公开(公告)号：US3835246A

公开(公告)日：1974-09-10

申请号：US32479873

申请日：1973-01-18

申请人： SIEMENS AG

发明人： MULLER K ,  WILLASCH D ,  DOLLMEIER G ,  RINDFLEISCH V ,  RAUCH M

IPC分类号： H01J37/22 ,  H01J37/26 ,  H04N5/30 ,  H04N7/18

CPC分类号： H01J37/224

摘要： An electromagnetic particle beam device, such as an electron microscope, includes a fluorescent screen mounted in the focal plane of the beam for providing a direct image a television camera arranged behind a window in the flourescent screen separately picks up and enlarges the part of the image which falls in the area of the window to permit simultaneous viewing of an overall picture and an electronically enlarged section of the picture.

摘要翻译： 诸如电子显微镜的电磁粒子束装置包括安装在光束的焦平面中的荧光屏，用于提供布置在荧光屏中的窗后面的电视摄像机的直接图像，分别拾取并放大图像的一部分 其落在窗口的区域中，以允许同时观看整体图像和图片的电子放大部分。

公开(公告)号：US3823322A

公开(公告)日：1974-07-09

申请号：US31087772

申请日：1972-11-30

申请人： SIEMENS AG

发明人： WILLASCH D ,  SCHIEWE B ,  RINDFLEISCH V

IPC分类号： G03B17/48 ,  H01J37/22 ,  H01J37/26 ,  G01N23/00

CPC分类号： H01J37/224 ,  G03B17/48

摘要： Improved photographic film handling apparatus for use whth charged-particle beam equipment, such as electron microscopes, permits either photographic recording or direct viewing on a picture screen without removing the film handling apparatus from the beam path. The apparatus includes film supply means, a transport mechanism mounted in the beam path, and exposed film storage means. The photographic film, or other picture recording medium, is arranged in consecutive picture areas, each separated by a space sufficient to permit at least part of the chargedparticle beam to pass through a matching opening in the transport mechanism for reception by a direct view fluorescent viewing screen or by a television camera for multi-station remote viewing. The recording medium can be either in conventional roll film form, with openings cut in the film between consecutive picture areas, or in plate form, with the plates mounted on a link-type carrier having joints in the regions between the recording plates.

公开(公告)号：US3757120A

公开(公告)日：1973-09-04

申请号：US3757120D

申请日：1972-09-15

申请人： SIEMENS AG

发明人： MULLER K ,  RINDFLEISCH V

IPC分类号： H01J37/141 ,  G05B19/07 ,  G21K1/093 ,  H01J37/24 ,  H01J37/26

CPC分类号： G05B19/075 ,  G21K1/093 ,  H01J37/24

摘要： An improved setting device for providing accurately reproducible, incrementally variable control voltages to the input of a control and regulating circuit for adjusting electromagnetic coil current in charged-particle beam apparatus such as electron microscopes. The setting device includes a digital counter, preferably a forward-backward counter, connected to the input of the control circuit through a digital-to-analog converter. A pulse source, preferably pushbutton-controlled, provides stepping pulses, either one-by-one, or in a series of pulses of variable repetition rate and/or preselectable number, for adjusting the output voltage of the setting device to achieve, for example, desired values of magnification or focus as indicated by a numeric display device connected to the output of the pulse source and/or the output of the digital counter.