公开(公告)号：US20080087083A1

公开(公告)日：2008-04-17

申请号：US11860946

申请日：2007-09-25

申请人： Ryuta NISHIZAWA ,  Masako TANAKA

发明人： Ryuta NISHIZAWA ,  Masako TANAKA

IPC分类号： G01P15/097

CPC分类号： G01P15/097

摘要： An acceleration sensor having a vibrating body includes: a base fixed to a pedestal; an oscillating arm extended from the base in a beam-like shape, oscillating transversally in a planer direction at a predetermined resonant frequency. Here, the oscillating arm includes: an oscillating block defined by a through hole opened through a thickness direction at a widthwise center of the oscillating arm, the through hole extending in a lengthwise direction thereof; an added mass being a junction of a distal end of the oscillating block defined by the through hole; and an excitation means installed on the oscillating arm. At this time, the oscillating arm is supported by the base and by the added mass, either in a pseudo-dual anchor structure or a single anchor structure. With the above configuration, the acceleration sensor detects a resonant frequency variability of the vibrating body caused by an inertial effect of the added mass under acceleration.

摘要翻译： 具有振动体的加速度传感器包括：固定在基座上的基座; 摆动臂从基部以波束形状延伸，以预定的共振频率在平面方向上横向振荡。 这里，振荡臂包括：振荡块，其由在摆动臂的宽度方向中心处的厚度方向开口的通孔限定，所述通孔沿其长度方向延伸; 添加的质量是由通孔限定的振荡块的远端的接合点; 以及安装在摆臂上的激励装置。 此时，摆动臂由基座和附加质量支撑在伪双重锚结构或单锚锚结构中。 通过上述结构，加速度传感器检测由加速度的加速度的惯性效应引起的振动体的共振频率变化。

公开(公告)号：US20120326570A1

公开(公告)日：2012-12-27

申请号：US13530615

申请日：2012-06-22

申请人： Ryuta NISHIZAWA ,  Seiichiro OGURA ,  Takayuki KIKUCHI

发明人： Ryuta NISHIZAWA ,  Seiichiro OGURA ,  Takayuki KIKUCHI

IPC分类号： H01L41/04 ,  H01L41/22 ,  H01L41/047

CPC分类号： H03H9/215 ,  H03H3/02 ,  H03H2003/026

摘要： A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching.

摘要翻译： 弯曲振动元件具有从基部延伸并具有矩形横截面形状的振动臂，所述振动臂具有由分别与左侧表面和右侧表面相交的台阶表面组成的第一和第二台阶部分，以及步骤 在下表面，上表面和左侧表面之间，右侧表面以及第一和第四检测电极在左侧表面和右侧表面上分别与上表面和下表面相交的侧表面，以及第二和第三检测 台阶侧表面上的电极分别在振动臂的厚度方向上分离。 通过利用现有的光蚀刻使用公共曝光装置从上表面和下表面曝光来精确地对第一至第四检测电极进行图案化。

公开(公告)号：US20110227657A1

公开(公告)日：2011-09-22

申请号：US13044012

申请日：2011-03-09

申请人： Ryuta NISHIZAWA ,  So ICHIKAWA

发明人： Ryuta NISHIZAWA ,  So ICHIKAWA

IPC分类号： H03B5/30

CPC分类号： H03H9/215 ,  G01C19/5621 ,  G01C19/5628 ,  G01C19/5656 ,  G01P15/097 ,  H03H9/19

摘要： A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

摘要翻译： 振动元件包括：基部; 以及从第一方向从基部延伸的振动臂，所述振动臂包括从所述第一方向的所述基部侧顺序地配置的第一区域，第二区域和第三区域，所述第一区域到所述第三区域包括 第一电极和第二电极，其在平面图中在与第一方向垂直的第二方向上产生电场，并且彼此电独立，其中第一区域和第三区域的电场方向以及第二区域的电场方向 彼此相对，并且振动臂通过第二方向上的电场在第一方向上膨胀和收缩，并且振动臂在垂直于相应的第一方向和第二方向的方向上沿第三方向振动。

公开(公告)号：US20110226057A1

公开(公告)日：2011-09-22

申请号：US13042795

申请日：2011-03-08

申请人： Ryuta NISHIZAWA

发明人： Ryuta NISHIZAWA

IPC分类号： G01C19/56

CPC分类号： G01C19/5642

摘要： A vibration gyro element includes: a base section; a detection arm extending from the base section in a first direction; a joint section disposed at an end portion of the base section; a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view; a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm; a first set of drive electrodes provided to the first drive arm; a second set of drive electrodes provided to the second drive arm; and a set of detection electrodes provided to the detection arm, wherein the first drive arm vibrates in a third direction perpendicular to the first direction and the second direction, the second drive arm vibrates in a same direction as the first drive arm.

