摘要:
An electromagnetic particle beam device, such as an electron microscope, includes a fluorescent screen mounted in the focal plane of the beam for providing a direct image a television camera arranged behind a window in the flourescent screen separately picks up and enlarges the part of the image which falls in the area of the window to permit simultaneous viewing of an overall picture and an electronically enlarged section of the picture.
摘要:
An improved setting device for providing accurately reproducible, incrementally variable control voltages to the input of a control and regulating circuit for adjusting electromagnetic coil current in charged-particle beam apparatus such as electron microscopes. The setting device includes a digital counter, preferably a forward-backward counter, connected to the input of the control circuit through a digital-to-analog converter. A pulse source, preferably pushbutton-controlled, provides stepping pulses, either one-by-one, or in a series of pulses of variable repetition rate and/or preselectable number, for adjusting the output voltage of the setting device to achieve, for example, desired values of magnification or focus as indicated by a numeric display device connected to the output of the pulse source and/or the output of the digital counter.