HIGH DENSITY LINEAR CAPACITOR IN SEMICONDUCTOR TECHNOLOGIES

    公开(公告)号:US20230253400A1

    公开(公告)日:2023-08-10

    申请号:US17650233

    申请日:2022-02-07

    CPC classification number: H01L27/0733 H01L27/0805

    Abstract: A device includes a first plurality of MEOL interconnects coupled to a second node that extends in a first direction. The first plurality of MEOL interconnects includes first and second subsets of MEOL second-terminal interconnects. The device includes a second plurality of MEOL interconnects coupled to a first node that extends in the first direction. The second plurality of MEOL interconnects includes first and second subsets of MEOL first-terminal interconnects. The first subsets of MEOL first-terminal and second-terminal interconnects are interleaved and are a first subset of interleaved MEOL interconnects. The second subsets of MEOL first-terminal and second-terminal interconnects are interleaved and are a second subset of interleaved MEOL interconnects. The device includes at least one of a first plurality of gate interconnects or a first plurality of OD regions extending in a second direction orthogonal to the first direction between the first and second subsets of interleaved MEOL interconnects.

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