RETICLE IN AN APPARATUS FOR EXTREME ULTRAVIOLET EXPOSURE

    公开(公告)号:US20210302825A1

    公开(公告)日:2021-09-30

    申请号:US17028049

    申请日:2020-09-22

    摘要: A reticle for an apparatus for EUV exposure and a method of manufacturing a reticle, the reticle including a substrate including an edge region and a main region; a multi-layer structure on the main region and the edge region, a sidewall of the multi-layer structure overlying the edge region; a capping layer covering an upper surface and the sidewall of the multi-layer structure and at least a portion of the edge region of the substrate; and an absorber layer on the capping layer, the absorber layer covering an entire upper surface of the capping layer on the edge region of the substrate, wherein a stacked structure of the capping layer and the absorber layer is on an upper surface of the edge region of the substrate, and a sidewall of the stacked structure of the capping layer and the absorber layer is perpendicular to an upper surface of the substrate.

    TEST APPARATUS AND TEST METHOD THEREOF

    公开(公告)号:US20220404395A1

    公开(公告)日:2022-12-22

    申请号:US17721522

    申请日:2022-04-15

    IPC分类号: G01R1/067 G01R1/04

    摘要: A test apparatus includes a movable stage to support a sample, tips above the stage that have different shapes and alternately perform profiling and milling on the sample, a tip stage connected to a cantilever coupled to the tips, the tip stage to adjust a position of the cantilever, a position sensor to obtain information about a positional relationship between the tips and the sample, a stage controller to control movements of the stage and the tip stage, based on the information about the positional relationship, and a tip controller to select the tips for performing the profiling or milling and to determine conditions for performing milling, wherein a depth of the sample being processed by the milling in the first direction is controlled based on a relationship between a distance between the tips and the sample and a force between the tips and the sample.

    PELLICLE
    9.
    发明申请
    PELLICLE 有权

    公开(公告)号:US20150212433A1

    公开(公告)日:2015-07-30

    申请号:US14338611

    申请日:2014-07-23

    发明人: Hoon KIM

    IPC分类号: G03F7/20

    摘要: A pellicle includes a first frame affixing a reticle, the first frame having a tapered locking groove, a second frame on the first frame, the second frame having a locking portion that is detachably combined with the tapered locking groove of the first frame, and a membrane affixed to the second frame.

    摘要翻译: 防护薄膜组件包括固定标线的第一框架,第一框架具有锥形锁定槽,第一框架上的第二框架,第二框架具有可拆卸地与第一框架的锥形锁定槽组合的锁定部分, 膜固定在第二框架上。