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1.发明授权Silicon carbide indents for probe storage utilizing thermomechanically activated polymer media 失效使用热机械活化聚合物介质的探针存储的碳化硅凹痕公开(公告)号：US07522512B1
公开(公告)日：2009-04-21
申请号：US12100347
申请日：2008-04-09
IPC分类号： G11B9/00
CPC分类号： G11B9/149 , B82Y10/00 , G11B9/04 , G11B11/007
摘要： Storing data by forming permanent indents in a preceramic polymer, on a substrate, via a chemical reaction transforming the polymer through permanent phase change into hardened, ceramic material, where the chemical reaction activation energy is supplied by heat and pressure applied by a nanoscale probe tip; reading data with the tip by obtaining a topographical signal during readout of the bits; reading data with the tip, where the substrate and ceramic material are conducting, while recording varying electrical resistance measured through the tip-sample contact as the tip slides along the surface; where a separate surface layer formed over the ceramic material including a polymeric thin film with cross-linking protects the tip during writing and readout; and where the substrate is a rigid wall material that can aid indentation by preventing the precursor polymer from accommodating stress applied by the tip with plastic deformation.
摘要翻译： 通过在基底上形成永久性凹痕，通过化学反应将聚合物永久变相转化成硬化的陶瓷材料，在其中化学反应活化能由纳米尺度的探针尖端施加的热和压力提供， ; 通过在位的读出期间获得地形信号来读取尖端的数据; 在衬底和陶瓷材料导通的位置读取数据，同时记录当尖端沿着表面滑动时通过尖端样品接触测量的变化的电阻; 其中形成在陶瓷材料上的单独的表面层包括具有交联的聚合物薄膜，在写入和读出期间保护尖端; 并且其中基底是刚性壁材料，其可以通过防止前体聚合物容纳由塑料变形引起的尖端施加的应力而有助于压痕。
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2.发明申请DEVICE FORMED BY PROBE-BASED LITHOGRAPHY UTILIZING THERMOMECHANICALLY ACTIVATED POLYMERS 审中-公开通过基于探针的LITHOGRAPHY使用热机械活化聚合物形成的装置公开(公告)号：US20090255462A1
公开(公告)日：2009-10-15
申请号：US12272756
申请日：2008-11-17
IPC分类号： B05C11/02
CPC分类号： G03F7/0002 , G01Q80/00
摘要： Device having features formed utilizing probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; depositing new layers and continuing according to a desired three-dimensional pattern; by cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.
摘要翻译： 具有利用基于探针的光刻形成的特征的器件包括：在衬底上沉积预陶瓷聚合物; 通过化学反应局部转化预陶瓷聚合物，使其经历永久相变成硬化的陶瓷材料，从而在聚合物中形成纳米尺度特征，用由探针提供的加热和/或压力提供的规定的活化能激活化学反应 小费; 沉积新层并根据期望的三维图案继续; 通过将未活化的前陶瓷聚合物交联以作为机械和/或电隔离形成的陶瓷结构的载体介质; 并且其中陶瓷图案通过（a）将掺杂剂元素结合到预陶瓷聚合物中或其上而导致导电，或（b）在化学反应期间提供掺杂剂原子的化学活性环境中进行写入步骤。
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3.发明申请THERMOMECHANICALLY-ACTIVATED TIP SHAPE AND REGISTRY RESTORATION FOR PROBE ARRAY DEVICES UTILIZING THERMOMECHANICALLY-ACTIVATED POLYMERS 审中-公开使用热机械活化聚合物的探针阵列装置的热物理激活形状和注册恢复公开(公告)号：US20090256275A1
公开(公告)日：2009-10-15
申请号：US12100364
申请日：2008-04-09
IPC分类号： B28B3/00
CPC分类号： G01Q70/00 , G01Q80/00 , G11B9/1409
摘要： A method of repairing worn or blunt probe tips, attaching a desired tip material, or defining the registry of probe tips relative to planar surface, including: pressing a probe tip or an array of probe tips into a substrate pre-patterned with an array of tip-shaped molds, the molds containing a preceramic material that can bond to the worn probe tips by thermal activation, the substrate having a protective layer that prevents the preceramic material and/or thermally-activated ceramic material from bonding to the substrate; pressing the worn probe tips into the molds while heating the worn probe tips causing the preceramic material to bond to the worn probe tips and form a solid ceramic material; forming an array comprising a plurality of reconstructed probe tips that are sharper or consisting of a different material than the original worn or base probe tips; and reading and/or writing, with the array comprising the plurality of reconstructed probe tips, data that was unreadable and/or unwritable with the original probe tips due to tip shape or lack of registry with a planar pattern.
