公开(公告)号：US5808413A

公开(公告)日：1998-09-15

申请号：US966551

申请日：1997-11-10

申请人： Petrus Franciscus Gerardus Bongaerts ,  Henri R. J. R. Van Helleputte ,  Adrianus Leonardus Josephus Burgmans ,  Jacob Bruinink ,  Babar Ali Khan ,  Karel Elbert Kuijk

发明人： Petrus Franciscus Gerardus Bongaerts ,  Henri R. J. R. Van Helleputte ,  Adrianus Leonardus Josephus Burgmans ,  Jacob Bruinink ,  Babar Ali Khan ,  Karel Elbert Kuijk

IPC分类号： G02F1/133 ,  H01J5/48 ,  H01J5/08

CPC分类号： G02F1/13334

摘要： A flat display device preferably of the PALC type in which the plasma channels are defined by walls of an organic material, preferably a polyimide material. A protective layer is provided over the polyimide walls to prevent deterioration. Spaced electrode portions are preferably provided on facing surfaces of the walls. The preferred method is to lay down a thick layer of polyimide material and a thin resist over the polyimide layer, pattern the resist, and then use the resist to pattern the polyimide layer in the shape of the desired walls. The walls are then covered with a thin dielectric sheet-like member to form the plasma channels.

摘要翻译： 优选为PALC型的平面显示装置，其中等离子体通道由有机材料的壁，优选聚酰亚胺材料限定。 在聚酰亚胺壁上设置保护层以防止劣化。 间隔电极部优选设置在壁的相对表面上。 优选的方法是在聚酰亚胺层上铺设厚层聚酰亚胺材料和薄抗蚀剂，对抗蚀剂进行图案化，然后使用抗蚀剂将聚酰亚胺层图案化成所需壁的形状。 然后用薄的电介质片状构件覆盖壁以形成等离子体通道。

公开(公告)号：US06225029B1

公开(公告)日：2001-05-01

申请号：US09061813

申请日：1998-04-16

申请人： Petrus Franciscus Gerardus Bongaerts ,  Henri R. J. R. Van Helleputte ,  Adrianus Leonardus Josephus Burgmans ,  Jacob Bruinink ,  Babar Ali Khan ,  Karel Elbert Kuijk

发明人： Petrus Franciscus Gerardus Bongaerts ,  Henri R. J. R. Van Helleputte ,  Adrianus Leonardus Josephus Burgmans ,  Jacob Bruinink ,  Babar Ali Khan ,  Karel Elbert Kuijk

IPC分类号： G03F700

CPC分类号： G02F1/13334

摘要： An electronic array of data elements, in particular, a flat display device preferably of the PALC type in which the plasma channels are defined by walls of an organic material, preferably a polyimide material. A protective layer is provided over the polyimide walls to prevent deterioration. Spaced electrode portions are preferably provided on facing surfaces of the walls. The preferred method is to lay down a thick layer of polyimide material and a thin resist over the polyimide layer, pattern the resist, and then use the resist to pattern the polyimide layer in the shape of the desired walls. The walls are then covered with a thin dielectric sheet-like member to form the plasma channels.

摘要翻译： 数据元件的电子阵列，特别是优选为PALC型的平面显示装置，其中等离子体通道由有机材料的壁，优选聚酰亚胺材料限定。 在聚酰亚胺壁上设置保护层以防止劣化。 间隔电极部优选设置在壁的相对表面上。 优选的方法是在聚酰亚胺层上铺设厚层聚酰亚胺材料和薄抗蚀剂，对抗蚀剂进行图案化，然后使用抗蚀剂以所需壁的形状对聚酰亚胺层进行图案化。 然后用薄的电介质片状构件覆盖壁以形成等离子体通道。

公开(公告)号：US5868811A

公开(公告)日：1999-02-09

申请号：US911080

申请日：1997-08-14

申请人： Babar Ali Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Petrus F. G. Bongaerts ,  Karel Elbert Kuijk ,  Jacob Bruinink

发明人： Babar Ali Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Petrus F. G. Bongaerts ,  Karel Elbert Kuijk ,  Jacob Bruinink

IPC分类号： G02F1/1333 ,  G02F1/133 ,  G02F1/1343 ,  G09F9/35 ,  H01J9/02 ,  H01J11/02 ,  H01J17/04 ,  H01J17/16 ,  C03B23/20

