公开(公告)号：US3650700A

公开(公告)日：1972-03-21

申请号：US3650700D

申请日：1969-01-14

Applicant: SIEMENS AG

Inventor： EMEIS REIMER ,  HAUS JOACHIM ,  KELLER WOLFGANG

IPC: C30B13/32 ,  B01J17/10 ,  E06B7/16

CPC classification number: C30B13/32 ,  Y10S117/90 ,  Y10T117/1088

Abstract: Device for crucible-free zone melting a crystalline rod substantially vertically supported at the ends thereof in a zone melting chamber includes heating means extending into the chamber through a substantially vertical slot formed in a side wall of the chamber. Slide means located adjacent the side wall carries the heating means and is slidable therewith relative to the rod axis. Elastically deformable sealing means are mounted between the sliding surface of the slide means and the side wall and completely surround the slot so as to seal it gas-tightly. The slide means, at least at the sliding surface thereof, are formed of a material of good slidability, the sealing means are formed of a material effecting a dry seal with the sliding surfaces, the paired materials having a frictional coefficient of at most 0.2.

Abstract translation: 用于无坩埚区熔化在区域熔化室中基本上垂直支撑在其端部的结晶棒的装置包括通过形成在室的侧壁中的基本垂直的槽延伸到室中的加热装置。 位于侧壁附近的滑动装置承载加热装置并且可以相对于杆轴线滑动。 弹性变形的密封装置安装在滑动装置的滑动表面和侧壁之间，并且完全围绕狭槽，以便气密地密封。 滑动装置至少在其滑动表面上由滑动性好的材料形成，密封装置由与滑动表面进行干密封的材料形成，成对材料具有至多0.2的摩擦系数。

公开(公告)号：US3499095A

公开(公告)日：1970-03-03

申请号：US72986268

申请日：1968-04-11

Applicant: SIEMENS AG

Inventor： HAUS JOACHIM

IPC: H01L23/051 ,  H01L23/40 ,  H05K5/02

CPC classification number: H01L23/051 ,  H01L23/4006 ,  H01L24/01 ,  H01L2023/4025 ,  H01L2924/01079 ,  H01L2924/1301 ,  H01L2924/351 ,  H01L2924/00