摘要翻译： 振动陀螺元件包括：基部; 检测臂，其从所述基部沿第一方向延伸; 设置在所述基部的端部的接合部; 第一驱动臂在平面图中沿与第一方向交叉的第二方向从接合部延伸; 第二驱动臂，其从所述接合部沿与所述第一驱动臂的延伸方向相反的方向延伸; 提供给第一驱动臂的第一组驱动电极; 设置在所述第二驱动臂上的第二组驱动电极; 以及设置在所述检测臂上的一组检测电极，其中所述第一驱动臂在垂直于所述第一方向和所述第二方向的第三方向上振动，所述第二驱动臂沿与所述第一驱动臂相同的方向振动。

公开(公告)号：US20100064813A1

公开(公告)日：2010-03-18

申请号：US12556778

申请日：2009-09-10

申请人： Ryuta NISHIZAWA ,  Takahiro KAMETA

发明人： Ryuta NISHIZAWA ,  Takahiro KAMETA

IPC分类号： G01H13/00 ,  H01L41/04

CPC分类号： G01P15/097 ,  G01P2015/0828

摘要： A vibratory sensor includes a resonator element including (i) a first base portion and a second base portion, each of the first and the second base portions having an upper main surface and a lower main surface, (ii) a resonating arm extended in a beam shape between the first and the second base portions to be vibrated at a predetermined resonance frequency, (iii) a first narrow portion formed by reducing a width of a portion extended from the first base portion to be smaller than a width of the first base portion in a direction orthogonal to an extending direction of the resonating arm, (iv) a second narrow portion formed by reducing a width of a portion extended from the second base portion to be smaller than a width of the second base portion in the direction orthogonal to the extending direction of the resonating arm, (v) a first support portion extended from the first narrow portion in a direction opposite to the first base portion, and (vi) a second support portion extended from the second narrow portion in a direction opposite to the second base portion, a length ratio of the first narrow portion versus the first base portion in the extending direction of the resonating arm and a length ratio of the second narrow portion versus the second base portion in the extending direction of the resonating arm being in a range of 50 to 200% inclusive; and a base supporting the resonator element, the base being connected to one of upper and lower main surfaces of each of the first and the second support portions included in the resonator element.

摘要翻译： 振动传感器包括谐振器元件，其包括：（i）第一基部和第二基部，第一和第二基部中的每一个具有上主表面和下主表面，（ii） 在第一和第二基部之间的光束形状以预定的谐振频率振动，（iii）通过将从第一基部延伸的部分的宽度减小而形成的第一窄部小于第一基部的宽度 在与所述谐振臂的延伸方向正交的方向上的部分，（iv）通过将从所述第二基部延伸的部分的宽度减小到比所述第二基部的宽度小的方式形成的第二窄部， （v）从与所述第一基部相反的方向从所述第一窄部延伸的第一支撑部，以及（vi）从所述第一支撑部延伸的第二支撑部， 所述第二窄部在与所述第二基部相反的方向上，所述第一窄部与所述第一基部在所述共鸣臂的延伸方向上的长度比和所述第二窄部相对于所述第二基部的长度比在 谐振臂的延伸方向在50〜200％的范围内; 以及支撑所述谐振器元件的基座，所述基座连接到包括在所述谐振器元件中的所述第一和第二支撑部分中的每一个的上主表面和下主表面中的一个。

公开(公告)号：US20110221312A1

公开(公告)日：2011-09-15

申请号：US13042783

申请日：2011-03-08

申请人： Ryuta NISHIZAWA

发明人： Ryuta NISHIZAWA

IPC分类号： H01L41/04

CPC分类号： G01L1/162 ,  G01L9/0022 ,  G01P15/097

摘要： A vibrator element includes: a base portion; a vibrating arm that extends in a first direction from the base portion, has a width in a second direction perpendicular to the first direction in the plan view, and has a thickness in a third direction perpendicular to the first direction and the second direction; and an inter digital transducer, in which electrode fingers are arranged in the first direction, disposed at least one of a first surface, which is perpendicular to the third direction, and a second surface, which faces the first surface, of the vibrating arm, wherein the vibrating arm is vibrated in the third direction by stretching or contacting the vibrating arm in the first direction by using an electric field in the first direction that is generated by the inter digital transducer.

摘要翻译： 振动元件包括：基部; 从基部沿第一方向延伸的振动臂在平面图中沿垂直于第一方向的第二方向具有宽度，并且具有与第一方向和第二方向垂直的第三方向的厚度; 以及其中电极指沿着第一方向排列的数字式换能器，其设置有与第三方向垂直的第一表面和面对振动臂的第一表面的第二表面中的至少一个， 其中所述振动臂通过使用由所述数字式换能器产生的所述第一方向上的电场在所述第一方向上拉伸或接触所述振动臂而在所述第三方向上振动。

公开(公告)号：US20110140575A1

公开(公告)日：2011-06-16

申请号：US12960783

申请日：2010-12-06

申请人： Ryuta NISHIZAWA

发明人： Ryuta NISHIZAWA

IPC分类号： H03H9/21 ,  H01L41/04 ,  H01L41/047 ,  G01P9/04

CPC分类号： H03H9/19 ,  G01C19/5628 ,  H03H9/215

摘要： A resonator element includes: a base part; plural vibrating arms extended from the base part, each having a first principal surface and a second principal surface opposed to each other and a first side surface and a second side surface connecting the first principal surface and the second principal surface and opposed to each other, the first side surface of at least one vibrating arm of the plural vibrating arms having a first step part provided from the first principal surface side and a second step part provided from the second principal surface side; a first electrode provided on the second side surface of the vibrating arm; a second electrode provided in a position opposed to the first electrode of the first step part; and a third electrode provided in a position opposed to the first electrode of the second step part.

摘要翻译： 谐振器元件包括：基部; 多个振动臂从基部延伸，每个具有彼此相对的第一主表面和第二主表面，以及连接第一主表面和第二主表面并彼此相对的第一侧表面和第二侧表面， 所述多个振动臂的至少一个振动臂的第一侧面具有从所述第一主面侧设置的第一台阶部和从所述第二主面侧设置的第二台阶部， 设置在所述振动臂的第二侧面上的第一电极; 设置在与所述第一台阶部的所述第一电极相对的位置的第二电极; 以及设置在与所述第二台阶部的所述第一电极相对的位置的第三电极。