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    COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR SELECTING POLARIZATION SETTINGS FOR AN INSPECTION SYSTEM
    1.
    发明申请
    COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR SELECTING POLARIZATION SETTINGS FOR AN INSPECTION SYSTEM 有权
    计算机实现方法，载体介质和选择用于检查系统的极化设置的系统

    公开(公告)号：US20090284733A1

    公开(公告)日：2009-11-19

    申请号：US12120577

    申请日：2008-05-14

    申请人： Richard Wallingford ,  Stephanie Chen ,  Jason Kirkwood ,  Tao Luo ,  Yong Zhang ,  Lisheng Gao

    发明人： Richard Wallingford ,  Stephanie Chen ,  Jason Kirkwood ,  Tao Luo ,  Yong Zhang ,  Lisheng Gao

    IPC分类号： G01N21/00

    CPC分类号： G01N21/21 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8867

    摘要： Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system for inspection of a layer of a wafer are provided. One method includes detecting a population of defects on the layer of the wafer using results of each of two or more scans of the wafer performed with different combinations of polarization settings of the inspection system for illumination and collection of light scattered from the wafer. The method also includes identifying a subpopulation of the defects for each of the different combinations, each of which includes the defects that are common to at least two of the different combinations, and determining a characteristic of a measure of signal-to-noise for each of the subpopulations. The method further includes selecting the polarization settings for the illumination and the collection to be used for the inspection corresponding to the subpopulation having the best value for the characteristic.

    摘要翻译： 提供了计算机实现的方法，载体介质和用于选择用于检查晶片层的检查系统的偏振设置的系统。 一种方法包括使用用于照明的偏光设置的不同组合和从晶片散射的光的收集的晶片的两次或多次扫描中的每一个的结果来检测晶片层上的缺陷群。 该方法还包括识别每个不同组合的缺陷的子群体，每个组合包括对于至少两个不同组合是共同的缺陷，以及确定每个组合的信噪比度量的特性 的亚群。 该方法还包括选择用于与用于该特征具有最佳值的亚群相对应的检查的照明和收集的偏振设置。

    Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system
    2.
    发明授权
    Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system 有权
    计算机实现的方法，载体介质和用于选择检查系统的偏振设置的系统

    公开(公告)号：US08049877B2

    公开(公告)日：2011-11-01

    申请号：US12120577

    申请日：2008-05-14

    申请人： Richard Wallingford ,  Stephanie Chen ,  Jason Kirkwood ,  Tao Luo ,  Yong Zhang ,  Lisheng Gao

    发明人： Richard Wallingford ,  Stephanie Chen ,  Jason Kirkwood ,  Tao Luo ,  Yong Zhang ,  Lisheng Gao

    IPC分类号： G01N21/00

    CPC分类号： G01N21/21 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8867

    摘要： Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system for inspection of a layer of a wafer are provided. One method includes detecting a population of defects on the layer of the wafer using results of each of two or more scans of the wafer performed with different combinations of polarization settings of the inspection system for illumination and collection of light scattered from the wafer. The method also includes identifying a subpopulation of the defects for each of the different combinations, each of which includes the defects that are common to at least two of the different combinations, and determining a characteristic of a measure of signal-to-noise for each of the subpopulations. The method further includes selecting the polarization settings for the illumination and the collection to be used for the inspection corresponding to the subpopulation having the best value for the characteristic.

    摘要翻译： 提供了计算机实现的方法，载体介质和用于选择用于检查晶片层的检查系统的偏振设置的系统。 一种方法包括使用用于照明的偏光设置的不同组合和从晶片散射的光的收集的晶片的两次或多次扫描中的每一个的结果来检测晶片层上的缺陷群。 该方法还包括识别每个不同组合的缺陷的子群体，每个组合包括对于至少两个不同组合是共同的缺陷，以及确定每个组合的信噪比度量的特性 的亚群。 该方法还包括选择用于与用于该特征具有最佳值的亚群相对应的检查的照明和收集的偏振设置。

    Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer
    5.
    发明授权
    Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer 有权
    计算机实现的方法，载体介质和用于确定在晶片上检测到的缺陷尺寸的系统

    公开(公告)号：US08000905B1

    公开(公告)日：2011-08-16

    申请号：US11855589

    申请日：2007-09-14

    申请人： Stephanie Chen ,  Subramanian Balakrishnan ,  Richard Wallingford

    发明人： Stephanie Chen ,  Subramanian Balakrishnan ,  Richard Wallingford

    IPC分类号： G01B5/28

    CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8854

    摘要： Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer are provided. One computer-implemented method includes separating the defects into groups based on output acquired for the defects by multiple channels of an inspection system used to detect the defects on the wafer. The method also includes separating the defects in one or more of the groups into subgroups based on the output acquired for the defects by one or more of the multiple channels. In addition, the method includes determining the sizes of one or more of the defects in one or more of the subgroups separately based on the output acquired for the defects by only one of the multiple channels and a calibration parameter. The calibration parameter is different for each of the subgroups and is acquired by using another system to measure actual sizes of defects detected on other wafers.

    摘要翻译： 提供了计算机实现的方法，载体介质和用于确定晶片上检测到的缺陷尺寸的系统。 一种计算机实现的方法包括基于用于检测晶片上的缺陷的检查系统的多个通道为缺陷获取的输出将缺陷分离成组。 该方法还包括基于通过一个或多个多个通道为缺陷获得的输出将一个或多个组中的缺陷分离成子组。 此外，该方法包括基于仅通过多个通道中的一个获得的用于缺陷的输出和校准参数，分别确定一个或多个子组中的一个或多个子组中的一个或多个缺陷的大小。 校准参数对于每个子组是不同的，并且通过使用另一个系统来测量在其他晶片上检测到的缺陷的实际尺寸来获取。