a selectable interconnection apparatus to a particular one of the contacts. The interface apparatus is configurable by a user of the module. A method of configuring the module includes providing inputs on a personal computer, communicating with a web server embedded in the module, to determine a specific interconnection apparatus for each of the contacts.
摘要翻译： 输入/输出模块包括用于连接模块与至少一个设备和接口设备之间的至少一个导线的设备通信连接器设备，用于使模块将多个信号中的任何一个放置在设备的多个触点中的任何一个上 通信连接器装置。 接口装置包括至少一个电子集成电路，其向特定的一个触点提供可选择的互连装置。 接口装置可由模块的用户配置。 配置模块的方法包括在个人计算机上提供输入，与嵌入模块中的网络服务器通信，以确定每个联系人的特定互连装置。
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公开(公告)号：US5410373A
公开(公告)日：1995-04-25
申请号：US115541
申请日：1993-09-02
申请人： Paul Sagues , Steven M. Kraft
发明人： Paul Sagues , Steven M. Kraft
IPC分类号： H04N5/645
CPC分类号： H04N5/645
摘要： An electronic chassis is disclosed for supporting components such as a CRT device or flat panel display unit and adapted for installation through an opening in a cabinet without requiring access from within the cabinet to secure the chassis in place. The frontal end of the chassis has flange members on opposite sides which fit against the cabinet surface around its opening. One side of the chassis frontal end has a movable retainer means controlled by one or more drive screws that can be adjusted to grip one side of the cabinet opening. Continued actuation of the drive screws moves the chassis into locking contact with a fixed retainer means on the opposite side of the chassis. A bezel frame member attached to the frontal end of the chassis covers the drive screws but has access holes to facilitate their adjustment, and gaskets are provided on the bezel frame to prevent moisture from entering the chassis or the cabinet opening.
摘要翻译： 公开了一种用于支撑诸如CRT设备或平板显示单元的部件的电子底盘，并且适于通过机柜中的开口进行安装，而不需要从机柜内进入，以将机架固定就位。 底盘的前端在相对侧上具有法兰构件，该凸缘构件围绕其开口的机壳表面配合。 底盘前端的一侧具有由一个或多个驱动螺钉控制的可移动的保持器装置，该驱动螺杆可被调整以夹紧机壳开口的一侧。 驱动螺钉的继续致动将机架移动到与底盘相对侧的固定保持器装置的锁定接触。 安装在机箱正面的挡板框架部件覆盖驱动螺钉，但有进出孔便于调节，并且垫圈框架上设有垫片，以防止潮气进入底盘或机柜开口。
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10.发明授权
公开(公告)号：US4639884A
公开(公告)日：1987-01-27
申请号：US586250
申请日：1984-03-05
申请人： Paul Sagues
发明人： Paul Sagues
IPC分类号： G01D5/245 , G01P3/481 , G01P3/489 , G01P13/04 , G05B19/21 , G05B19/414 , G05D3/12 , G05D13/62 , G01P3/42 , G06F15/20
CPC分类号： G05B19/21 , G01P13/045 , G05B19/4142 , G05B2219/34006 , G05B2219/34242 , G05B2219/35238 , G05B2219/37152 , G05B2219/37313 , G05B2219/42212
摘要： Method and apparatus for measuring the velocity, whether rotary or reciprocating, of a servo shaft driven by a motor, without employing a tachometer. From the movement of the shaft is produced a pair of signals in quadrature, with transitions expressible in Gray code for one cycle as 00, 01, 11, 10 and then back to 00. Meanwhile, a clock provides a large number of evenly spaced counts per selected quadrature transitions. The number of counts between two selected quadrature transitions is read and the total number of quadrature transitions between the selected transitions is divided by the total number of counts during the same time.
摘要翻译： 用于测量由电机驱动的伺服轴的速度（无论是旋转还是往复运动）的方法和装置，而不使用转速计。 从轴的运动产生正交的一对信号，其中格雷码中的转换可以一个周期表示为00,01,11,10，然后返回到00.同时，时钟提供大量均匀间隔的计数 每个选择的正交转换。 读取两个所选正交转换之间的计数数，并将所选转换之间的正交转换总数除以同一时间内的总计数。
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