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公开(公告)号:US10249708B2
公开(公告)日:2019-04-02
申请号:US15727400
申请日:2017-10-06
Applicant: Renesas Electronics Corporation
Inventor: Kosuke Yoshida , Tetsuya Nitta , Atsushi Sakai
IPC: H01L29/06 , H01L29/78 , H01L29/10 , H01L29/739
Abstract: In a semiconductor device, a p+ back gate region (PBG) is arranged in a main surface (S1) between first and second portions (P1, P2) of an n+ source region (SR), and arranged on a side closer to an n+ drain region (DR) with respect to the n+ source region (SR). Thereby, a semiconductor device having a high on-state breakdown voltage can be obtained.
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公开(公告)号:US20180033855A1
公开(公告)日:2018-02-01
申请号:US15727400
申请日:2017-10-06
Applicant: Renesas Electronics Corporation
Inventor: Kosuke Yoshida , Tetsuya Nitta , Atsushi Sakai
IPC: H01L29/06 , H01L29/739 , H01L29/10 , H01L29/78
CPC classification number: H01L29/0634 , H01L29/063 , H01L29/0653 , H01L29/1095 , H01L29/4236 , H01L29/7393 , H01L29/7813 , H01L29/7816
Abstract: In a semiconductor device, a p+ back gate region (PBG) is arranged in a main surface (S1) between first and second portions (P1, P2) of an n+ source region (SR), and arranged on a side closer to an n+ drain region (DR) with respect to the n+ source region (SR). Thereby, a semiconductor device having a high on-state breakdown voltage can be obtained.
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公开(公告)号:US09806147B2
公开(公告)日:2017-10-31
申请号:US14403225
申请日:2014-01-27
Applicant: Renesas Electronics Corporation
Inventor: Kosuke Yoshida , Tetsuya Nitta , Atsushi Sakai
IPC: H01L29/06 , H01L29/78 , H01L29/10 , H01L29/739
CPC classification number: H01L29/0634 , H01L29/1095 , H01L29/7393 , H01L29/7813 , H01L29/7816
Abstract: In a semiconductor device, a p+ back gate region (PBG) is arranged in a main surface (S1) between first and second portions (P1, P2) of an n+ source region (SR), and arranged on a side closer to an n+ drain region (DR) with respect to the n+ source region (SR). Thereby, a semiconductor device having a high on-state breakdown voltage can be obtained.
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公开(公告)号:US09356135B2
公开(公告)日:2016-05-31
申请号:US14605027
申请日:2015-01-26
Applicant: RENESAS ELECTRONICS CORPORATION
Inventor: Kosuke Yoshida , Tetsuya Nitta
CPC classification number: H01L29/7813 , H01L27/0922 , H01L29/063 , H01L29/0634 , H01L29/0696 , H01L29/1095 , H01L29/66734 , H01L29/7809
Abstract: To provide a semiconductor device capable of suppressing a reduction in breakdown voltage by suppressing a change in dimensions of a double RESURF structure, and a method of manufacturing the same.In the semiconductor device, an upper RESURF region is formed so as to contact with a first buried region on a side of the one main surface within a semiconductor substrate. The semiconductor substrate has a field oxide formed so as to reach the upper RESURF region on the one main surface. The semiconductor substrate includes a second conductivity type body region formed so as to contact with the upper RESURF region on a side of the one main surface and so as to neighbor the field oxide within the semiconductor substrate.
Abstract translation: 为了提供能够通过抑制双重RESURF结构的尺寸变化来抑制击穿电压降低的半导体器件及其制造方法。 在半导体器件中,上部RESURF区域形成为与半导体衬底内的一个主表面侧的第一掩埋区域接触。 半导体衬底具有形成为在一个主表面上到达上RESURF区域的场氧化物。 半导体衬底包括形成为与一个主表面侧上部RESURF区接触并与半导体衬底内的场氧化物相邻的第二导电类型体区。
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公开(公告)号:US20160181357A1
公开(公告)日:2016-06-23
申请号:US14403225
申请日:2014-01-27
Applicant: RENESAS ELECTRONICS CORPORATION
Inventor: Kosuke Yoshida , Tetsuya Nitta , Atsushi Sakai
IPC: H01L29/06 , H01L29/739 , H01L29/10 , H01L29/78
CPC classification number: H01L29/0634 , H01L29/1095 , H01L29/7393 , H01L29/7813 , H01L29/7816
Abstract: In a semiconductor device, a p+ back gate region (PBG) is arranged in a main surface (Si) between first and second portions (P1, P2) of an n+ source region (SR), and arranged on a side closer to an n+ drain region (DR) with respect to the n+ source region (SR). Thereby, a semiconductor device having a high on-state breakdown voltage can be obtained.
Abstract translation: 在半导体装置中,在n +源极区域(SR)的第一和第二部分(P1,P2)之间的主表面(Si)中布置有p +背栅极区域(PBG),并且配置在靠近n + 漏极区域(DR)相对于n +源极区域(SR)。 由此,可以获得具有高导通状态击穿电压的半导体器件。
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