System and apparatus for supplying carbon dioxide to a semiconductor application
    1.
    发明申请
    System and apparatus for supplying carbon dioxide to a semiconductor application 审中-公开
    用于向半导体应用提供二氧化碳的系统和设备

    公开(公告)号:US20060260657A1

    公开(公告)日:2006-11-23

    申请号:US11131220

    申请日:2005-05-18

    IPC分类号: B08B3/02

    CPC分类号: B08B7/0021 F25D3/10

    摘要: A system and apparatus for the delivery of a high purity carbon dioxide fluid is provided. The system includes at least two separate semiconductor applications, wherein one of said applications requires refrigeration. A first portion of the carbon dioxide stream is drawn off the supply line and directing it to a first semiconductor application. A second portion is drawn off the supply line and routed to a second semiconductor application across a pressure-reduction device thereby reducing the temperature and pressure of the second gas, entering the second semiconductor application.

    摘要翻译: 提供了用于输送高纯度二氧化碳流体的系统和装置。 该系统包括至少两个单独的半导体应用,其中所述应用之一需要制冷。 将二氧化碳流的第一部分从供应管线排出并将其引导到第一半导体应用。 第二部分从供应管线中排出并且通过减压装置被引导到第二半导体应用,从而降低进入第二半导体应用的第二气体的温度和压力。

    MAGNETIC ANNEALING TOOL HEAT EXCHANGE SYSTEM AND PROCESSES
    2.
    发明申请
    MAGNETIC ANNEALING TOOL HEAT EXCHANGE SYSTEM AND PROCESSES 有权
    磁性退火工具热交换系统及工艺

    公开(公告)号:US20080121634A2

    公开(公告)日:2008-05-29

    申请号:US11294477

    申请日:2005-12-06

    IPC分类号: H05B6/00

    CPC分类号: H01L21/67109

    摘要: A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.

    摘要翻译: 提供了一种用于磁性退火工具的热交换系统和工艺。 该系统包括容纳要处理的工件的处理室; 元件室,其部分地围绕处理室的周边,至少一个装置,用于抽取与处理室流体连通并与元件室分离的真空,以便将过程元件室中的任一个或两者施加真空,因此 促进工件的辐射加热; 至少一个与所述处理室连通的流体供应源,并与所述元件室分开供应冷却气体,以促进所述工件的导电冷却; 设置成围绕所述元件室的冷却室; 以及用于产生设置在冷却室的外周上的磁场的装置。

    Magnetic annealing tool heat exchange system and processes
    3.
    发明申请
    Magnetic annealing tool heat exchange system and processes 有权
    磁性退火工具热交换系统及工艺

    公开(公告)号:US20070125767A1

    公开(公告)日:2007-06-07

    申请号:US11294477

    申请日:2005-12-06

    IPC分类号: H05B6/00

    CPC分类号: H01L21/67109

    摘要: A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.

    摘要翻译: 提供了一种用于磁性退火工具的热交换系统和工艺。 该系统包括容纳要处理的工件的处理室; 元件室,其部分地围绕处理室的周边,至少一个装置,用于抽取与处理室流体连通并与元件室分离的真空,以便将过程元件室中的任一个或两者施加真空,因此 促进工件的辐射加热; 至少一个与所述处理室连通的流体供应源,并与所述元件室分开供应冷却气体,以促进所述工件的导电冷却; 设置为围绕所述元件室的冷却室; 以及用于产生设置在冷却室的外周上的磁场的装置。

    Biological refrigeration sytem
    4.
    发明申请
    Biological refrigeration sytem 审中-公开
    生物制冷系统

    公开(公告)号:US20070000258A1

    公开(公告)日:2007-01-04

    申请号:US11171379

    申请日:2005-07-01

    IPC分类号: F25B9/00

    摘要: A refrigeration system especially useful for refrigerating biological samples wherein a cryocooler, such as one employing a pressure wave from a pressure wave generator, is used to generate refrigeration for cooling liquid coolant or purging fluid, which is employed within hollow structures bordering an enclosed space of a storage unit or within the storage space of a storage unit and is subsequently cleaned of contaminants purged from the storage space.

    摘要翻译: 特别适用于制冷生物样品的制冷系统,其中使用诸如使用来自压力波发生器的压力波的低温冷冻器来产生用于冷却液体冷却剂或清洗流体的制冷装置,所述制冷剂或清洗液用于与封闭空间 存储单元或存储单元的存储空间内,并且随后清除从存储空间清除的污染物。

    Heat exchanger distributor for multicomponent heat exchange fluid
    5.
    发明申请
    Heat exchanger distributor for multicomponent heat exchange fluid 有权
    用于多组分热交换流体的换热器分配器

    公开(公告)号:US20050045312A1

    公开(公告)日:2005-03-03

    申请号:US10649674

    申请日:2003-08-28

    申请人: Richard Jibb

    发明人: Richard Jibb

    IPC分类号: F28F27/02 F28B1/00

    CPC分类号: F28F9/026 F28F3/025

    摘要: A heat exchanger distributor which facilitates homogeneous flow of a two phase multicomponent heat exchange fluid, such as a refrigerant fluid, comprising a plurality of spaced dividers, extending longitudinally through some or all of the length of the finned section of the distributor, which prevent lateral movement and agglomerization of gas bubbles and a lower threshold for flow reversal and liquid logging.

    摘要翻译: 促进两相多组分热交换流体(例如制冷剂流体)的均匀流动的热交换器分配器,其包括多个间隔开的分隔件,其纵向延伸穿过分配器的翅片部分的一部分或全部,从而防止横向 气泡的运动和聚集以及流动反转和液体测井的较低阈值。