Method of producing a lithium phosphate sintered body and sputtering target
    1.
    发明申请
    Method of producing a lithium phosphate sintered body and sputtering target 审中-公开
    制造磷酸锂烧结体和溅射靶的方法

    公开(公告)号:US20090045053A1

    公开(公告)日:2009-02-19

    申请号:US12228588

    申请日:2008-08-14

    IPC分类号: C23C14/34 B22F3/10

    摘要: To attain a method of producing a lithium phosphate sintered body and a sputtering target capable of providing a high-density bulk body with no macro-size internal defect, the present invention provides a method of producing a lithium phosphate sintered body, including the steps of: calcining raw material powder of Li3PO4 at a temperature set to be 650° C. or more and less than 850° C.; pulverizing and sieving the calcined raw material powder; and sintering the sieved raw material powder to a predetermined shape. By setting a calcining temperature of the raw material powder to be 650° C. or more and less than 850° C., moisture absorbed into the raw material powder is effectively removed and generation of macro-size internal defects in the resultant bulk (sintered) body is suppressed. When the calcining temperature is less than 650° C., calcining processing is insufficient, so generation of macro-size internal defects cannot be suppressed effectively. Particularly for ease in pulverizing and sieving to obtain particle sizes of 400 μm or less, the calcining temperature is preferably set to be 650° C. or more and 750° C. or less.

    摘要翻译: 为了获得能够提供没有大尺寸内部缺陷的高密度体积的磷酸锂烧结体和溅射靶的方法,本发明提供一种生产锂磷酸盐烧结体的方法,包括以下步骤: :在设定为650℃以上且小于850℃的温度下煅烧Li 3 PO 4的原料粉末; 粉碎和筛分煅烧的原料粉末; 并将过筛的原料粉末烧结成预定的形状。 通过将原料粉末的煅烧温度设定为650℃以上且低于850℃,有效地除去吸收到原料粉末中的水分,并在所得体积(烧结体)中产生大尺寸的内部缺陷 )身体受到抑制。 当煅烧温度低于650℃时,煅烧处理不充分,不能有效地抑制宏观尺寸内部缺陷的产生。 特别是为了便于粉碎和筛分以获得400μm以下的粒径,煅烧温度优选设定为650℃以上且750℃以下。