公开(公告)号：US20200003613A1

公开(公告)日：2020-01-02

申请号：US16542505

申请日：2019-08-16

申请人： STC.UNM

发明人： Steven R.J. BRUECK ,  Alexander NEUMANN ,  Payman ZARKESH-HA

IPC分类号： G01J1/06 ,  G01J1/44 ,  G01J3/18 ,  G01J3/28 ,  G02B6/122 ,  G02B6/124 ,  H01L27/144 ,  H01L31/02 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/103 ,  G01J3/02

摘要： A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

公开(公告)号：US20170108375A1

公开(公告)日：2017-04-20

申请号：US15317592

申请日：2015-06-09

申请人： STC.UNM

发明人： Steven R.J. BRUECK ,  Alexander NEUMANN ,  Payman ZARKESH-HA

IPC分类号： G01J1/06 ,  G01J3/18 ,  G01J1/44 ,  H01L27/144 ,  G02B6/124 ,  H01L31/103 ,  H01L31/02 ,  H01L31/0216 ,  G02B6/122 ,  G02B6/12 ,  G01J3/28 ,  H01L31/0232

CPC分类号： G01J1/06 ,  G01J1/44 ,  G01J3/0218 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/1895 ,  G01J3/2803 ,  G01J2001/448 ,  G02B6/12004 ,  G02B6/122 ,  G02B6/124 ,  G02B2006/12061 ,  G02B2006/12107 ,  G02B2006/12138 ,  H01L27/1446 ,  H01L31/02019 ,  H01L31/02164 ,  H01L31/02327 ,  H01L31/103

摘要： A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

公开(公告)号：US20180024001A1

公开(公告)日：2018-01-25

申请号：US15706440

申请日：2017-09-15

申请人： STC.UNM

发明人： Steven R.J. BRUECK ,  Alexander NEUMANN ,  Payman ZARKESH-HA

IPC分类号： G01J1/06 ,  G01J3/18 ,  G01J1/44 ,  H01L27/144 ,  H01L31/0232 ,  H01L31/02 ,  H01L31/0216 ,  G02B6/122 ,  G02B6/12 ,  G02B6/124 ,  G01J3/28 ,  H01L31/103

CPC分类号： G01J1/06 ,  G01J1/44 ,  G01J3/0218 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/1895 ,  G01J3/2803 ,  G01J2001/448 ,  G02B6/12004 ,  G02B6/122 ,  G02B6/124 ,  G02B2006/12061 ,  G02B2006/12107 ,  G02B2006/12138 ,  H01L27/1446 ,  H01L31/02019 ,  H01L31/02164 ,  H01L31/02327 ,  H01L31/103

摘要： A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.