公开(公告)号：US20240134243A1

公开(公告)日：2024-04-25

申请号：US18384802

申请日：2023-10-26

申请人： Psiquantum, Corp.

发明人： Chia-Ming Chang ,  Hung-Hsi Lin ,  Gary Gibson

IPC分类号： G02F1/225

CPC分类号： G02F1/2257 ,  G02F1/212 ,  G02F2203/50

摘要： A waveguide structure includes a substrate and a waveguide core coupled to the substrate and including a first material characterized by a first index of refraction and a first electro-optic coefficient. The waveguide structure also includes a first cladding layer at least partially surrounding the waveguide core and including a second material characterized by a second index of refraction less than the first index of refraction and a second electro-optic coefficient greater than the first electro-optic coefficient. The second cladding layer is coupled to the first cladding layer.

公开(公告)号：US11841559B2

公开(公告)日：2023-12-12

申请号：US18112415

申请日：2023-02-21

申请人： Psiquantum, Corp.

发明人： Chia-Ming Chang ,  Hung-Hsi Lin ,  Gary Gibson

IPC分类号： G02F1/225 ,  G02F1/21

CPC分类号： G02F1/2257 ,  G02F1/212 ,  G02F2203/50

摘要： An optical switch structure includes at least one optical input port and at least one optical output port. The optical switch structure also includes an optical waveguide structure including a waveguide core and a waveguide cladding The optical waveguide structure is optically coupled to the at least one optical input port and the at least one optical output port. The waveguide core includes a first material characterized by a first index of refraction and a first electro-optic coefficient and the waveguide cladding includes a second material characterized by a second index of refraction less than the first index of refraction and a second electro-optic coefficient greater than the first electro-optic coefficient.

公开(公告)号：US11817400B2

公开(公告)日：2023-11-14

申请号：US17377131

申请日：2021-07-15

申请人： Psiquantum, Corp.

发明人： Yong Liang ,  Vimal Kumar Kamineni ,  Chia-Ming Chang ,  James McMahon

IPC分类号： H01L23/00 ,  H01L21/02 ,  H01L27/12

CPC分类号： H01L23/562 ,  H01L21/02186 ,  H01L27/1203

摘要： In some embodiments method comprises depositing a ferroelectric layer on a top surface of a semiconductor wafer and forming one or more gaps in the ferroelectric layer. The one or more gaps can be formed on a repetitive spacing to relieve stresses between the ferroelectric layer and the semiconductor wafer. A first dielectric layer is deposited over the ferroelectric layer and the first dielectric layer is planarized to fill in the gaps. A second dielectric layer is formed between the ferroelectric layer and the semiconductor wafer. The second dielectric layer can be formed by annealing the wafer in an oxidizing atmosphere such that an upper portion of the semiconductor substrate forms an oxide layer between the semiconductor substrate and the ferroelectric layer.

公开(公告)号：US20240201525A1

公开(公告)日：2024-06-20

申请号：US18544220

申请日：2023-12-18

申请人： Psiquantum, Corp.

发明人： Yong Liang ,  Mark G. Thompson ,  Chia-Ming Chang ,  Vimal Kumar Kamineni

IPC分类号： G02F1/035 ,  G02B6/12 ,  G02F1/225

CPC分类号： G02F1/035 ,  G02F1/225 ,  G02B2006/12142

摘要： A system includes a classical computing system and one or more quantum computing chips coupled to the classical computing system. The one or more quantum computing chips includes one or more electro-optic devices. Each electro-optic device includes a substrate, a waveguide disposed on top of the substrate, and a layer stack disposed on top of the waveguide and including a plurality of electro-optic material layers interleaved with a plurality of interlayers. Each electro-optic device further comprising a waveguide core disposed on top of a portion of the layer stack. The plurality of interlayers are characterized by a first lattice structure and the plurality of electro-optic material layers are under tensile stress and are characterized by a second lattice structure and crystallographic phase.

公开(公告)号：US11226507B2

公开(公告)日：2022-01-18

申请号：US17083141

申请日：2020-10-28

申请人： PSIQUANTUM, CORP.

发明人： Yong Liang ,  Mark G. Thompson ,  Chia-Ming Chang ,  Vimal Kumar Kamineni

IPC分类号： G02F1/035 ,  G02F1/225 ,  G02F1/21 ,  G02B6/12

摘要： An electro-optic device includes a substrate and a waveguide on the substrate. The waveguide includes a layer stack including a plurality of electro-optic material layers interleaved with a plurality of interlayers, a waveguide core adjacent to the layer stack, a waveguide cladding layer, and a pair of electrodes in electrical contact with the plurality of electro-optic material layers. The plurality of interlayers maintains a first lattice structure at room temperature and a cryogenic temperature. The plurality of electro-optic material layers maintains a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.

