公开(公告)号：US20170103871A1

公开(公告)日：2017-04-13

申请号：US15291193

申请日：2016-10-12

Applicant: SEMES CO., LTD.

Inventor： Jong Hwan AN ,  Shin-Woo NAM ,  Hong Won LEE ,  Jae Bak SHIM

IPC: H01J37/32 ,  G01R29/02 ,  H03H7/24 ,  G01R23/10 ,  H02M7/04 ,  H03H7/38

CPC classification number: H01J37/32146 ,  G01R21/12 ,  G01R23/04 ,  G01R23/10 ,  G01R29/02 ,  H01J37/32174 ,  H01J37/32935 ,  H01J2237/334 ,  H02M7/04 ,  H03H7/24 ,  H03H7/38

Abstract: Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

公开(公告)号：US20210050184A1

公开(公告)日：2021-02-18

申请号：US17089041

申请日：2020-11-04

Applicant: SEMES CO., LTD.

Inventor： Jong Hwan AN ,  Shin-Woo NAM ,  Hong Won LEE ,  Jae Bak SHIM

IPC: H01J37/32 ,  G01R23/04 ,  G01R23/10 ,  G01R29/02 ,  H02M7/04 ,  H03H7/24 ,  H03H7/38

Abstract: Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.