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公开(公告)号:US20240274510A1
公开(公告)日:2024-08-15
申请号:US18646015
申请日:2024-04-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung Ho DO , Seungyoung LEE
IPC: H01L23/48 , H01L27/02 , H01L27/088
CPC classification number: H01L23/481 , H01L27/0207 , H01L27/088
Abstract: Stacked integrated circuit devices may include standard cells including a first standard cell in a first row and a second standard cell in a second row immediately adjacent to the first row. Each of the standard cells may include an upper transistor and a lower transistor. The upper transistor may include an upper active region, an upper gate structure, and an upper source/drain region. The lower transistor may include a lower active region, a lower gate structure, and a lower source/drain region. Each of the standard cells may also include a power line and a power via electrically connecting the power line to the lower source/drain region. The power via of the first standard cell and the power via of the second standard cell may be aligned with each other along the first direction.
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公开(公告)号:US20220246610A1
公开(公告)日:2022-08-04
申请号:US17221355
申请日:2021-04-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seunghyun SONG , Seungyoung LEE , Saehan PARK
IPC: H01L27/092 , H01L29/423 , H01L21/8238
Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a cross-coupled gate circuit in a three-dimensional (3D) stack including a plurality of transistors, a first gate line of a first transistor among the plurality of transistors connected to a fourth gate line of a fourth transistor among the plurality of transistors, a second gate line of a second transistor among the plurality of transistors connected to a third gate line of a third transistor among the plurality of transistors, a first conductor connecting the first gate line and the fourth gate line, a second conductor connecting the second gate line and the third gate line. The first gate line and the second gate line are arranged above the third gate line and the fourth gate line, respectively.
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公开(公告)号:US20220230961A1
公开(公告)日:2022-07-21
申请号:US17220643
申请日:2021-04-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Saehan PARK , Seungyoung LEE
IPC: H01L23/528
Abstract: Provided is a semiconductor architecture having a metal-oxide-semiconductor field-effect transistor (MOSFET) cell, the semiconductor architecture including a first semiconductor device included in the MOSFET cell, a second semiconductor device included in the MOSFET cell, the second semiconductor device being provided above the first semiconductor device, a first power rail configured to supply power to the first semiconductor device, the first power rail being provided at a vertical level different from the first semiconductor device and the second semiconductor device, and a second power rail configured to supply power to the second semiconductor device, the second power rail being provided at a vertical level between the first semiconductor device and the second semiconductor device.
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公开(公告)号:US20210050854A1
公开(公告)日:2021-02-18
申请号:US17088819
申请日:2020-11-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejoong SONG , Jungho DO , Seungyoung LEE , Jonghoon JUNG
IPC: H03K19/17724 , H01L27/02 , H01L29/06 , H01L23/528 , H01L29/423 , H01L27/088
Abstract: A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active fins that protrude from the substrate, the first and second active fins extending in a second direction intersecting the first direction and being spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active fins, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active fin of the first logic cell from the first active fin of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.
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公开(公告)号:US20200076436A1
公开(公告)日:2020-03-05
申请号:US16677165
申请日:2019-11-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejoong SONG , Jungho DO , Seungyoung LEE , Jonghoon JUNG
IPC: H03K19/177 , H01L27/02 , H01L29/06 , H01L23/528 , H01L29/423 , H01L27/088
Abstract: A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active fins that protrude from the substrate, the first and second active fins extending in a second direction intersecting the first direction and being spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active fins, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active fin of the first logic cell from the first active fin of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.
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公开(公告)号:US20250031360A1
公开(公告)日:2025-01-23
申请号:US18905663
申请日:2024-10-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Byounghak HONG , Seunghyun SONG , Saehan PARK , Seungyoung LEE , Inchan HWANG
IPC: H10B10/00 , H01L21/762 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/786
Abstract: A multi-stack semiconductor device includes: a plurality of lower transistor structures arranged on a lower stack and including a plurality of lower fin structures surrounded by a plurality of lower gate structures, respectively; a plurality of upper transistor structures arranged on an upper stack and including a plurality of upper fin structures surrounded by a plurality of upper gate structures, respectively; and at least one of a lower diffusion break structure on the lower stack and a upper diffusion break structure on the upper stack, wherein the lower diffusion break structure is formed between two adjacent lower gate structures, and isolates two lower transistor structures respectively including the two adjacent lower gate structures from each other, and the upper diffusion break structure is formed between two adjacent upper gate structures, and isolates two upper transistor structures respectively including the two adjacent upper gate structures from each other.
