摘要:
A system and apparatus for the delivery of a high purity carbon dioxide fluid is provided. The system includes at least two separate semiconductor applications, wherein one of said applications requires refrigeration. A first portion of the carbon dioxide stream is drawn off the supply line and directing it to a first semiconductor application. A second portion is drawn off the supply line and routed to a second semiconductor application across a pressure-reduction device thereby reducing the temperature and pressure of the second gas, entering the second semiconductor application.
摘要:
A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.
摘要:
A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.
摘要:
A refrigeration system especially useful for refrigerating biological samples wherein a cryocooler, such as one employing a pressure wave from a pressure wave generator, is used to generate refrigeration for cooling liquid coolant or purging fluid, which is employed within hollow structures bordering an enclosed space of a storage unit or within the storage space of a storage unit and is subsequently cleaned of contaminants purged from the storage space.
摘要:
A heat exchanger distributor which facilitates homogeneous flow of a two phase multicomponent heat exchange fluid, such as a refrigerant fluid, comprising a plurality of spaced dividers, extending longitudinally through some or all of the length of the finned section of the distributor, which prevent lateral movement and agglomerization of gas bubbles and a lower threshold for flow reversal and liquid logging.
摘要:
A heat exchanger assembly including an elongated tubular heat exchanger enclosure defining an interior chamber. A tube sheet is positioned within the interior chamber of the heat exchanger enclosure separating the interior chamber into a shell side and a channel side. The interior portion is configured to removably receive a tube bundle positioned within the shell side of the interior chamber. An annular sleeve member is positioned within the channel side of the interior chamber of the heat exchanger enclosure. An annular elastic torsion member is positioned within the channel side of the interior chamber of the heat exchanger such that the sleeve member is positioned between the tube sheet and the elastic torsion member. The elastic torsion member has an inner circumference deflectable relative to its outer circumference for torsioning the elastic torsion member.
摘要:
A method for establishing a cryogenic insulation system wherein aerogel is provided to a sealable insulation space which is pressurized and depressurized, preferably using carbon dioxide gas, and cooled to cryogenic temperatures typically by the application of refrigeration from cryogenic liquid.
摘要:
A refrigeration system especially useful for refrigerating biological samples wherein a cryocooler, such as one employing a pressure wave from a pressure wave generator, is used to generate refrigeration for cooling liquid coolant or purging fluid, which is employed within hollow structures bordering an enclosed space of a storage unit or within the storage space of a storage unit and is subsequently cleaned of contaminants purged from the storage space.
摘要:
A catalytic reactor is provided with one or more reaction zones each formed of set(s) of reaction tubes containing a catalyst to promote chemical reaction within a feed stream. The reaction tubes are of helical configuration and are arranged in a substantially coaxial relationship to form a coil-like structure. Heat exchangers and steam generators can be formed by similar tube arrangements. In such manner, the reaction zone(s) and hence, the reactor is compact and the pressure drop through components is minimized. The resultant compact form has improved heat transfer characteristics and is far easier to thermally insulate than prior art compact reactor designs. Various chemical reactions are contemplated within such coil-like structures such that as steam methane reforming followed by water-gas shift. The coil-like structures can be housed within annular chambers of a cylindrical housing that also provide flow paths for various heat exchange fluids to heat and cool components.
摘要:
A cryogenic tank system wherein cryogenic liquid from a primary cryogenic liquid storage tank is subcooled by refrigeration generated by a cryocooler, passed into an auxiliary tank, pressurized, and returned to the primary storage tank, preferably by way of the cryocooler, thus cooling the storage tank contents and reducing the pressure within and the vapor losses from the storage tank.