公开(公告)号：US11302384B2

公开(公告)日：2022-04-12

申请号：US16931933

申请日：2020-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chulung Kim ,  Joungyeal Kim ,  Seongheon Yu ,  Hyunjin Ko ,  Wooil Kim ,  Hyeonsoo Sim

IPC: G11C11/4093 ,  G11C11/4096 ,  G06F13/40 ,  G06F13/16 ,  H01L25/065 ,  H01L25/18

Abstract: In a method of controlling on-die termination (ODT) in a memory system including a plurality of memory units that shares a data bus to transfer data, ODT circuits of the plurality of memory units are enabled into an initial state, a resistance value of the ODT circuit is set to a first resistance value, of at least one write non-target memory unit among the plurality of memory units during a write operation on a write target memory unit among the plurality of memory units, and a resistance value of the ODT circuit is set to a second resistance value, of at least one read non-target memory unit among the plurality of memory units during a read operation on a read target memory unit among the plurality of memory units.

公开(公告)号：US12191190B2

公开(公告)日：2025-01-07

申请号：US17737490

申请日：2022-05-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongmyung Jun ,  Hyunjin Ko ,  Seohyun Kim ,  Jae Seong Ryu ,  Inkwang Bae ,  Seungbu Baek

IPC: H01L21/687 ,  H01L21/67

Abstract: A substrate processing chamber includes a housing providing a process space; a spin apparatus provided in the housing; and a fluid spraying nozzle configured to spray fluid into the process space, wherein the spin apparatus includes: a spin chuck configured to support a substrate; a rotation driving part configured to rotate the spin chuck; and a weight sensor configured to measure a weight of the substrate supported on the spin chuck.