公开(公告)号：US20180350838A1

公开(公告)日：2018-12-06

申请号：US16043236

申请日：2018-07-24

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Taejoong SONG ,  Ha-Young KIM ,  Jung-Ho DO ,  Sanghoon BAEK ,  Jinyoung LIM ,  Kwangok JEONG

IPC分类号： H01L27/118 ,  H01L21/66 ,  G06F17/50 ,  H01L49/02 ,  H01L27/11582 ,  H01L27/092 ,  H01L27/02 ,  G03F1/36 ,  H01L21/8238

CPC分类号： H01L27/11807 ,  G03F1/36 ,  G06F17/5045 ,  G06F17/505 ,  G06F17/5077 ,  G06F17/5081 ,  H01L21/823821 ,  H01L21/823878 ,  H01L22/20 ,  H01L27/0207 ,  H01L27/0924 ,  H01L27/11582 ,  H01L28/00 ,  H01L2027/11831 ,  H01L2027/11881

摘要： A semiconductor device includes a substrate including a first active region and a second active region, the first active region having a conductivity type that is different than a conductivity type of the second active region, and the first active region being spaced apart from the second active region in a first direction, gate electrodes extending in the first direction, the gate electrodes intersecting the first active region and the second active region, a first shallow isolation pattern disposed in an upper portion of the first active region, the first shallow isolation pattern extending in the first direction, and a deep isolation pattern disposed in an upper portion of the second active region, the deep isolation pattern extending in the first direction, and the deep isolation pattern dividing the second active region into a first region and a second region.

公开(公告)号：US20170062475A1

公开(公告)日：2017-03-02

申请号：US15282206

申请日：2016-09-30

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Taejoong SONG ,  Ha-Young KIM ,  Jung-Ho DO ,  Sanghoon BAEK ,  Jinyoung LIM ,  Kwangok JEONG

IPC分类号： H01L27/118 ,  G03F1/36 ,  G06F17/50

CPC分类号： H01L27/11807 ,  G03F1/36 ,  G06F17/5045 ,  G06F17/505 ,  G06F17/5077 ,  G06F17/5081 ,  H01L21/823821 ,  H01L21/823878 ,  H01L22/20 ,  H01L27/0207 ,  H01L27/0924 ,  H01L27/11582 ,  H01L28/00 ,  H01L2027/11831 ,  H01L2027/11881

摘要： A semiconductor device includes a substrate including a first active region and a second active region, the first active region having a conductivity type that is different than a conductivity type of the second active region, and the first active region being spaced apart from the second active region in a first direction, gate electrodes extending in the first direction, the gate electrodes intersecting the first active region and the second active region, a first shallow isolation pattern disposed in an upper portion of the first active region, the first shallow isolation pattern extending in the first direction, and a deep isolation pattern disposed in an upper portion of the second active region, the deep isolation pattern extending in the first direction, and the deep isolation pattern dividing the second active region into a first region and a second region.

公开(公告)号：US20210050854A1

公开(公告)日：2021-02-18

申请号：US17088819

申请日：2020-11-04

申请人： Samsung Electronics Co., Ltd.

发明人： Taejoong SONG ,  Jungho DO ,  Seungyoung LEE ,  Jonghoon JUNG

IPC分类号： H03K19/17724 ,  H01L27/02 ,  H01L29/06 ,  H01L23/528 ,  H01L29/423 ,  H01L27/088

摘要： A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active fins that protrude from the substrate, the first and second active fins extending in a second direction intersecting the first direction and being spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active fins, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active fin of the first logic cell from the first active fin of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.

公开(公告)号：US20200076436A1

公开(公告)日：2020-03-05

申请号：US16677165

申请日：2019-11-07

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Taejoong SONG ,  Jungho DO ,  Seungyoung LEE ,  Jonghoon JUNG

IPC分类号： H03K19/177 ,  H01L27/02 ,  H01L29/06 ,  H01L23/528 ,  H01L29/423 ,  H01L27/088

摘要： A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active fins that protrude from the substrate, the first and second active fins extending in a second direction intersecting the first direction and being spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active fins, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active fin of the first logic cell from the first active fin of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.

公开(公告)号：US20160085904A1

公开(公告)日：2016-03-24

申请号：US14844420

申请日：2015-09-03

申请人： Samsung Electronics Co., Ltd.

发明人： Taejoong SONG ,  Jung-Ho DO ,  Changho HAN

IPC分类号： G06F17/50

CPC分类号： G06F17/5081 ,  G01R31/2882 ,  G06F2217/14

摘要： A semiconductor device and a layout verification method of a semiconductor device are provided. The layout verification method includes forming a plurality of standard cells each having a first type of a cross coupled structure (XC) and a second type of the XC on a substrate of the semiconductor device, forming a plurality of first inverters in which the first type of the XC is activated in the a plurality of the standard cells and a plurality of second inverters in which the second type of the XC is activated in the a plurality of the standard cells and estimating an electrical characteristic of the first type of the XC or the second type of the XC by measuring a magnitude of a signal delay of the plurality of the first inverters or the plurality of the second inverters.

