公开(公告)号：US20160219704A1

公开(公告)日：2016-07-28

申请号：US15008691

申请日：2016-01-28

Applicant: RF Micro Devices, Inc.

Inventor： Jan Edward Vandemeer ,  Khoi Tam Vu

IPC: H05K1/11 ,  H01L21/768 ,  H05K3/46 ,  H05K1/03 ,  H05K1/02 ,  H01L23/538 ,  H01L21/56

CPC classification number: H05K1/115 ,  H01L21/486 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/49827 ,  H01L23/5384 ,  H01L23/5386 ,  H01L2924/0002 ,  H05K1/0306 ,  H05K3/426 ,  H05K2201/10378 ,  H01L2924/00

Abstract: Hermetically sealed through vias (TVs) are disclosed. In one aspect, an hourglass TV is first created in a substrate. The hourglass TV has a waist opening. A conductive conformal coating covers at least a portion of an interior wall of the hourglass TV. The conductive conformal coating also completely fills the waist opening to provide a hermetic seal between an upper opening and a lower opening of the hourglass TV, thus creating the hermetically sealed TV. The combination of the hourglass shape, which provides a narrowing waist, and using the conformal coating process, facilitates the natural accumulation of the conductive conformal coating material in and about the waist opening. Creating hermetically sealed TVs in this manner leads to lower costs, shortened process and plating times, and increased production throughput compared to conventional processes for creating the hermetically sealed TVs in substrates.

Abstract translation: 透过通孔（电视机）密封。 在一个方面，首先在基板中产生沙漏电视。 沙漏电视有一个腰部开口。 导电保形涂层覆盖沙漏电视的内壁的至少一部分。 导电保形涂层还完全填充腰部开口，以在沙漏电视的上部开口和下部开口之间提供密封，从而形成密封的电视机。 提供窄腰的沙漏形状和使用保形涂布工艺的组合有助于导电保形涂层材料在腰部开口内和周围的自然积聚。 与在基板中形成密封电视的常规工艺相比，以这种方式创建密封电视导致成本降低，工艺和电镀时间缩短，生产量增加。