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公开(公告)号:US20190268000A1
公开(公告)日:2019-08-29
申请号:US16159196
申请日:2018-10-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejoong SONG , Jungho DO , Seungyoung LEE , Jonghoon JUNG
IPC: H03K19/177 , H01L27/02 , H01L27/088 , H01L23/528 , H01L29/423 , H01L29/06
Abstract: A semiconductor device is provided. The semiconductor device includes first and second logic cells adjacent to each other on a substrate, and a mixed separation structure extending in a first direction between the first and second logic cells. Each logic cell includes first and second active patterns that extend in a second direction intersecting the first direction and that are spaced apart from each other in the first direction, and gate electrodes extending in the first direction and spanning the first and second active patterns, and having a gate pitch. The mixed separation structure includes a first separation structure separating the first active pattern of the first logic cell from the first active pattern of the second logic cell; and a second separation structure on the first separation structure. A width of the first separation structure is greater than the gate pitch.
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公开(公告)号:US20240128159A1
公开(公告)日:2024-04-18
申请号:US18367549
申请日:2023-09-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Minjae JEONG , Jaehee CHO , Geonwoo NAM , Jungho DO , Jisu YU , Hyeongyu YOU , Seungyoung LEE
IPC: H01L23/48 , H01L21/8238 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/775 , H01L29/786
CPC classification number: H01L23/481 , H01L21/823807 , H01L21/823871 , H01L27/092 , H01L29/0673 , H01L29/42392 , H01L29/66439 , H01L29/775 , H01L29/78696
Abstract: An integrated circuit including a standard cell including: a metal layer including a pattern extending in a first horizontal direction and a plurality of tracks spaced apart from one another in a second horizontal direction, wherein the plurality of tracks include a plurality of cell tracks and one power distribution network (PDN) track, wherein cell patterns are formed on the plurality of cell tracks, and a PDN pattern or a routing pattern is formed on the one power distribution network (PDN) track, wherein a first pattern is spaced apart from a cell boundary of the standard cell by a first length and is formed on a first cell track among the plurality of cell tracks, and wherein a second pattern is spaced apart from a cell boundary of the standard cell by a second length and is formed on a second cell track among the plurality of cell tracks.
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公开(公告)号:US20230343825A1
公开(公告)日:2023-10-26
申请号:US17988485
申请日:2022-11-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Saehan PARK , Panjae PARK , Seungyoung LEE , Byounghak HONG , Gunho JO
IPC: H01L29/06 , H01L27/06 , H01L23/48 , H01L29/08 , H01L29/786 , H01L27/088
CPC classification number: H01L29/0673 , H01L27/0688 , H01L23/481 , H01L29/0847 , H01L29/78696 , H01L27/0886
Abstract: Provided is a three-dimensional stacked (3D-stacked) semiconductor device which includes: a lower active region divided into a lower-1st active sub-region and a lower-2nd active sub-region by at least one lower boundary gate structure; and an upper active region, above the lower active region, divided into an upper-1st active sub-region and an upper-2nd active sub-region by at least one upper boundary gate structure, wherein at least one of the lower boundary gate structure and the upper boundary gate structure is reverse-biased to electrically isolate the lower-1st active sub-region from the lower-2nd active sub-region, and/or electrically isolate the upper-1st active sub-region from the upper-2nd active sub-region
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公开(公告)号:US20170365593A1
公开(公告)日:2017-12-21
申请号:US15692670
申请日:2017-08-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seungyoung LEE , Sanghoon BAEK , Jung-Ho DO
IPC: H01L27/02 , H01L23/528 , H01L23/522 , H01L29/66 , H01L29/78
CPC classification number: H01L23/5226 , H01L23/528 , H01L27/0207 , H01L29/66628 , H01L29/7848
Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, an insulating layer on the gate electrode, first and second lower vias in the insulating layer, first and second lower metal lines provided on the insulating layer and respectively connected to the first and second lower vias, and first and second upper metal lines provided on and respectively connected to the first and second lower metal lines. When viewed in a plan view, the first lower via is overlapped with the second upper metal line, and the second lower via is overlapped with the first upper metal line.
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