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公开(公告)号：US20120187507A1
公开(公告)日：2012-07-26
申请号：US13263746
申请日：2010-04-07
CPC分类号： H03H3/0076 , H03H9/2405 , H03H9/2457 , H03H2009/02496 , H03H2009/02503
摘要： A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency.
摘要翻译： 体声模式MEMS谐振器具有具有第一物理布局的第一部分和布局修改特征。 谐振频率是物理布局的函数，其被设计为使得对于50nm的谐振器形状边缘的边缘位置的变化，频率变化小于150ppm。 该设计结合了至少两种不同的布局特征，使得小边缘位置变化（由不可控过程变化引起）对共振频率具有可忽略的影响。
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公开(公告)号：US20100283353A1
公开(公告)日：2010-11-11
申请号：US12601038
申请日：2008-05-28
IPC分类号： H03H9/24
CPC分类号： H03H9/2452 , H03H9/02244 , H03H9/02259 , H03H2009/02488 , H03H2009/02496
摘要： A MEMS piezoresistive resonator (8, 78) is driven at a higher order eigenmode (32) than the fundamental eigenmode (31). The route of flow of a sense current (22) is arranged in relation to a characteristic of the higher order eigenmode (32), for example by being at a point of maximum displacement (50) or at a point of maximum rate of change with respect to distance (x) of displacement of the higher order eigenmode (32). The route of flow of the sense current (22) may be arranged by fabricating the MEMS piezoresistive resonator (8, 78) with a trench (15) formed between two beams (11, 12) of the MEMS piezoresistive resonator (8, 78), the end of the trench being located at the above mentioned position.
摘要翻译： MEMS压阻谐振器（8,78）以比基本本征模式（31）高的本征模式（32）被驱动。 感测电流（22）的流动路径相对于高阶本征模式（32）的特性被布置，例如通过位于最大位移（50）的点或最大变化速度的点处， 相对于高阶本征模式（32）的位移距离（x）。 感测电流（22）的流动路径可以通过用形成在MEMS压阻谐振器（8,78）的两个光束（11,12）之间的沟槽（15）制造MEMS压阻谐振器（8,78）来布置， 沟槽的端部位于上述位置。
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公开(公告)号：US08294534B2
公开(公告)日：2012-10-23
申请号：US12888185
申请日：2010-09-22
申请人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
发明人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2447 , H03H9/2473 , H03H9/2489
摘要： A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam.
摘要翻译： 一种谐振器，包括由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的梁，以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料， 所述第二温度系数至少在所述谐振器的操作条件下与所述第一温度系数的符号相反，其中所述第一材料的横截面积与所述第二材料的横截面面积的比率沿着所述梁的长度变化 横截面面积基本上垂直于梁测量。
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公开(公告)号：US08902022B2
公开(公告)日：2014-12-02
申请号：US13430275
申请日：2012-03-26
CPC分类号： H03H9/02259 , H03H9/02433 , H03H9/2452 , H03H2009/02251 , H03H2009/02488
摘要： A resonator comprising a resonator body and actuation electrodes for driving the resonator into a resonant mode, in which the resonator body vibrates parallel to a first axis. The resonator comprises means to apply a voltage to the resonator in a direction perpendicular to the first axis direction. This serves to shift the frequency of resonant modes other than the principal resonant mode, and this allows increased amplitude of output signal from the resonator.
摘要翻译： 一种谐振器，包括谐振器体和用于将谐振器驱动到共振模式的致动电极，其中谐振器体平行于第一轴振动。 谐振器包括在垂直于第一轴线方向的方向上向谐振器施加电压的装置。 这用于移动主谐振模式以外的谐振模式的频率，并且这允许来自谐振器的输出信号的幅度增加。
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公开(公告)号：US08854150B2
公开(公告)日：2014-10-07
申请号：US13446894
申请日：2012-04-13
CPC分类号： H03H9/02433 , H03H9/02338 , H03H9/2452 , H03H2009/02456 , H03H2009/02488
摘要： A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.
摘要翻译： 一种谐振器，其中除了在节点处的正常锚固件之外，提供第二锚定装置以及在谐振器本体和第二锚定装置之间的相关联的连接臂。 连接臂在非节点处连接到谐振器体，使得它不连接到形成固定连接的正常位置。 连接臂用于抑制横向振动模式。
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公开(公告)号：US08432233B2
公开(公告)日：2013-04-30
申请号：US13161818
申请日：2011-06-16
IPC分类号： H03B5/30 , H01L41/053 , H03H9/17
CPC分类号： H03H3/0076 , H03H9/2452 , H03H2009/02251 , H03H2009/0233
摘要： A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width.
摘要翻译： 从锚固器悬挂的微机电谐振器。 谐振器具有：长度; 距离锚的第一距离处的第一宽度; 并且距离锚的第二宽度更大。 第二宽度大于第一宽度，并且谐振器的宽度沿其长度的至少一部分从第二宽度逐渐逐渐变细到第一宽度。
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公开(公告)号：US20110127625A1
公开(公告)日：2011-06-02
申请号：US12888185
申请日：2010-09-22
申请人： Casper van der AVOORT , Jozef Thomas Martinus van BEEK , Johannes van WINGERDEN , Joep BONTEMPS , Robert James Pascoe LANDER
发明人： Casper van der AVOORT , Jozef Thomas Martinus van BEEK , Johannes van WINGERDEN , Joep BONTEMPS , Robert James Pascoe LANDER
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2447 , H03H9/2473 , H03H9/2489
摘要： A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam.
摘要翻译： 一种谐振器，包括由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的梁，以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料， 所述第二温度系数至少在所述谐振器的操作条件下与所述第一温度系数的符号相反，其中所述第一材料的横截面积与所述第二材料的横截面面积的比率沿着所述梁的长度变化 横截面面积基本上垂直于梁测量。
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公开(公告)号：US20120262242A1
公开(公告)日：2012-10-18
申请号：US13446894
申请日：2012-04-13
IPC分类号： H03B28/00
CPC分类号： H03H9/02433 , H03H9/02338 , H03H9/2452 , H03H2009/02456 , H03H2009/02488
摘要： A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.
摘要翻译： 一种谐振器，其中除了在节点处的正常锚固件之外，提供第二锚定装置以及在谐振器本体和第二锚定装置之间的相关联的连接臂。 连接臂在非节点处连接到谐振器体，使得它不连接到形成固定连接的正常位置。 连接臂用于抑制横向振动模式。
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公开(公告)号：US20120249265A1
公开(公告)日：2012-10-04
申请号：US13430275
申请日：2012-03-26
IPC分类号： H03H9/00
CPC分类号： H03H9/02259 , H03H9/02433 , H03H9/2452 , H03H2009/02251 , H03H2009/02488
摘要： A resonator comprising a resonator body and actuation electrodes for driving the resonator into a resonant mode, in which the resonator body vibrates parallel to a first axis. The resonator comprises means to apply a voltage to the resonator in a direction perpendicular to the first axis direction. This serves to shift the frequency of resonant modes other than the principal resonant mode, and this allows increased amplitude of output signal from the resonator.
摘要翻译： 一种谐振器，包括谐振器体和用于将谐振器驱动到共振模式的致动电极，其中谐振器体平行于第一轴振动。 谐振器包括在垂直于第一轴线方向的方向上向谐振器施加电压的装置。 这用于移动主谐振模式以外的谐振模式的频率，并且这允许来自谐振器的输出信号的幅度增加。
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公开(公告)号：US20120091546A1
公开(公告)日：2012-04-19
申请号：US13265535
申请日：2010-04-20
申请人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
发明人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译： 麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。 麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。 通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。
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