公开(公告)号：US10884343B2

公开(公告)日：2021-01-05

申请号：US15500414

申请日：2014-10-22

Applicant: South University of Science and Technology of China

Inventor： Xing Cheng ,  Dehu Cui ,  Ziping Li ,  Jing Ming

IPC: G03F7/20 ,  G03F7/00

Abstract: Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.

公开(公告)号：US20170176853A1

公开(公告)日：2017-06-22

申请号：US15117046

申请日：2014-03-05

Applicant: SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Xing Cheng ,  Dehu Cui ,  Ziping Li ,  Jing Ming ,  Zhong Zhang

IPC: G03F7/00 ,  B29C59/00 ,  B29C59/02

CPC classification number: G03F7/0002 ,  B29C59/002 ,  B29C59/022 ,  B29C59/026 ,  B29K2701/12 ,  B29L2031/34

Abstract: A nano-imprinting template, a system, and an imprinting method are provided. The nano-imprinting template (10) comprises: a first baseplate (100) transparent to ultraviolet light; an imprinting pattern structure (105) formed on the first surface of the first baseplate (100); a heating element (110) formed on the second surface, opposite to the first surface, of the first baseplate (100), wherein the heating element (110) is transparent to ultraviolet light; and a first electrode pair (115) formed on the second surface and used for supplying a current applied by an external power supply to the heating element (110) so as to make the heating part (110) generate heat. The nano-imprinting template (10) and the system seamlessly integrate an ultraviolet curing nano-imprinting technology with a thermoplastic nano-imprinting technology, which have the advantages of small size of equipment, low cost, simple process and the like. When the template and the system are used to carry out thermoplastic nano-imprinting, a large area of micro-nano patterns can be copied. In addition, when the template and the system are used to carry out UV curing nano-imprinting, the purposes of improving the process throughput and reducing the pattern replication defects are achieved.

公开(公告)号：US20170212424A1

公开(公告)日：2017-07-27

申请号：US15500414

申请日：2014-10-22

Applicant: South University of Science and Technology of China

Inventor： Xing Cheng ,  Dehu Cui ,  Ziping Li ,  Jing Ming

IPC: G03F7/20

CPC classification number: G03F7/7055 ,  G03F7/0037 ,  G03F7/2053 ,  G03F7/70041 ,  G03F7/70416 ,  G03F7/70641

Abstract: Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.