公开(公告)号：US20180100775A1

公开(公告)日：2018-04-12

申请号：US15839042

申请日：2017-12-12

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA ,  Keiichi YAMAGUCHI ,  Atsushi MATSUO ,  Fumio ICHIKAWA

IPC: G01L1/16 ,  G01L1/10 ,  G01C19/5607

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US20150268107A1

公开(公告)日：2015-09-24

申请号：US14665293

申请日：2015-03-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA ,  Keiichi YAMAGUCHI ,  Atsushi MATSUO ,  Fumio ICHIKAWA

IPC: G01L1/16 ,  H01L41/113 ,  G01L1/10

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract translation: 物理量检测装置包括振动元件和电荷放大器。 振动元件包括第一检测电极，第二检测电极，第三检测电极和第四检测电极。 第一和第四检测电极具有相同的电极性，第二和第三检测电极具有相同的电极性，并且第一和第二检测电极具有相反的电极性。 第一和第四检测电极连接到电荷放大器，第二和第三检测电极连接到电荷放大器。

公开(公告)号：US20140298908A1

公开(公告)日：2014-10-09

申请号：US14244104

申请日：2014-04-03

Applicant: Seiko Epson Corporation

Inventor： Fumio ICHIKAWA

IPC: G01P1/00 ,  G01P3/16

CPC classification number: G01P3/16 ,  G01C19/5719

Abstract: A vibration element includes a base section, a support arm extending from the base section, a driving vibration arm extending from the support arm in a direction intersecting with the extending direction of the support arm, a drive section provided to the driving vibration arm, and having a first electrode layer, a second electrode layer, and a first piezoelectric layer disposed between the first electrode layer and the second electrode layer, the first electrode layer being disposed on the driving vibration arm side, and a monitor section adapted to detect a vibration of the driving vibration arm, provided to the driving vibration arm, and having a third electrode layer, a fourth electrode layer, and a second piezoelectric layer disposed between the third electrode layer and the fourth electrode layer, the third electrode layer being disposed on the driving vibration arm side.

Abstract translation: 振动元件包括基部，从基部延伸的支撑臂，从支撑臂沿与支撑臂的延伸方向交叉的方向延伸的驱动振动臂，设置在驱动振动臂上的驱动部，以及 具有第一电极层，第二电极层和设置在第一电极层和第二电极层之间的第一压电层，第一电极层设置在驱动振动臂侧，以及监测部，其适于检测振动 所述驱动振动臂设置在所述驱动振动臂上，并且具有设置在所述第三电极层和所述第四电极层之间的第三电极层，第四电极层和第二压电层，所述第三电极层设置在所述驱动振动臂上 驱动振动臂一侧。

公开(公告)号：US20170141288A1

公开(公告)日：2017-05-18

申请号：US15351772

申请日：2016-11-15

Applicant: Seiko Epson Corporation

Inventor： Fumio ICHIKAWA

IPC: H01L41/047 ,  G01C19/5607 ,  H01L41/29 ,  H01L41/187 ,  H01L41/09

CPC classification number: H01L41/0475 ,  G01C19/5607 ,  H01L41/09 ,  H01L41/1873 ,  H01L41/29

Abstract: A vibrator device includes a first vibration arm (detection arm) that has walls located on both sides with the through hole, which is penetrated through front and rear surfaces, interposed therebetween; and two electrodes in which the walls are arranged on two internal surfaces located on the walls of the through hole, to which mutually different potentials are applied, and which extend in parallel along the front and rear surfaces. Of the electrodes, a first electrode (first detection electrode) located on the front surface side of one of the internal surfaces and a second electrode (second detection electrode) located on the rear surface side of the other internal surface are short-circuited by a first wire disposed on one of end side surfaces connecting the two internal surfaces.

