公开(公告)号：US20230071131A1

公开(公告)日：2023-03-09

申请号：US17709534

申请日：2022-03-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hoseok SONG ,  Sunghyup KIM ,  Injae LEE ,  Jeonggil KIM

IPC: G03F7/20

Abstract: A collector mirror for an extreme ultraviolet (EUV) light generator includes a first mirror in a vessel, the vessel being configured to receive a material and a laser beam for generating the EUV light, a second mirror surrounding the first mirror, and a detachable third mirror between the first mirror and the second mirror, the third mirror having an inner diameter that is not smaller than an outer diameter of the first mirror, and an outer diameter that is not larger than an inner diameter of the second mirror.

公开(公告)号：US20240121877A1

公开(公告)日：2024-04-11

申请号：US18338789

申请日：2023-06-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae LEE ,  Sunghyup KIM ,  Yebin NAM ,  Daegeun YOON

IPC: H05G2/00 ,  G03F7/00

CPC classification number: H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/008 ,  G21K1/06

Abstract: An extreme ultraviolet light source device includes a chamber having a lower surface on which a condensing mirror is arranged, an intermediate focus, and a side surface between the lower surface and an upper surface a first exhaust port and a second exhaust port on the upper surface and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light into the chamber; a light source configured to generate the extreme ultraviolet light by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet discharged from the droplet supply unit; a first exhaust connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.

公开(公告)号：US20220084559A1

公开(公告)日：2022-03-17

申请号：US17231521

申请日：2021-04-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae LEE ,  Seungwan KOH

IPC: G11C5/06 ,  G11C7/10 ,  H01L23/528 ,  G11C5/14 ,  G06F13/16

Abstract: A memory card includes a plum its, of interconnection terminals aligned in a row direction and a column direction on a substrate. Each of the plurality of interconnection terminals has a first-axis length equal to no more than 1.2 time that of a second-axis length thereof. A non-volatile memory device is disposed on the substrate. The non-volatile memory device is electrically connected to at least one interconnection terminal corresponding thereto from among the plurality of interconnection terminals.

公开(公告)号：US20250081320A1

公开(公告)日：2025-03-06

申请号：US18638916

申请日：2024-04-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae LEE ,  Ohkug KWON ,  Youngduk SUH ,  Sunghyup KIM ,  Jeonggil KIM ,  Yebin NAM ,  Daegeun YOON ,  Seungpyo HONG

IPC: H05G2/00 ,  G03F7/00

Abstract: An extreme ultraviolet (EUV) light generating device includes a vessel having an internal space, a droplet generator generating droplets to be supplied to the internal space, a droplet emitter emitting the droplets generated by the droplet generator to the internal space, a laser light source generating a laser beam to generate EUV light by reaction with the droplets, a condensing mirror adjacent to the laser light source to at least partially surround the laser light source and concentrating EUV light on an intermediate focus (IF), and gas lock nozzles around the IF to respectively constitute rows and ejecting a flow control gas to the internal space, wherein a tilted direction of a gas lock nozzle in at least one of the rows is tilted in a direction consistent with a tilted direction of a sidewall of the vessel with respect to a central axis direction of the internal space.

公开(公告)号：US20220174806A1

公开(公告)日：2022-06-02

申请号：US17393474

申请日：2021-08-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minseok CHOI ,  Injae LEE ,  Inho CHOI ,  Sungyeol KIM ,  Sunghyup KIM ,  Jeonggil KIM ,  Jongbin PARK

IPC: H05G2/00 ,  G03F7/20 ,  G21K1/06

Abstract: A droplet accelerating assembly includes an acceleration chamber extending in a first direction parallel to an ejection direction of the droplet, the acceleration chamber having a first side connected to the droplet generator, a second side opposite the first side in the first direction, the second side including a discharge hole, and a fluid flow path, a pressure controller connected to the fluid flow path of the acceleration chamber, the pressure controller being configured to adjust an internal pressure of the acceleration chamber, an electrifier in the acceleration chamber, the electrifier being configured to electrify the droplet ejected by the droplet generator into an electrified droplet, and an accelerator in the acceleration chamber, the accelerator being configured to accelerate the electrified droplet.

公开(公告)号：US20210153332A1

公开(公告)日：2021-05-20

申请号：US16990059

申请日：2020-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Injae LEE ,  Sunghyup KIM ,  Jeonggil KIM ,  Jinyong KIM ,  Hyuck SHIN ,  Sungho JANG ,  Inho CHOI

IPC: H05G2/00 ,  G03F7/20

Abstract: A droplet generator for extreme ultraviolet (EUV) exposure device includes a nozzle body with an inclined portion, the nozzle body with the inclined portion having a nozzle shape to discharge a target material in a liquid state, a gas supply pipe, at least a portion of the gas supply pipe being in an internal space of the nozzle body and of the inclined portion, and the gas supply pipe to discharge gas toward the target material in the liquid state, a target material supply unit connected to the nozzle body, the target material supply unit including a first valve, a gas supply unit connected to the gas supply pipe, the gas supply unit including a second valve, and a control unit connected to the first and second valves to control a supply amount of the target material and the gas.

公开(公告)号：US20210103791A1

公开(公告)日：2021-04-08

申请号：US16935374

申请日：2020-07-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Injae LEE ,  Sangsub SONG ,  Minkyung KOOK ,  Kihong JEONG

IPC: G06K19/077 ,  G11C5/14 ,  G11C7/10

Abstract: A card-type solid state drive (SSD) including: a substrate having an insertion edge, a first edge, and a second edge, wherein the first edge and the second edge are adjacent to the insertion edge; a protrusion on the first edge; first column terminals adjacent to the insertion edge and including a first power terminal and first data terminals; second column terminals farther apart from the insertion edge than the first column terminals and including a second power terminal and second data terminals; and third column terminals farther apart from the insertion edge than the second column terminals and including a third power terminal and command terminals, wherein the first, second and third power terminals are arranged along the first edge.