APPARATUS FOR FORMING LINE BEAM
    2.
    发明申请

    公开(公告)号:US20210333564A1

    公开(公告)日:2021-10-28

    申请号:US17092669

    申请日:2020-11-09

    Abstract: The present disclosure relates to an apparatus for forming a line beam. The apparatus includes a laser source, a telescope unit, a beam-transforming unit, a Fourier unit, a long-axis optical unit, and a short-axis optical unit. The laser source is configured to generate input light. The telescope unit is configured to magnify the input light in an X-axis direction perpendicular to an optical axis, which is a progression direction of the input light. The beam-transforming unit is configured to divide light incident from the telescope unit into a plurality of sub-columns. The Fourier unit is configured to uniformly mix the plurality of sub-columns. The long-axis optical unit is configured to uniformly disperse light mixed by the Fourier unit in the X-axis direction. The short-axis optical unit is configured to focus light passing through the long-axis optical unit onto a reference plane, wherein the short-axis optical unit includes a concave reflective surface, and a curvature of the reflective surface is maintained constant in the X-axis direction.

    LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD USING THE SAME

    公开(公告)号:US20230135789A1

    公开(公告)日:2023-05-04

    申请号:US17872331

    申请日:2022-07-25

    Abstract: A laser annealing apparatus includes a plurality of lasers, a laser controller that controls the plurality of lasers such that a plurality of laser beams generated from the plurality of lasers is emitted at different timings, beam mixer optics that outputs a processing beam by mixing the plurality of laser beams of which output timings are adjusted, and focus optics that outputs the processing beam of which focus is adjusted. The processing beam includes a first processing laser beam having a first pulse, a second processing laser beam having a second pulse following the first pulse, and a third processing laser beam having a third pulse following the second pulse. A first peak of the first pulse is smaller than a second peak of the second pulse, and a third peak of the third pulse is smaller than the second peak.

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