Plasma addressed liquid crystal display with etched glass spacers
    3.
    发明授权
    Plasma addressed liquid crystal display with etched glass spacers 失效
    等离子体寻址液晶显示屏与蚀刻玻璃间隔

    公开(公告)号:US06517402B1

    公开(公告)日:2003-02-11

    申请号:US09911054

    申请日:2001-07-23

    IPC分类号: H01J924

    CPC分类号: G02F1/13334

    摘要: A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the-etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

    摘要翻译: 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基底或薄介电覆盖片上,并使用蚀刻停止层原位蚀刻以防止蚀刻基底或薄的介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。

    Plasma addressed liquid crystal display with etched glass spacers
    4.
    发明授权
    Plasma addressed liquid crystal display with etched glass spacers 失效
    等离子体寻址液晶显示屏与蚀刻玻璃间隔

    公开(公告)号:US06285127B1

    公开(公告)日:2001-09-04

    申请号:US09096073

    申请日:1998-06-11

    IPC分类号: H01J1749

    CPC分类号: G02F1/13334

    摘要: A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

    摘要翻译: 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。

    Plasma addressed liquid crystal display with etched glass spacers
    5.
    发明授权
    Plasma addressed liquid crystal display with etched glass spacers 失效
    等离子体寻址液晶显示屏与蚀刻玻璃间隔

    公开(公告)号:US5804920A

    公开(公告)日:1998-09-08

    申请号:US588799

    申请日:1996-01-19

    IPC分类号: G02F1/133 H01J17/49

    CPC分类号: G02F1/13334

    摘要: A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

    摘要翻译: 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。

    Method of making a channel plate for a flat display device
    6.
    发明授权
    Method of making a channel plate for a flat display device 失效
    制造平板显示装置的通道板的方法

    公开(公告)号:US5868811A

    公开(公告)日:1999-02-09

    申请号:US911080

    申请日:1997-08-14

    CPC分类号: G02F1/13334 Y10S65/04

    摘要: A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching in a substrate laterally-spaced channels and bonding a thin dielectric sheet over the etched substrate. Adjoining each of the channels are shallow ledges, also formed by etching, which serve as recessed areas to receive enlarged ends serving as contact pads for each of the electrodes. Holes are formed in the thin dielectric sheet and contact material deposited on the bonded thin dielectric sheet such that the deposited material makes electrical contact with the underlying electrode contact pads and seals off the holes, which allows a plasma-forming atmosphere to be provided in the channels. This arrangement results in a glass-to-glass interface between the substrate and the thin dielectric sheet, which allows anodic bonding to be employed to assemble the two elements and thus eliminates the frit glass sealing process required in other constructions.

    摘要翻译: 优选为PALC型的平面显示装置,其中等离子体通道是通过在衬底中横向隔开的通道进行蚀刻而形成的,并且在蚀刻的衬底上粘合薄的电介质片。 每个通道是相邻的,也是通过蚀刻形成的浅凸缘,其用作凹陷区域以接收用作每个电极的接触焊盘的放大端。 孔形成在沉积在粘结薄电介质片上的薄电介质片和接触材料中,使得沉积的材料与下面的电极接触垫电接触并密封孔,这允许在等离子体形成气氛中提供等离子体形成气氛 频道 这种布置导致基板和薄电介质片之间的玻璃 - 玻璃界面,这允许阳极结合用于组装两个元件,从而消除了其它结构中所需的玻璃料密封过程。

    Plasma addressed liquid crystal display assembled from bonded elements
    7.
    发明授权
    Plasma addressed liquid crystal display assembled from bonded elements 失效
    等离子体寻址液晶显示器由粘合元件组装

    公开(公告)号:US5764001A

    公开(公告)日:1998-06-09

    申请号:US573742

    申请日:1995-12-18

    CPC分类号: G02F1/13334 Y10S65/04

    摘要: A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching in a substrate laterally-spaced channels and bonding a thin dielectric sheet over the etched substrate. Adjoining each of the channels are shallow ledges, also formed by etching, which serve as recessed areas to receive enlarged ends serving as contact pads for each of the electrodes. Holes are formed in the thin dielectric sheet and contact material deposited on the bonded thin dielectric sheet such that the deposited material makes electrical contact with the underlying electrode contact pads and seals off the holes, which allows a plasma-forming atmosphere to be provided in the channels. This arrangement results in a glass-to-glass interface between the substrate and the thin dielectric sheet, which allows anodic bonding to be employed to assemble the two elements and thus eliminates the frit glass sealing process required in other constructions.

    摘要翻译: 优选为PALC型的平面显示装置,其中等离子体通道是通过在衬底中横向隔开的通道进行蚀刻而形成的,并且在蚀刻的衬底上粘合薄的电介质片。 每个通道是相邻的,也是通过蚀刻形成的浅凸缘,其用作凹陷区域以接收用作每个电极的接触焊盘的放大端部。 孔形成在沉积在粘结薄电介质片上的薄电介质片和接触材料中,使得沉积的材料与下面的电极接触垫电接触并密封孔,这允许在等离子体形成气氛中提供等离子体形成气氛 频道 这种布置导致基板和薄介电片之间的玻璃 - 玻璃界面,其允许使用阳极接合来组装两个元件,从而消除了其它结构中所需的玻璃料密封过程。

    Plasmas addressed liquid crystal display with deposited plasma channels
with tapered edges
    9.
    发明授权
    Plasmas addressed liquid crystal display with deposited plasma channels with tapered edges 失效
    等离子体用具有渐缩边缘的沉积等离子体通道寻址液晶显示器

    公开(公告)号:US6057895A

    公开(公告)日:2000-05-02

    申请号:US535697

    申请日:1995-09-28

    IPC分类号: G02F1/1333 G02F1/133 G09F9/35

    CPC分类号: G02F1/13334

    摘要: A flat display device preferably of the PALC type in which the plasma channels are formed by depositing successive layers of electrically conductive and electrically insulating material on a substrate containing spaced walls of a resist material that are preferably structured with a negative slope to form in the space between the resist walls flanking channel walls comprising an electrode layer and rising above it a wall of insulating material with the electrode layer sides exposed to adjacent channels. Subsequently, the resist walls are removed by a lift-off process removing with it the layer deposits on the resist walls leaving behind the layer deposits between the resist walls. The remaining insulating walls are then covered with thin dielectric sheet-like member to form the plasma channels.

    摘要翻译: 优选为PALC型的平板显示装置,其中等离子体通道是通过在基片上沉积连续的导电和电绝缘材料层而形成的,该衬底包含抗蚀剂材料隔开的壁,该抗蚀剂材料优选由负斜面构成,以在该空间中形成 在包括电极层的通道壁的侧面的抗蚀剂壁之间,在其上方上方具有电极层侧面暴露于相邻通道的绝缘材料壁。 随后,通过剥离过程去除抗蚀剂壁,其上去除层,从而在抗蚀剂壁上沉积留下抗蚀剂壁之间的层沉积物。 然后用薄的介电片状构件覆盖剩余的绝缘壁以形成等离子体通道。