摘要翻译： 修复磨损或钝的探针尖端，附接期望的尖端材料或相对于平坦表面限定探针尖端的注册表的方法，包括：将探针尖端或探针尖端阵列压入预先图案化的衬底中， 所述模具包含预陶瓷材料，所述预陶瓷材料可以通过热活化与所述磨损的探针末端结合，所述基底具有防止所述预陶瓷材料和/或热活化的陶瓷材料结合到所述基底的保护层; 将磨损的探针尖端压入模具中，同时加热磨损的探针尖端，导致预陶瓷材料结合到磨损的探针尖端并形成固体陶瓷材料; 形成包括多个重建的探针尖端的阵列，所述多个重建的探针尖端比原始磨损或基底探针尖端更尖锐或由不同的材料组成; 以及包括多个重建的探针尖端的阵列的读取和/或写入，由于尖端形状或不具有平面图案的注册而与原始探针尖端不可读和/或不可写的数据。
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4.发明授权公开(公告)号：US07452570B1
公开(公告)日：2008-11-18
申请号：US12100354
申请日：2008-04-09
CPC分类号： G03F7/0002 , G01Q80/00
摘要： Probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; then depositing new layers and continuing according to a desired three-dimensional pattern; either by (a) removing unactivated preceramic polymer utilizing a removal solvent, or (b) cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.
摘要翻译： 基于探针的光刻，包括：在基底上沉积预陶瓷聚合物; 通过化学反应局部转化预陶瓷聚合物，使其经历永久相变成硬化的陶瓷材料，从而在聚合物中形成纳米尺度特征，用由探针提供的加热和/或压力提供的规定的活化能激活化学反应 小费; 然后根据期望的三维图案沉积新的层并继续; 通过（a）使用去除溶剂去除未活化的陶瓷前体聚合物，或（b）将未活化的陶瓷前体聚合物交联以用作机械和/或电隔离形成的陶瓷结构的载体介质; 并且其中陶瓷图案通过（a）将掺杂剂元素结合到预陶瓷聚合物中或其上而导致导电，或（b）在化学反应期间提供掺杂剂原子的化学活性环境中进行写入步骤。
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公开(公告)号：US09977050B2
公开(公告)日：2018-05-22
申请号：US12940079
申请日：2010-11-05
CPC分类号： G01Q60/363 , B82Y35/00 , G01Q70/10
摘要： A method and a scanning probe microscope (SPM) for scanning a surface of a material. The method and SPM have a cantilever sensor configured to exhibit both a first spring behavior and a second, stiffer spring behavior. While operating the SPM in contact mode, the sensor is scanned on the material surface and a first spring behavior of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface. Also while operating the SPM in contact mode, excitation means are used to excite a second spring behavior of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.
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公开(公告)号：US08374071B2
公开(公告)日：2013-02-12
申请号：US12130283
申请日：2008-05-30
申请人： Bernd W. Gotsmann , Armin W. Knoll , Urs T. Duerig
发明人： Bernd W. Gotsmann , Armin W. Knoll , Urs T. Duerig
IPC分类号： G11B7/00
CPC分类号： G11B9/149 , G01Q80/00 , G11B5/743 , G11B9/14 , G11B11/007 , Y10T428/24802
摘要： The present invention relates to a data storage device comprising: a polymer layer for storing data in the form of topographic features; a substrate comprising a conductor, a first surface of the polymer layer being provided on the substrate; and at least one probe which, when the device is in use, interacts with a second surface of the polymer layer, wherein, when in use, the data storage device is operable to apply a first electrical potential to the at least one probe relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.