公开(公告)号：US20150270825A1

公开(公告)日：2015-09-24

申请号：US14644770

申请日：2015-03-11

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumio ICHIKAWA

IPC: H03H9/19 ,  G01C19/5705

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  H03H9/0547 ,  H03H9/1014 ,  H03H9/21

Abstract: In order to provide a resonator element having high production efficiency and low impedance in a small size, the resonator element includes a base portion, and a driving arm which extends from the base portion and includes a through hole, in which the driving arm vibrates along an in-plane direction, and includes a plurality of broad portions of which a width in the in-plane direction is broad and a plurality of narrow portions of which a width in the in-plane direction is narrow which alternate with each other, and the through hole is disposed in the broad portion.

Abstract translation: 为了提供具有高生产效率和小尺寸的低阻抗的谐振元件，谐振器元件包括基部和从基部延伸并包括通孔的驱动臂，驱动臂沿着该通孔振动 在面内方向上，并且包括多个宽边部分，其中在面内方向上的宽度是宽的，并且其中在面内方向上的宽度彼此交替的多个窄部分，以及 通孔设置在宽的部分。

公开(公告)号：US20170234725A1

公开(公告)日：2017-08-17

申请号：US15426614

申请日：2017-02-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumio ICHIKAWA

IPC: G01H11/00 ,  G01C19/5642

CPC classification number: G01H11/00 ,  G01C19/5621 ,  G01C19/5642 ,  G01C19/5656 ,  G01H1/00

Abstract: A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

公开(公告)号：US20150222245A1

公开(公告)日：2015-08-06

申请号：US14612699

申请日：2015-02-03

Applicant: Seiko Epson Corporation

Inventor： Fumio ICHIKAWA

IPC: H03H9/215 ,  H03H3/007

CPC classification number: H03H9/215 ,  H03H3/02

Abstract: A method for manufacturing a vibrating element includes: providing, on a substrate, a first protective layer and a second protective layer; disposing the substrate in an apparatus including an energy-beam emitting unit for dry etching; and etching, using an energy beam emitted from the energy-beam emitting unit, the substrate on which the first protective layer and the second protective layer are disposed on one side relative to an intersection point at which a center of the energy-beam emitting unit and the substrate intersect each other in a plan view of the substrate. When a distance between the intersection point and the first protective layer is shorter than a distance between the intersection point and the second protective layer, a width of the first protective layer in a direction intersecting the extending direction of the vibrating arm is made narrower than a width of the second protective layer.

Abstract translation: 一种制造振动元件的方法包括：在基板上设置第一保护层和第二保护层; 将基板设置在包括用于干蚀刻的能量束发射单元的装置中; 以及使用从所述能量束发射单元发射的能量束来蚀刻其上所述第一保护层和所述第二保护层相对于所述能量束发射单元的中心的交点设置在所述基板上的基板， 并且基板在基板的平面图中彼此相交。 当交点和第一保护层之间的距离短于交点和第二保护层之间的距离时，使第一保护层在与振动臂的延伸方向相交的方向上的宽度比 第二保护层的宽度。

公开(公告)号：US20150180448A1

公开(公告)日：2015-06-25

申请号：US14574636

申请日：2014-12-18

Applicant: Seiko Epson Corporation

Inventor： Fumio ICHIKAWA

IPC: H03H9/21

CPC classification number: H03H9/21 ,  H03H9/1014

Abstract: A resonator element inhibiting an unwanted vibration such as a torsional vibration from occurring and having a high Q-value, an electronic device, an electronic apparatus, and a moving object each equipped with the resonator element are provided. The resonator element is provided with a base section, a vibrating arm extending from the base section, and a groove section having a groove with a bottom formed from a first principal surface of the vibrating arm toward a second principal surface on an opposite side to the first principal surface, and is further provided with a mass section disposed on at least a part of the second principal surface.

Abstract translation: 提供了抑制诸如扭转振动发生和具有高Q值的不希望的振动的谐振器元件，电子设备，电子设备和移动物体，每个配备有谐振器元件。 谐振器元件设置有基部，从基部延伸的振动臂，以及槽部，该槽部具有从振动臂的第一主面朝向与第二主面相反侧的第二主面形成的底部的槽 第一主表面，并且还设置有设置在第二主表面的至少一部分上的质量部分。