CPC分类号： G02F1/13334 ,  Y10S65/04

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching in a substrate laterally-spaced channels and bonding a thin dielectric sheet over the etched substrate. Adjoining each of the channels are shallow ledges, also formed by etching, which serve as recessed areas to receive enlarged ends serving as contact pads for each of the electrodes. Holes are formed in the thin dielectric sheet and contact material deposited on the bonded thin dielectric sheet such that the deposited material makes electrical contact with the underlying electrode contact pads and seals off the holes, which allows a plasma-forming atmosphere to be provided in the channels. This arrangement results in a glass-to-glass interface between the substrate and the thin dielectric sheet, which allows anodic bonding to be employed to assemble the two elements and thus eliminates the frit glass sealing process required in other constructions.

摘要翻译： 优选为PALC型的平面显示装置，其中等离子体通道是通过在衬底中横向隔开的通道进行蚀刻而形成的，并且在蚀刻的衬底上粘合薄的电介质片。 每个通道是相邻的，也是通过蚀刻形成的浅凸缘，其用作凹陷区域以接收用作每个电极的接触焊盘的放大端。 孔形成在沉积在粘结薄电介质片上的薄电介质片和接触材料中，使得沉积的材料与下面的电极接触垫电接触并密封孔，这允许在等离子体形成气氛中提供等离子体形成气氛 频道 这种布置导致基板和薄电介质片之间的玻璃 - 玻璃界面，这允许阳极结合用于组装两个元件，从而消除了其它结构中所需的玻璃料密封过程。

公开(公告)号：US5764001A

公开(公告)日：1998-06-09

申请号：US573742

申请日：1995-12-18

申请人： Babar Ali Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Petrus F. G. Bongaerts ,  Karel Elbert Kuijk ,  Jacob Bruinink

发明人： Babar Ali Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Petrus F. G. Bongaerts ,  Karel Elbert Kuijk ,  Jacob Bruinink

IPC分类号： G02F1/1333 ,  G02F1/133 ,  G02F1/1343 ,  G09F9/35 ,  H01J9/02 ,  H01J11/02 ,  H01J17/04 ,  H01J17/16

CPC分类号： G02F1/13334 ,  Y10S65/04

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching in a substrate laterally-spaced channels and bonding a thin dielectric sheet over the etched substrate. Adjoining each of the channels are shallow ledges, also formed by etching, which serve as recessed areas to receive enlarged ends serving as contact pads for each of the electrodes. Holes are formed in the thin dielectric sheet and contact material deposited on the bonded thin dielectric sheet such that the deposited material makes electrical contact with the underlying electrode contact pads and seals off the holes, which allows a plasma-forming atmosphere to be provided in the channels. This arrangement results in a glass-to-glass interface between the substrate and the thin dielectric sheet, which allows anodic bonding to be employed to assemble the two elements and thus eliminates the frit glass sealing process required in other constructions.

摘要翻译： 优选为PALC型的平面显示装置，其中等离子体通道是通过在衬底中横向隔开的通道进行蚀刻而形成的，并且在蚀刻的衬底上粘合薄的电介质片。 每个通道是相邻的，也是通过蚀刻形成的浅凸缘，其用作凹陷区域以接收用作每个电极的接触焊盘的放大端部。 孔形成在沉积在粘结薄电介质片上的薄电介质片和接触材料中，使得沉积的材料与下面的电极接触垫电接触并密封孔，这允许在等离子体形成气氛中提供等离子体形成气氛 频道 这种布置导致基板和薄介电片之间的玻璃 - 玻璃界面，其允许使用阳极接合来组装两个元件，从而消除了其它结构中所需的玻璃料密封过程。

公开(公告)号：US06517402B1

公开(公告)日：2003-02-11

申请号：US09911054

申请日：2001-07-23

申请人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

发明人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

IPC分类号： H01J924

CPC分类号： G02F1/13334

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the-etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

摘要翻译： 优选为PALC型的平面显示装置，其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道，将薄的电介质薄片附着在蚀刻的间隔板上，并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间，间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间，从而提供玻璃 - 玻璃界面，可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基底或薄介电覆盖片上，并使用蚀刻停止层原位蚀刻以防止蚀刻基底或薄的介电覆盖片来简化蚀刻。 在一个修改中，通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片，使得在蚀刻之后，沉积层或多层保持为 薄通道盖。

公开(公告)号：US06579462B2

公开(公告)日：2003-06-17

申请号：US09875535

申请日：2001-06-06

申请人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Thomas Stanley Buzak ,  Kevin John Ilcisin ,  Paul Christopher Martin

发明人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Thomas Stanley Buzak ,  Kevin John Ilcisin ,  Paul Christopher Martin

IPC分类号： H01J162

CPC分类号： G02F1/13334 ,  G02F1/13394

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. In a modification, strengthening crossbars are formed between adjacent flanking walls.