摘要翻译： 数据存储装置技术领域本发明涉及一种数据存储装置，包括：用于以地形特征的形式存储数据的聚合物层; 包括导体的衬底，所述聚合物层的第一表面设置在所述衬底上; 以及当所述装置在使用时与所述聚合物层的第二表面相互作用的至少一个探针，其中当使用时，所述数据存储装置可操作以相对于所述至少一个探针施加第一电位 从而在聚合物层的第二表面上形成突起。
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公开(公告)号：US20100026332A1
公开(公告)日：2010-02-04
申请号：US12544246
申请日：2009-08-20
申请人： Urs T. Duerig , Bernd W. Gotsmann , Armin W. Knoll
发明人： Urs T. Duerig , Bernd W. Gotsmann , Armin W. Knoll
IPC分类号： G01R31/02
CPC分类号： G11B9/1409 , B82Y10/00 , G01Q80/00
摘要： A device for sensing a position of a probe relative to a reference medium, the probe comprising a heater element with a temperature dependent electrical resistance and being adapted to determine probe position by measuring a parameter associated to a thermal relaxation time of the heater element.
摘要翻译： 一种用于感测探针相对于参考介质的位置的装置，所述探针包括具有温度依赖性电阻的加热器元件，并且适于通过测量与所述加热器元件的热松弛时间相关联的参数来确定探针位置。
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8.发明授权Patterning nano-scale patterns on a film comprising unzipping polymer chains 失效在包含解链聚合物链的膜上形成纳米尺度图案公开(公告)号：US08389205B2
公开(公告)日：2013-03-05
申请号：US12482500
申请日：2009-06-11
申请人： Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Armin W. Knoll , Robert D. Miller , David Pires , Charles G. Wade
发明人： Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Armin W. Knoll , Robert D. Miller , David Pires , Charles G. Wade
IPC分类号： G03F7/26
CPC分类号： C08G2/06 , C08G2/14 , G01Q80/00 , G03F7/0002 , G03F7/0392 , G03F7/16 , G03F7/2049
摘要： The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g. thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g. into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.
摘要翻译： 本发明涉及用于图案化材料表面的方法。 提供其上具有聚合物膜的基板。 聚合物是选择性反应性聚合物（例如热力学不稳定的）：它能够在合适的刺激下解压缩。 探针用于在电影上创建图案。 在图案化期间，膜被局部刺激用于解链聚合物链。 因此，基本思想是向聚合物材料提供刺激，其又自发分解，例如， 变成挥发性成分。 例如，为了破坏聚合物链中的单键，该膜被热刺激，这足以引发整个聚合物链的分解。
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公开(公告)号：US07952369B2
公开(公告)日：2011-05-31
申请号：US12544246
申请日：2009-08-20
申请人： Urs T. Duerig , Bernd W. Gotsmann , Armin W. Knoll
发明人： Urs T. Duerig , Bernd W. Gotsmann , Armin W. Knoll
IPC分类号： G01R31/02
CPC分类号： G11B9/1409 , B82Y10/00 , G01Q80/00
摘要： A device for sensing a position of a probe relative to a reference medium, the probe comprising a heater element with a temperature dependent electrical resistance and being adapted to determine probe position by measuring a parameter associated to a thermal relaxation time of the heater element.
摘要翻译： 一种用于感测探针相对于参考介质的位置的装置，所述探针包括具有温度依赖性电阻的加热器元件，并且适于通过测量与所述加热器元件的热松弛时间相关联的参数来确定探针位置。
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10.发明申请公开(公告)号：US20110113517A1
公开(公告)日：2011-05-12
申请号：US12940079
申请日：2010-11-05
IPC分类号： G01Q70/08
CPC分类号： G01Q60/363 , B82Y35/00 , G01Q70/10
摘要： A method and a scanning probe microscope (SPM) for scanning a surface of a material. The method and SPM have a cantilever sensor configured to exhibit both a first spring behavior and a second, stiffer spring behavior. While operating the SPM in contact mode, the sensor is scanned on the material surface and a first spring behavior of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface. Also while operating the SPM in contact mode, excitation means are used to excite a second spring behavior of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.
摘要翻译： 用于扫描材料表面的方法和扫描探针显微镜（SPM）。 该方法和SPM具有构造成展现第一弹簧性能和第二较硬弹簧特性的悬臂传感器。 当在接触模式下操作SPM时，传感器被扫描在材料表面上，传感器的第一弹簧特性（例如其基本弯曲模式）被材料表面的传感器偏转所激发。 同时在接触模式下操作SPM时，激励装置用于在悬臂传感器的共振频率（例如一个或多个高次谐振模式）下激发传感器的第二弹簧特性，以调制传感器和 材料表面，从而减少材料表面的磨损。
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