公开(公告)号：US20200301238A1

公开(公告)日：2020-09-24

申请号：US16697704

申请日：2019-11-27

申请人： Psiquantum, Corp.

发明人： Chia-Ming Chang ,  Hung-Hsi Lin ,  Gary Gibson

IPC分类号： G02F1/225

摘要： An optical switch structure includes a substrate, a first electrical contact, and a first material having a first conductivity type electrically connected to the first electrical contact. The optical switch structure also includes a second material having a second conductivity type coupled to the first material, a second electrical contact electrically connected to the second material, and a waveguide structure disposed between the first electrical contact and the second electrical contact. The waveguide structure includes a waveguide core coupled to the substrate and including a first material characterized by a first index of refraction and a first electro-optic coefficient and a waveguide cladding at least partially surrounding the waveguide core and including a second material characterized by a second index of refraction less than the first index of refraction and a second electro-optic coefficient greater than the first electro-optic coefficient.

公开(公告)号：US11624964B2

公开(公告)日：2023-04-11

申请号：US17326233

申请日：2021-05-20

申请人： Psiquantum, Corp.

发明人： Chia-Ming Chang ,  Hung-Hsi Lin ,  Gary Gibson

IPC分类号： G02F1/225 ,  G02F1/21

摘要： An optical switch structure includes a substrate, a first electrical contact, a first material having a first conductivity type electrically connected to the first electrical contact, a second material having a second conductivity type coupled to the first material, and a second electrical contact electrically connected to the second material. The optical switch structure also includes a waveguide structure disposed between the first electrical contact and the second electrical contact and comprising a waveguide core coupled to the substrate and including a first material characterized by a first index of refraction and a first electro-optic coefficient and a waveguide cladding at least partially surrounding the waveguide core and including a second material characterized by a second index of refraction and a second electro-optic. The first index of refraction is greater than the second index of refraction the first electro-optic coefficient is less than the second electro-optic coefficient

公开(公告)号：US20230018940A1

公开(公告)日：2023-01-19

申请号：US17377131

申请日：2021-07-15

申请人： Psiquantum, Corp.

发明人： Yong Liang ,  Vimal Kumar Kamineni ,  Chia-Ming Chang ,  James McMahon

IPC分类号： H01L23/00 ,  H01L27/12 ,  H01L21/02

摘要： In some embodiments method comprises depositing a ferroelectric layer on a top surface of a semiconductor wafer and forming one or more gaps in the ferroelectric layer. The one or more gaps can be formed on a repetitive spacing to relieve stresses between the ferroelectric layer and the semiconductor wafer. A first dielectric layer is deposited over the ferroelectric layer and the first dielectric layer is planarized to fill in the gaps. A second dielectric layer is formed between the ferroelectric layer and the semiconductor wafer. The second dielectric layer can be formed by annealing the wafer in an oxidizing atmosphere such that an upper portion of the semiconductor substrate forms an oxide layer between the semiconductor substrate and the ferroelectric layer.

公开(公告)号：US11036111B2

公开(公告)日：2021-06-15

申请号：US16697704

申请日：2019-11-27

申请人： Psiquantum, Corp.

发明人： Chia-Ming Chang ,  Hung-Hsi Lin ,  Gary Gibson

IPC分类号： G02F1/225 ,  G02F1/21

摘要： An optical switch structure includes a substrate, a first electrical contact, and a first material having a first conductivity type electrically connected to the first electrical contact. The optical switch structure also includes a second material having a second conductivity type coupled to the first material, a second electrical contact electrically connected to the second material, and a waveguide structure disposed between the first electrical contact and the second electrical contact. The waveguide structure includes a waveguide core coupled to the substrate and including a first material characterized by a first index of refraction and a first electro-optic coefficient and a waveguide cladding at least partially surrounding the waveguide core and including a second material characterized by a second index of refraction less than the first index of refraction and a second electro-optic coefficient greater than the first electro-optic coefficient.

公开(公告)号：US20210124233A1

公开(公告)日：2021-04-29

申请号：US17083141

申请日：2020-10-28

申请人： PSIQUANTUM, CORP.

发明人： Yong Liang ,  Mark G. Thompson ,  Chia-Ming Chang ,  Vimal Kumar Kamineni

IPC分类号： G02F1/225 ,  G02F1/21 ,  G02F1/035

摘要： An electro-optic device includes a substrate and a waveguide on the substrate. The waveguide includes a layer stack including a plurality of electro-optic material layers interleaved with a plurality of interlayers, a waveguide core adjacent to the layer stack, a waveguide cladding layer, and a pair of electrodes in electrical contact with the plurality of electro-optic material layers. The plurality of interlayers maintains a first lattice structure at room temperature and a cryogenic temperature. The plurality of electro-optic material layers maintains a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.