公开(公告)号：US11845113B2

公开(公告)日：2023-12-19

申请号：US17403063

申请日：2021-08-16

Applicant: SEMES Co., Ltd.

Inventor： Ye Jin Choi ,  Byung Sun Bang ,  Tae Ho Kang ,  Jong Won Moon

IPC: H01L21/67 ,  B08B3/10 ,  B08B3/04 ,  B08B3/08 ,  B08B3/02

CPC classification number: B08B3/10 ,  B08B3/022 ,  B08B3/041 ,  B08B3/08 ,  H01L21/67051

Abstract: A substrate treating liquid recovery unit with improved cleaning efficiency and a substrate treating apparatus including the same are provided. The substrate treating apparatus includes a substrate support unit; and a substrate treating liquid recovery unit surrounding the substrate support unit, for recovering a substrate treating liquid, and including a first recovery container, wherein the first recovery container comprises a first base for discharging the substrate treating liquid to an outside through a first recovery line, and including a third portion disposed on one side of the substrate support unit and a fourth portion disposed on the other side of the substrate support unit; a first sidewall extending upwardly from one end of the first base; a first upper plate extending obliquely and upwardly from an end of the first sidewall; and a first inner wall extending upwardly from the other end of the first base.

公开(公告)号：US20240050990A1

公开(公告)日：2024-02-15

申请号：US18169630

申请日：2023-02-15

Applicant: SEMES CO., LTD.

Inventor： Do Hyung Kim ,  Dae Hun Kim ,  Young Jin Kim ,  Tae Ho Kang ,  Jun Gwon Lee ,  Young Joon Han ,  Eun Hyeok Choi

IPC: B08B1/00 ,  H01L21/67 ,  B08B3/02 ,  A46B9/00 ,  A46B9/02 ,  A46D1/00

CPC classification number: B08B1/002 ,  H01L21/67046 ,  B08B3/02 ,  A46B9/005 ,  A46B9/02 ,  A46D1/0207 ,  A46B2200/3073

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space; a support unit configured to support a substrate in the treating space; and a brush unit configured to clean the substrate supported on the support unit, and wherein the brush unit includes: a body having a circular-shaped cross-section; and a plurality of contact pads protruding from the body and defining a plurality of groove portions for discharging foreign substances dropped from a substrate, each groove portion defined between adjacent contact pads, and wherein a width of the groove portion near a center of the body is different from a width of the groove portion near an edge of the body.

公开(公告)号：US20220168784A1

公开(公告)日：2022-06-02

申请号：US17403063

申请日：2021-08-16

Applicant: SEMES Co., Ltd.

Inventor： Ye Jin Choi ,  Byung Sun Bang ,  Tae Ho Kang ,  Jong Won Moon

IPC: B08B3/10 ,  B08B3/02 ,  B08B3/08 ,  B08B3/04

Abstract: A substrate treating liquid recovery unit with improved cleaning efficiency and a substrate treating apparatus including the same are provided. The substrate treating apparatus includes a substrate support unit; and a substrate treating liquid recovery unit surrounding the substrate support unit, for recovering a substrate treating liquid, and including a first recovery container, wherein the first recovery container comprises a first base for discharging the substrate treating liquid to an outside through a first recovery line, and including a third portion disposed on one side of the substrate support unit and a fourth portion disposed on the other side of the substrate support unit; a first sidewall extending upwardly from one end of the first base; a first upper plate extending obliquely and upwardly from an end of the first sidewall; and a first inner wall extending upwardly from the other end of the first base.