摘要:
This disclosure provides systems, methods, and apparatus for a MEMS display incorporating integrated sidewall reflectors. The display can include a light blocking component suspended over a substrate. The light blocking component can include an aperture in its surface that is parallel to the substrate. The display can include one or more sidewall reflectors positioned within the aperture. The one or more sidewall reflectors can be arranged at least partially normal to the surface of the light blocking component. Light that is directed through the aperture can be reflected off of the sidewall reflectors to escape from the display at a higher angle than would otherwise be possible.
摘要:
This disclosure provides systems, methods and apparatus for a shutter-based light modulator. The shutter includes at least three depressions extending outward from the surface of the shutter. Any two adjacent depressions of the at least three depressions define a gap therebetween to reduce damping forces caused by fluids in which the shutter is immersed. In some implementations, the at least three depressions can be aligned into more than one row, each row including more than two of the at least three depressions, along the surface of the shutter. In some implementations, to improve structural stability of the shutter, depressions in one row are staggered with respect to depressions in another row.
摘要:
This disclosure provides systems, methods and apparatus utilizing flexures in a display. In some implementations, an electromechanical systems (EMS) device can include flexures that have low stiffness along the axis of motion of a light modulator, and high stiffness in other directions. The flexures may include one or more beams mechanically coupling a MEMS structure to an anchor. The beams may be coupled to a hinge portion, the hinge portion being configured to suppress out of plane motion by the MEMS structure and the flexures. The flexures also may suppress out-of-plane motion using a stiffened portion. The stiffened portion can be mechanically coupled to the hinge portion or at least one beam of the flexure. By varying the cross-section geometry of the stiffened portion, the stiffness of the stiffened portion may be controlled to increase the force required to move the flexure in an out-of-plane direction.