公开(公告)号：US20130186856A1

公开(公告)日：2013-07-25

申请号：US13798087

申请日：2013-03-13

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Shuaigang Xiao ,  XiaoMin Yang ,  Yuatzong Hsu ,  HongYing Wang ,  Kim Lee

IPC: B05D3/10 ,  B05C21/00 ,  G03F7/20 ,  B05D3/00

CPC classification number: B05D3/107 ,  B05C21/005 ,  B05D3/007 ,  G03F7/20 ,  G11B5/746 ,  G11B5/855 ,  H01L21/02112 ,  H01L21/3065 ,  Y10T428/24802

Abstract: The embodiments disclose a method of fabricating servo integrated templates including depositing a protective layer on servo zone resist layer patterns, patterning integrated data zone features into a substrate, depositing a protective layer on data zones and removing the servo zone protective layer and patterning integrated servo zone features into the substrate and removing the data zone protective layer creating a substrate template used in fabricating data and servo zone integrated patterned stacks.

Abstract translation: 这些实施例公开了一种制造伺服集成模板的方法，包括在伺服区抗蚀剂层图案上沉积保护层，将集成的数据区特征图案化成衬底，在数据区上沉积保护层并移除伺服区保护层， 特征进入衬底并移除数据区保护层，形成用于制造数据和伺服区集成图案化堆叠的衬底模板。

公开(公告)号：US09638995B2

公开(公告)日：2017-05-02

申请号：US14199889

申请日：2014-03-06

Applicant: Seagate Technology LLC

Inventor： René van de Veerdonk ,  XiaoMin Yang ,  Kim Lee ,  Justin Hwu

IPC: G03F7/00 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/855

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  G11B5/746 ,  G11B5/855

Abstract: The embodiments disclose a method including depositing a resist layer using a mixture of several different length polymer strings materials spanning a range of natural periodicity, and imprinting the mixture of several different length polymer strings using sheared guiding patterns to increase flexibility.

公开(公告)号：US09079216B2

公开(公告)日：2015-07-14

申请号：US13798087

申请日：2013-03-13

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Shuaigang Xiao ,  XiaoMin Yang ,  Yautzong Hsu ,  HongYing Wang ,  Kim Lee

IPC: B44C1/22 ,  C23F1/00 ,  G11B5/65 ,  B05D3/10 ,  B05D3/00 ,  B05C21/00 ,  G03F7/20 ,  G11B5/74 ,  G11B5/855 ,  H01L21/02 ,  H01L21/3065

CPC classification number: B05D3/107 ,  B05C21/005 ,  B05D3/007 ,  G03F7/20 ,  G11B5/746 ,  G11B5/855 ,  H01L21/02112 ,  H01L21/3065 ,  Y10T428/24802

Abstract: The embodiments disclose a method of fabricating servo integrated templates including depositing a protective layer on servo zone resist layer patterns, patterning integrated data zone features into a substrate, depositing a protective layer on data zones and removing the servo zone protective layer and patterning integrated servo zone features into the substrate and removing the data zone protective layer creating a substrate template used in fabricating data and servo zone integrated patterned stacks.

Abstract translation: 这些实施例公开了一种制造伺服集成模板的方法，包括在伺服区抗蚀剂层图案上沉积保护层，将集成的数据区特征图案化成衬底，在数据区上沉积保护层并移除伺服区保护层， 特征进入衬底并移除数据区保护层，形成用于制造数据和伺服区集成图案化堆叠的衬底模板。

公开(公告)号：US20140265025A1

公开(公告)日：2014-09-18

申请号：US14199889

申请日：2014-03-06

Applicant: Seagate Technology LLC

Inventor： René van de Veerdonk ,  XiaoMin Yang ,  Kim Lee ,  Justin Hwu

IPC: B29C59/00

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  G11B5/746 ,  G11B5/855

Abstract: The embodiments disclose a method including depositing a resist layer using a mixture of several different length polymer strings materials spanning a range of natural periodicity, and imprinting the mixture of several different length polymer strings using sheared guiding patterns to increase flexibility.

Abstract translation: 实施方案公开了一种方法，其包括使用几种不同长度的聚合物串材料的混合物沉积抗蚀剂层，该材料跨越一定范围的天然周期，并使用剪切的导向图案印刷几种不同长度的聚合物串的混合物以增加挠性。