公开(公告)号：US20200225572A1

公开(公告)日：2020-07-16

申请号：US16578628

申请日：2019-09-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yigwon KIM ,  Sangjin KIM ,  Heeyoung GO ,  Heebom KIM ,  Hoon KIM ,  Hong-Seock CHOI ,  Jinseok HEO

IPC: G03F1/54 ,  G03F1/60 ,  G03F1/52 ,  G03F1/22

Abstract: Disclosed are photomasks, methods of fabricating the same, and methods of manufacturing semiconductor devices using the same. The photomask comprises a substrate including a pattern region and a peripheral region around the pattern region, a reflection layer on the pattern region and extending onto the peripheral region, an absorption structure on the reflection layer, and a dielectric pattern on the absorption structure on the peripheral region and exposing the absorption structure on the pattern region.

公开(公告)号：US20170059998A1

公开(公告)日：2017-03-02

申请号：US15182926

申请日：2016-06-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hoyeon KIM ,  Jinseok HEO ,  Insung KIM

IPC: G03F7/20 ,  G02B19/00 ,  H05G2/00

CPC classification number: G03F7/70033 ,  G02B19/0095 ,  G03F7/70916 ,  H05G2/001

Abstract: An extreme ultraviolet generation device, including a chamber with an internal space; a plasma generator to generate plasma in the internal space; a condenser in the internal space to gather light generated from the plasma; and a monitor to monitor the internal space in an omnidirectional manner.

Abstract translation: 一种极紫外线发生装置，包括具有内部空间的腔室; 等离子体发生器，用于在内部空间中产生等离子体; 内部空间的冷凝器收集从等离子体产生的光; 以及监视器以全向方式监视内部空间。

公开(公告)号：US20160204477A1

公开(公告)日：2016-07-14

申请号：US14982748

申请日：2015-12-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hojung YANG ,  Jinseok HEO ,  Hwiyeol PARK ,  Kyunghoon CHO

IPC: H01M10/42 ,  H01M10/04

CPC classification number: H01M10/04 ,  H01M4/48 ,  H01M4/668 ,  H01M10/052

Abstract: A three dimensional (“3D”) secondary battery includes an electrolyte layer and an anode active material layer that are sequentially stacked on a plurality of first trenches that are provided in a cathode active material layer where, in the anode active material layer, a plurality of second trenches having similar shape to that of the first trenches is provided and the plurality of second trenches are filled with an elastic member and where the elastic member absorbs expansion of the anode active material layer during charging and discharging the 3D secondary battery, and thus, the degradation of the 3-dimensional secondary battery is prevented.

Abstract translation: 三维（“3D”）二次电池包括依次层叠在多个第一沟槽中的电解质层和负极活性物质层，所述多个第一沟槽设置在阴极活性物质层中，在阳极活性物质层中， 提供具有与第一沟槽相似形状的第二沟槽，并且多个第二沟槽被填充有弹性构件，并且其中弹性构件在充电和放电3D二次电池期间吸收阳极活性材料层的膨胀，因此 ，防止了三维二次电池的劣化。