公开(公告)号：US20240203774A1

公开(公告)日：2024-06-20

申请号：US18536845

申请日：2023-12-12

Applicant: SEMES CO., LTD.

Inventor： Kyo Bong KIM ,  Ki Won HAN ,  Sang-Oh KIM ,  Hee Jae BYUN ,  Hee Chan KIM ,  Sang Hyeop LEE

IPC: H01L21/677 ,  B25J11/00 ,  B25J15/00 ,  H01L21/687

CPC classification number: H01L21/67742 ,  B25J11/0095 ,  B25J15/0014 ,  H01L21/68707

Abstract: The inventive concept provides a substrate transfer apparatus. The substrate transfer apparatus includes a base; a first transfer arm configured to have a first arm link connected to the base and a first end effector connected to the first arm link, and which operates between a contract position and an expand position; and a guide member aligning a substrate placed on the first end effector while the first transfer arm backwardly moves from the expand position to the contract position.

公开(公告)号：US20230076551A1

公开(公告)日：2023-03-09

申请号：US17886823

申请日：2022-08-12

Applicant: SEMES CO., LTD.

Inventor： Na Hyun LEE ,  Sang-Oh KIM ,  Myung Jin LEE ,  Hee Jae BYUN

IPC: B65G47/90

Abstract: Provided is a tower lift, including: a body; a first carriage module and a second carriage module configured to be movable in a vertical direction along the body and each support objects to be transferred; a driving unit comprising a driving belt which vertically moves the first carriage module and the second carriage module and on which the first carriage module or the second carriage module is mounted; and a gap adjusting unit adjusting a gap between the first carriage module and the second carriage module.

公开(公告)号：US20230286778A1

公开(公告)日：2023-09-14

申请号：US17692539

申请日：2022-03-11

Applicant: SEMES CO., LTD.

Inventor： Myung Jin LEE ,  Sang-Oh KIM ,  Hee Jae BYUN ,  Na Hyun LEE

IPC: B66B5/18 ,  B66B5/22 ,  H01L21/687

CPC classification number: B66B5/18 ,  B66B5/22 ,  H01L21/68764

Abstract: The present invention provides a tower lift. The tower lift includes: a rail module extended in a vertical direction; and a carriage module provided to be movable by a magnetic levitation method along the rail module, in which in the carriage module, a braking unit which brakes falling of the carriage module when power driving the tower lift is cut is installed.