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公开(公告)号：US08493157B2
公开(公告)日：2013-07-23
申请号：US12999716
申请日：2009-06-18
IPC分类号： H03H9/46 , H01L41/107
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译： 一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。 该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为 产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。 该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。 在第一检测电极处检测第一交流信号。
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公开(公告)号：US20110102095A1
公开(公告)日：2011-05-05
申请号：US12999716
申请日：2009-06-18
IPC分类号： H03C1/46
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译： 一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。 该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为 产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。 该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。 在第一检测电极处检测第一交流信号。
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公开(公告)号：US08716619B2
公开(公告)日：2014-05-06
申请号：US13306675
申请日：2011-11-29
IPC分类号： H01H13/62
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.
摘要翻译： 一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。 下部致动电极布置在衬底上方。 可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。 使用三条更多的信号线使得能够实现对称的致动力，或者使单个可移动电极或两者都能实现多个开关功能。
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公开(公告)号：US20120091546A1
公开(公告)日：2012-04-19
申请号：US13265535
申请日：2010-04-20
申请人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
发明人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译： 麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。 麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。 通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。
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公开(公告)号：US20120286846A1
公开(公告)日：2012-11-15
申请号：US13105591
申请日：2011-05-11
申请人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
发明人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
IPC分类号： H03K17/00
CPC分类号： H01H59/0009
摘要： A switching circuit employs switches operating at low on resistance and high off capacitance. In connection with various example embodiments, a switching circuit selectively couples a communication port to one of two or more internal circuits based upon a type of input at the communication port. A sensor circuit senses the type of the input and, based upon the sensed input type, actuates one or more switches in the switching circuit.
摘要翻译： 开关电路采用工作在低导通电阻和高关断电容的开关。 结合各种示例实施例，切换电路基于通信端口处的输入类型，将通信端口选择性地耦合到两个或多个内部电路中的一个。 传感器电路感测输入的类型，并且基于所感测的输入类型来驱动开关电路中的一个或多个开关。
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公开(公告)号：US20120305374A1
公开(公告)日：2012-12-06
申请号：US13306675
申请日：2011-11-29
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode.The use of three of more signal lines enables a symmetrical actuation force to be achieved, and/or enables multiple switch functions to be implemented by the single movable electrode.
摘要翻译： 一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。 下部致动电极布置在衬底上方。 可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。 使用三条更多的信号线使得能够实现对称的致动力，和/或使单个可移动电极实现多个开关功能。
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公开(公告)号：US08833171B2
公开(公告)日：2014-09-16
申请号：US13592570
申请日：2012-08-23
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译： 可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。 膜在其中具有多个开口，其将气体进入和离开室。 当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。 传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。
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公开(公告)号：US08027143B2
公开(公告)日：2011-09-27
申请号：US12090004
申请日：2006-10-10
CPC分类号： H01G5/16
摘要： A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.
摘要翻译： 微机电装置具有基板（60），可移动元件（15），布置在基板上的一对电极（40）和用于移动可移动元件的可移动元件，以及控制器（50） 电极。 为了将可移动元件移动到中间位置，在运动期间施加一个或多个脉冲，定时以补偿运动的低于或超过阻尼。 这可以减少稳定延迟。 它可以应用于可调谐RF电容。 为了控制间隙的减小，最大电源电平的单个脉冲补偿器件的固有慢度和过阻尼。 为了补偿在阻尼下，脉冲具有对应于谐振频率的周期，并且包括高于和低于最终供应水平的峰谷，使得连续的峰和谷更靠近给定的供给水平。
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公开(公告)号：US08018307B2
公开(公告)日：2011-09-13
申请号：US10561854
申请日：2004-06-23
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2059/0027 , H01H2059/0045
摘要： The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
摘要翻译： 本发明的MEMS元件具有第一，第二和第三中间第三电极。 给予增加的动态范围，其中由第二和第三电极构成的可切换电容器设置在输入和输出之间的信号路径中，并且由第一和第三电极构成的可切换电容器设置在信号路径和 地面。 本发明的MEMS元件非常适合于集成在无源元件网络中。
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公开(公告)号：US20090201623A1
公开(公告)日：2009-08-13
申请号：US11913285
申请日：2006-04-21
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0072 , Y10T29/435
摘要： The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
摘要翻译： 本发明提供一种包括垂直集成去耦电容器（14）的电容式RF-MEMS器件。 因此，去耦电容器（14）不占用额外的面积。 此外，根据本发明的RF-MEMS需要更少的互连，这也节省了空间，并且降低了RF路径中的串联电感/电阻。
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