Microelectromechanical gyroscope with compensation of quadrature signal components

    公开(公告)号:US09784581B2

    公开(公告)日:2017-10-10

    申请号:US14151426

    申请日:2014-01-09

    CPC classification number: G01C19/5776 G01C19/5726

    Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

    MICROELECTROMECHANICAL GYROSCOPE WITH SELF-CALIBRATION FUNCTION AND METHOD OF CALIBRATING A MICROELECTROMECHANICAL GYROSCOPE
    4.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH SELF-CALIBRATION FUNCTION AND METHOD OF CALIBRATING A MICROELECTROMECHANICAL GYROSCOPE 有权
    具有自校准功能的微电子光学陀螺仪和微电子光学仪器的校准方法

    公开(公告)号:US20130031950A1

    公开(公告)日:2013-02-07

    申请号:US13648215

    申请日:2012-10-09

    CPC classification number: G01C19/5776

    Abstract: A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.

    Abstract translation: 一种具有支撑结构的微电子陀螺仪; 电容耦合到所述支撑结构并且响应于所述支撑结构围绕轴的旋转以第一自由度和第二自由度移动的质量; 驱动部件,用于根据第一自由度保持质量摆动; 用于检测表示所述质量块和所述支撑结构之间的电容耦合的转导信号的读取界面; 以及用于修改质量块和支撑结构之间的电容耦合的电容补偿模块。 校准组件检测来自转导信号的系统误差,并修改电容补偿模块作为转导信号的函数,以便衰减系统误差。

    Microelectromechanical gyroscope with compensation of quadrature signal components

    公开(公告)号:US10480944B2

    公开(公告)日:2019-11-19

    申请号:US15707707

    申请日:2017-09-18

    Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

    MICROELECTROMECHANICAL SENSOR WITH DIFFERENTIATED PERFORMANCES AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL SENSOR
    8.
    发明申请
    MICROELECTROMECHANICAL SENSOR WITH DIFFERENTIATED PERFORMANCES AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL SENSOR 有权
    具有差分性能的微电子传感器和控制微电子传感器的方法

    公开(公告)号:US20130033274A1

    公开(公告)日:2013-02-07

    申请号:US13648218

    申请日:2012-10-09

    CPC classification number: G01C19/5712 G01C19/5719

    Abstract: A microelectromechanical sensor includes a supporting structure and a sensing mass, which is elastically coupled to the supporting structure, is movable with respect thereto with one degree of freedom in response to movements according to an axis and is coupled to the supporting structure through a capacitive coupling. A sensing device senses, on terminals of the capacitive coupling, transduction signals indicative of displacements of the first sensing mass according to the degree of freedom. The sensing device includes at least one first reading chain, having first operative parameters, one second reading chain, having second operative parameters different from the first operative parameters, and one selective electrical connection structure that couples the first reading chain and the second reading chain to the first terminals.

    Abstract translation: 微机电传感器包括支撑结构和弹性耦合到支撑结构的感测块,其响应于根据轴线的运动而具有相对于其自由度移动并通过电容耦合耦合到支撑结构 。 感测装置在电容耦合的端子上感测到根据自由度指示第一感测质量的位移的转导信号。 感测装置包括至少一个第一读取链,其具有第一操作参数,一个第二读取链,具有与第一操作参数不同的第二操作参数,以及将第一阅读链和第二阅读链耦合到一个选择性电连接结构 第一个终端。

    Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
    9.
    发明授权
    Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device 有权
    具有振荡质量和强迫级的微机电装置以及控制微机电装置的方法

    公开(公告)号:US09448071B2

    公开(公告)日:2016-09-20

    申请号:US13799243

    申请日:2013-03-13

    CPC classification number: G01C19/5762 G01C19/5726

    Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

    Abstract translation: 微机电装置包括:主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器,被配置为检测所述可移动质量块的当前振荡频率; 以及强制级,其电容耦合到所述可移动质量块,并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE
    10.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE 审中-公开
    具有振荡质量和强度的微电子设备,以及控制微电子设备的方法

    公开(公告)号:US20160109237A1

    公开(公告)日:2016-04-21

    申请号:US14985071

    申请日:2015-12-30

    CPC classification number: G01C19/5762 G01C19/5726

    Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

    Abstract translation: 微机电装置包括:主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器,被配置为检测所述可移动质量块的当前振荡频率; 以及强制级,其电容耦合到所述可移动质量块,并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

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