SEMICONDUCTOR DEVICE INCLUDING BARRIER DIELECTRIC LAYER INCLUDING FERROELECTRIC MATERIAL

    公开(公告)号:US20240081082A1

    公开(公告)日:2024-03-07

    申请号:US18097493

    申请日:2023-01-17

    Applicant: SK hynix Inc.

    CPC classification number: H10B53/30

    Abstract: A semiconductor device according to an embodiment includes a first electrode and a second electrode that are spaced apart from each other, a capacitor dielectric structure disposed between the first electrode and the second electrode, and a barrier dielectric layer disposed between one of the first and second electrodes and the capacitor dielectric structure. The capacitor dielectric structure may include a ferroelectric layer and a dielectric layer. The barrier dielectric layer may include a ferroelectric material.

    ELECTRONIC DEVICE HAVING RESISTANCE CHANGE PROPERTY

    公开(公告)号:US20230309427A1

    公开(公告)日:2023-09-28

    申请号:US17890899

    申请日:2022-08-18

    Applicant: SK hynix Inc.

    Inventor: Won Tae KOO

    CPC classification number: H01L45/1233 H01L45/1206 H01L45/149

    Abstract: An electronic device according to an embodiment of the present disclosure includes a substrate, a base electrode layer disposed over the substrate, first and second operating electrode layers disposed over the base electrode layer to be spaced apart from each other, a channel layer disposed between the first operating electrode layer and the second operating electrode layer over the base electrode layer, a proton conductive layer disposed over the first and second electrode layers and the channel layer, a hydrogen source layer disposed over the proton conductive layer, and a control electrode layer disposed over the hydrogen source layer.

    METHOD OF TREATING TARGET FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

    公开(公告)号:US20230005742A1

    公开(公告)日:2023-01-05

    申请号:US17546617

    申请日:2021-12-09

    Applicant: SK hynix Inc.

    Inventor: Won Tae KOO Mir IM

    Abstract: In a method of treating a target film, a plurality of pattern structures with sidewall surfaces facing each other are provided. A target film is formed on the sidewalls of the plurality of pattern structures. A plurality of nanoparticles are distributed on the target thin film. The target thin film is thermally treated by irradiating laser light from upper sides of the plurality of pattern structures to the target thin film. The irradiated laser light is scattered from the plurality of nanoparticles.

    ELECTRONIC DEVICE INCLUDING CHANNEL LAYER INCLUDING VARIABLE RESISTANCE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20230082400A1

    公开(公告)日:2023-03-16

    申请号:US17674833

    申请日:2022-02-17

    Applicant: SK hynix Inc.

    Abstract: An electronic device includes a base element, a source electrode layer and a drain electrode layer disposed to be spaced apart from each other on the base element, a channel layer disposed between the source electrode layer and the drain electrode layer on the base element that accommodates metal ions, a metal ion conduction layer disposed on the channel layer, and a gate electrode layer disposed on the metal ion conduction layer. The channel layer includes a plurality of unit films and channel spaces between the plurality of unit films. The plurality of unit films are arranged to be parallel to a direction substantially perpendicular to a surface of the base element.

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