公开(公告)号：US06285127B1

公开(公告)日：2001-09-04

申请号：US09096073

申请日：1998-06-11

申请人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

发明人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

IPC分类号： H01J1749

CPC分类号： G02F1/13334

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

摘要翻译： 优选为PALC型的平面显示装置，其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道，将薄的电介质薄片附着在蚀刻的间隔板上，并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间，间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间，从而提供玻璃 - 玻璃界面，可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中，通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片，使得在蚀刻之后，沉积层或多层保持为 薄通道盖。

公开(公告)号：US06433471B1

公开(公告)日：2002-08-13

申请号：US08588800

申请日：1996-01-19

申请人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Thomas Stanley Buzak ,  Kevin John Ilcisin ,  Paul Christopher Martin

发明人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Thomas Stanley Buzak ,  Kevin John Ilcisin ,  Paul Christopher Martin

IPC分类号： H01J162

CPC分类号： G02F1/13334 ,  G02F1/13394

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. In a modification, strengthening crossbars are formed between adjacent flanking walls.

摘要翻译： 优选为PALC型的平面显示装置，其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道，将薄的电介质薄片附着在蚀刻的间隔板上，并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间，间隔板中相邻的侧壁和薄介电片的上部形成。 在一个修改中，在相邻侧壁之间形成加强横梁。

公开(公告)号：US5804920A

公开(公告)日：1998-09-08

申请号：US588799

申请日：1996-01-19

申请人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

发明人： Babar A. Khan ,  Henri R. J. R. Van Helleputte ,  Adrianus L. J. Burgmans ,  Karel Elbert Kuijk ,  Petrus F. G. Bongaerts ,  Jacob Bruinink

IPC分类号： G02F1/133 ,  H01J17/49

CPC分类号： G02F1/13334

摘要： A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

摘要翻译： 优选为PALC型的平面显示装置，其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道，将薄的电介质薄片附着在蚀刻的间隔板上，并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间，间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间，从而提供玻璃 - 玻璃界面，可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中，通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片，使得在蚀刻之后，沉积层或多层保持为 薄通道盖。

公开(公告)号：US5596431A

公开(公告)日：1997-01-21

申请号：US413052

申请日：1995-03-29

申请人： Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Adrianus L. J. Burgmans ,  Henri R. J. R. Van Helleputte ,  Babar A. Khan ,  Karel E. Kuijk

发明人： Petrus F. G. Bongaerts ,  Jacob Bruinink ,  Adrianus L. J. Burgmans ,  Henri R. J. R. Van Helleputte ,  Babar A. Khan ,  Karel E. Kuijk

IPC分类号： G02F1/1333 ,  G02F1/133 ,  G02F1/1345 ,  G09F9/35 ,  H01J17/04 ,  H05K3/10 ,  G02F1/13 ,  G09G3/22

CPC分类号： G02F1/13334 ,  H05K3/107

摘要： A method for making an electrical device such as a PALC display device, and the electrical device or PALC device so made, in which a channel plate is provided with substantially vertical side walls, and the electrodes are formed by a self-aligning anisotropic plasma etching process which requires no photolithography. A similar process may be used to form a fanout region for individual contacting of channel electrodes. For improved contacting, preferably the fanout region is also channelled and an upstanding structure such as columns provided in the fanout channels so that the spaces between the columns and between the columns and the side walls are filled up with deposited metal that remains following the anisotropic etching process.

摘要翻译： 一种用于制造诸如PALC显示装置的电气装置的方法，以及如此制造的电气装置或PALC装置，其中通道板设置有基本上垂直的侧壁，并且电极通过自对准各向异性等离子体蚀刻 不需要光刻的工艺。 可以使用类似的过程来形成用于沟道电极的单独接触的扇出区域。 为了改善接触，优选地，扇出区也被引导，并且在扇出通道中设置直立结构，例如柱，使得柱之间和柱与侧壁之间的空间被填充有保留在各向异性蚀刻之后的沉积金属 处理。