公开(公告)号：US20160304405A1

公开(公告)日：2016-10-20

申请号：US15102951

申请日：2014-11-28

申请人： ROGERS GERMANY GMBH

发明人： Andreas Meyer ,  Fabian Hierstetter

IPC分类号： C04B35/645 ,  H01L23/498 ,  H01L21/48 ,  C04B37/02 ,  H01L23/373

CPC分类号： C04B35/6455 ,  C04B37/021 ,  C04B37/025 ,  C04B37/026 ,  C04B2237/064 ,  C04B2237/068 ,  C04B2237/08 ,  C04B2237/083 ,  C04B2237/121 ,  C04B2237/124 ,  C04B2237/127 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/402 ,  C04B2237/407 ,  C04B2237/54 ,  C04B2237/592 ,  C04B2237/595 ,  C04B2237/704 ,  C04B2237/706 ,  C04B2237/72 ,  C04B2237/84 ,  C04B2237/86 ,  H01L21/4846 ,  H01L21/4857 ,  H01L23/3735 ,  H01L23/49822 ,  H01L2924/0002 ,  H05K1/0306 ,  H05K3/022 ,  H05K3/388 ,  H05K2203/04 ,  H01L2924/00

摘要： The invention relates to a method for producing a metal-ceramic substrate including first and second metallizations and at least one ceramic layer incorporated between the first and second metallizations. Advantageously, first and second metal layers and the at least one ceramic layer are stacked superposed, and in such a way that the free edge sections, of the first and second metal layers respectively, project beyond the edges of the at least one ceramic layer and the first and second metal layers are deformed toward each other in the region of the projecting free edge sections and directly connected to each other in order to form a gas-tight, sealed metal container enclosing a container interior for receiving the at least one ceramic layer. Subsequently, the metal layers forming the metal container with the at least one ceramic layer received in the container interior are hot isostatically pressed together in a treatment chamber at a gas pressure between 500 and 2000 bar and at a process temperature between 300° C. and the melting temperature of the metal layers for producing a preferably flat connection of at least one of the metal layers and the at least one ceramic layer, and at least the projecting free edge sections, which are connected to each other, of the metal layers for forming the first and second metallization are subsequently removed.

摘要翻译： 本发明涉及一种用于制造包括第一和第二金属化的金属陶瓷衬底的方法以及结合在第一和第二金属化之间的至少一个陶瓷层。 有利的是，第一和第二金属层和至少一个陶瓷层被叠置在一起，并且使得第一和第二金属层的自由边缘部分分别突出超过至少一个陶瓷层的边缘，并且 第一和第二金属层在突出的自由边缘部分的区域中彼此变形并且彼此直接连接，以形成封闭容器内部的气密密封的金属容器，用于容纳至少一个陶瓷层 。 随后，形成具有容纳在容器内部中的至少一个陶瓷层的金属容器的金属层在500-2000巴之间的气体压力和在300℃和200℃之间的过程温度下被热等静压在处理室中 金属层的熔融温度，用于产生金属层和至少一个陶瓷层中的至少一个的优选平坦连接，以及至少彼此连接的突出的自由边缘部分，用于 随后除去形成第一和第二金属化。

公开(公告)号：US10351477B2

公开(公告)日：2019-07-16

申请号：US15102951

申请日：2014-11-28

申请人： Rogers Germany GmbH

发明人： Andreas Meyer ,  Fabian Hierstetter

IPC分类号： C08B37/00 ,  H01L21/48 ,  C04B35/645 ,  C04B37/02 ,  H01L23/373 ,  H05K3/02 ,  H05K3/38 ,  H01L23/498 ,  H05K1/03

摘要： The invention relates to a method for producing a metal-ceramic substrate including first and second metallizations and at least one ceramic layer incorporated between the first and second metallizations. Advantageously, first and second metal layers and the at least one ceramic layer are stacked superposed, and in such a way that the free edge sections, of the first and second metal layers respectively, project beyond the edges of the at least one ceramic layer and the first and second metal layers are deformed toward each other in the region of the projecting free edge sections and directly connected to each other in order to form a gas-tight, sealed metal container enclosing a container interior for receiving the at least one ceramic layer. Subsequently, the metal layers forming the metal container with the at least one ceramic layer received in the container interior are hot isostatically pressed together in a treatment chamber at a gas pressure between 500 and 2000 bar and at a process temperature between 300° C. and the melting temperature of the metal layers for producing a preferably flat connection of at least one of the metal layers and the at least one ceramic layer, and at least the projecting free edge sections, which are connected to each other, of the metal layers for forming the first and second metallization are subsequently removed.