摘要翻译： 提供半导体器件的半导体器件和布局验证方法。 布局验证方法包括在半导体器件的衬底上形成多个标准单元，每个标准单元具有第一类型的交叉耦合结构（XC）和第二类型的XC，形成多个第一反相器，其中第一类型 在多个标准单元中激活XC的多个标准单元以及多个第二反相器，其中第二类型的XC在多个标准单元中被激活并且估计第一类型的XC的电特性或 通过测量多个第一反相器或多个第二反相器的信号延迟的大小来确定第二类型的XC。

公开(公告)号：US20210383861A1

公开(公告)日：2021-12-09

申请号：US17412588

申请日：2021-08-26

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sang-Yeop BAECK ,  Tae-Hyung KIM ,  Daeyoung MOON ,  Dong-Wook SEO ,  Inhak LEE ,  Hyunsu CHOI ,  Taejoong SONG ,  Jae-Seung CHOI ,  Jung-Myung KANG ,  Hoon KIM ,  Jisu YU ,  Sun-Yung JANG

IPC分类号： G11C11/419 ,  G11C7/08 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11

摘要： A semiconductor device includes an active area extending in a first direction, a first transistor including a first gate electrode and first source and drain areas disposed on the active area, the first source and drain areas being disposed at opposite sides of the first gate electrode, a second transistor including a second gate electrode and second source and drain areas disposed on the active area, the second source and drain areas being disposed at opposite sides of the second gate electrode, and a third transistor including a third gate electrode and third source and drain areas disposed on the active area, the third source and drain areas being disposed at opposite sides of the third gate electrode, and the first gate electrode, the second gate electrode, and the third gate electrode extending in a second direction different from the first direction. The second transistor is configured to turn on and off, based on an operation mode of the semiconductor device.

公开(公告)号：US20200005860A1

公开(公告)日：2020-01-02

申请号：US16566002

申请日：2019-09-10

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sang-Yeop BAECK ,  Tae-Hyung KIM ,  Daeyoung MOON ,  Dong-Wook SEO ,  Inhak LEE ,  Hyunsu CHOI ,  Taejoong SONG ,  Jae-Seung CHOI ,  Jung-Myung KANG ,  Hoon KIM ,  Jisu YU ,  Sun-Yung JANG

IPC分类号： G11C11/419 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11

摘要： A semiconductor device includes an active area extending in a first direction, a first transistor including a first gate electrode and first source and drain areas disposed on the active area, the first source and drain areas being disposed at opposite sides of the first gate electrode, a second transistor including a second gate electrode and second source and drain areas disposed on the active area, the second source and drain areas being disposed at opposite sides of the second gate electrode, and a third transistor including a third gate electrode and third source and drain areas disposed on the active area, the third source and drain areas being disposed at opposite sides of the third gate electrode, and the first gate electrode, the second gate electrode, and the third gate electrode extending in a second direction different from the first direction. The second transistor is configured to turn on and off, based on an operation mode of the semiconductor device.

公开(公告)号：US20170221554A1

公开(公告)日：2017-08-03

申请号：US15417807

申请日：2017-01-27

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sang-Yeop BAECK ,  Tae-Hyung KIM ,  Daeyoung MOON ,  Dong-Wook SEO ,  Inhak LEE ,  Hyunsu CHOI ,  Taejoong SONG ,  Jae-Seung CHOI ,  Jung-Myung KANG ,  Hoon KIM ,  Jisu YU ,  Sun-Yung JANG

IPC分类号： G11C11/419 ,  H01L23/528 ,  H01L27/092 ,  H01L27/11

摘要： A semiconductor device includes an active area extending in a first direction, a first transistor including a first gate electrode and first source and drain areas disposed on the active area, the first source and drain areas being disposed at opposite sides of the first gate electrode, a second transistor including a second gate electrode and second source and drain areas disposed on the active area, the second source and drain areas being disposed at opposite sides of the second gate electrode, and a third transistor including a third gate electrode and third source and drain areas disposed on the active area, the third source and drain areas being disposed at opposite sides of the third gate electrode, and the first gate electrode, the second gate electrode, and the third gate electrode extending in a second direction different from the first direction. The second transistor is configured to turn on and off, based on an operation mode of the semiconductor device.

公开(公告)号：US20230186982A1

公开(公告)日：2023-06-15

申请号：US18164199

申请日：2023-02-03

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sang-Yeop BAECK ,  Tae-Hyung KIM ,  Daeyoung MOON ,  Dong-Wook SEO ,  Inhak LEE ,  Hyunsu CHOI ,  Taejoong SONG ,  Jae-Seung CHOI ,  Jung-Myung Kang ,  Hoon KIM ,  Jisu YU ,  Sun-Yung JANG

IPC分类号： G11C11/419 ,  G11C7/08 ,  H10B10/00 ,  H01L23/528 ,  H01L27/092

CPC分类号： G11C11/419 ,  G11C7/08 ,  H10B10/12 ,  H10B10/18 ,  H01L23/5286 ,  H01L27/092

摘要： A semiconductor device includes an active area extending in a first direction, a first transistor including a first gate electrode and first source and drain areas disposed on the active area, the first source and drain areas being disposed at opposite sides of the first gate electrode, a second transistor including a second gate electrode and second source and drain areas disposed on the active area, the second source and drain areas being disposed at opposite sides of the second gate electrode, and a third transistor including a third gate electrode and third source and drain areas disposed on the active area, the third source and drain areas being disposed at opposite sides of the third gate electrode, and the first gate electrode, the second gate electrode, and the third gate electrode extending in a second direction different from the first direction. The second transistor is configured to turn on and off, based on an operation mode of the semiconductor device.

公开(公告)号：US20200220548A1

公开(公告)日：2020-07-09

申请号：US16820835

申请日：2020-03-17

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Taejoong SONG ,  Jungho Do ,  Seungyoung Lee ,  Jonghoon Jung

IPC分类号： H03K19/17724 ,  H01L27/02 ,  H01L29/06 ,  H01L23/528 ,  H01L29/423 ,  H01L27/088

摘要： A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active fins that protrude from the substrate, the first and second active fins extending in a second direction intersecting the first direction and being spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active fins, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active fin of the first logic cell from the first active fin of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.