公开(公告)号：US11591167B2

公开(公告)日：2023-02-28

申请号：US16396120

申请日：2019-04-26

申请人： SEMES CO., LTD.

发明人： Seung Keun Jun ,  Jun Sang Ahn ,  Sang Min Lee ,  Eun Sang Yoon

IPC分类号： H01L21/67 ,  B65G47/90 ,  H01L21/677 ,  B65G39/071

摘要： A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

公开(公告)号：US20230207363A1

公开(公告)日：2023-06-29

申请号：US18080743

申请日：2022-12-14

申请人： SEMES CO., LTD.

发明人： Eun Sang Yoon ,  Seung Keun Jun ,  Hyi Jae Kang

IPC分类号： H01L21/677

CPC分类号： H01L21/67727

摘要： An inter-floor transport apparatus and a logistics transport system including the inter-floor transport apparatus are provided. The logistics transport system includes: a stage module installed in space where semiconductor devices are fabricated, the stage module including a plurality of stages, which are installed on different floors; a frame module installed to have a direction intersecting the plurality of stages as a length direction; and an inter-floor transport apparatus moving along the frame module and transporting conveyed articles to each of the stages, wherein the inter-floor transport apparatus includes a first load unit, which transports the conveyed articles, a second load unit, which is disposed below the first load unit and transports the conveyed articles, a driving unit, which moves the first and second load units, and a control unit, which controls an operation of the driving unit, and transports a plurality of conveyed articles at the same time.