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1.发明授权Magnetoresistive/inductive write head assembly formed with seed layers having a uniform thickness 有权由具有均匀厚度的种子层形成的磁阻/感应写头组件公开(公告)号：US07362543B2
公开(公告)日：2008-04-22
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译： 本发明提供一种用于制造用于磁写头的线圈元件的方法。 使用光刻技术在衬底上形成线圈图案。 使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。 使用离子束沉积沉积薄膜种子层。 用金属电镀衬底，用金属填充沟槽。 基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。
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公开(公告)号：US06948231B2
公开(公告)日：2005-09-27
申请号：US10153333
申请日：2002-05-21
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译： 本发明提供一种用于制造用于磁写头的线圈元件的方法。 使用光刻技术在衬底上形成线圈图案。 使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。 使用离子束沉积沉积薄膜种子层。 用金属电镀衬底，用金属填充沟槽。 基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。
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公开(公告)号：US07097923B2
公开(公告)日：2006-08-29
申请号：US10135663
申请日：2002-04-30
申请人： Patrick R. Webb , Howard G. Zolla
发明人： Patrick R. Webb , Howard G. Zolla
CPC分类号： G02B1/116 , G03F7/091 , G11B5/17 , G11B5/3116 , G11B5/313 , G11B5/3163 , H01L21/0276 , Y10T428/1193 , Y10T428/24942 , Y10T428/2495
摘要： A tri-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The tri-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The tri-layer anti-reflection coating features a first layer, a first dielectric layer, an absorption layer disposed on the first dielectric layer, and a second dielectric layer, which is then disposed between the absorption layer and a photoresist layer. At least the absorption layer and dielectric layers can be formed using vacuum deposition. A unique character of the tri-layer anti-reflective coatings is that it dampens reflections structures having severe topologies and also allows a thinner anti-reflection layer that has a wider process latitude.
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4.发明授权Method of fabricating a narrow projection such as a write pole extending from a substrate 失效制造诸如从基板延伸的写极的窄突起的方法公开(公告)号：US07355813B2
公开(公告)日：2008-04-08
申请号：US11053632
申请日：2005-02-08
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10S29/016 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052 , Y10T428/1186 , Y10T428/24174 , Y10T428/24479 , Y10T428/2462
摘要： An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.
摘要翻译： 形成具有从其向外延伸的突起的基底的制品。 物品可以是磁记录头，并且投影是写柱。 突起具有平行于衬底表面测量的最薄尺寸的宽度不大于约0.3微米，并且垂直于衬底测量的高度不小于宽度的约5倍。 通过在其上具有边缘的衬底上形成覆盖结构来制造制品，沉积位于边缘上的复制层，在边缘和衬底上沉积填料，使得填料，复制层和上覆结构在 组合包括在衬底上的连续层，选择性地将复制层的至少一部分从连续层的自由表面向内移动到衬底，以形成限定的空腔，并将突出材料沉积到限定的空腔中以形成 投影。
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5.发明授权Method of fabricating a narrow projection such as a write pole extending from a substrate 失效制造诸如从基板延伸的写极的窄突起的方法公开(公告)号：US06859998B2
公开(公告)日：2005-03-01
申请号：US10121989
申请日：2002-04-12
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10S29/016 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052 , Y10T428/1186 , Y10T428/24174 , Y10T428/24479 , Y10T428/2462
摘要： An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.
摘要翻译： 形成具有从其向外延伸的突起的基底的制品。 物品可以是磁记录头，并且投影是写柱。 突起具有平行于衬底表面测量的最薄尺寸的宽度不大于约0.3微米，垂直于衬底的高度不小于宽度的约5倍。 通过在其上具有边缘的衬底上形成覆盖结构来制造制品，沉积位于边缘上的复制层，在边缘和衬底上沉积填料，使得填料，复制层和上覆结构在 组合包括在衬底上的连续层，选择性地将复制层的至少一部分从连续层的自由表面向内移动到衬底，以形成限定的空腔，并将突出材料沉积到限定的空腔中以形成 投影。
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