FAST SCR STRUCTURE FOR ESD PROTECTION
    1.
    发明申请
    FAST SCR STRUCTURE FOR ESD PROTECTION 审中-公开
    用于ESD保护的快速SCR结构

    公开(公告)号:US20170077082A1

    公开(公告)日:2017-03-16

    申请号:US15251910

    申请日:2016-08-30

    Abstract: An ultra-low capacitance ESD protection device with an ultra-fast response time and a low turn-on voltage, and a high holding current. The device may include: a heavily-doped p-type substrate; a lightly-doped n-type epitaxial layer with a heavily-doped n-type buried layer; and a semiconductor-controlled rectifier (SCR) structure within the epitaxial layer. The SCR structure includes, between a ground terminal and a pad terminal: a shallow P+ region within a moderately-doped n-type well to form an emitter-base junction of a trigger transistor; a shallow N+ region within a moderately-doped p-type well to form an emitter-base junction of a latching transistor, and a PN junction coupled to either of the shallow regions as a forward-biased series diode. To reduce capacitance, the n-type and p-type wells are separated by a lightly-doped portion of the epitaxial layer having a small lateral dimension for enhanced switching speed.

    Abstract translation: 超低电容ESD保护器件具有超快的响应时间和低导通电压以及高保持电流。 该器件可以包括:重掺杂p型衬底; 具有重掺杂n型掩埋层的轻掺杂n型外延层; 和外延层内的半导体可控整流器(SCR)结构。 SCR结构包括在接地端子和焊盘端子之间:在中等掺杂的n型阱内的浅P +区域,以形成触发晶体管的发射极 - 基极结; 在中等掺杂的p型阱内形成浅N +区,以形成锁存晶体管的发射极 - 基极结,以及耦合到任何一个浅区的PN结作为正向偏置串联二极管。 为了减小电容,n型和p型阱由具有小横向尺寸的外延层的轻掺杂部分分开,以提高开关速度。

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