摘要:
A pattern correction method executed by a computer includes a first correction and a second correction. The first correction is executed by calculating a correction value, in consideration for an optical proximity effect, for edges (first edges) meeting a condition among the edges constituting a designed pattern. Subsequently, The second correction is executed for an edge (second edge) which does not meet the condition, by use of the correction value of any one of the edges (first edges) adjacent to the second edge among the first edges for which the first correction is executed, thus connecting the corrected first edge and the corrected second edge by a line segment. The pattern is corrected to a shape suitable for a mask drawing and a check with simple processing.
摘要:
A mask data generating apparatus comprising: a division module configured to extract a line segment and dividing the extracted line segment into a suitable length; a correction value calculation module configured to calculate correction value calculating points from each divided edge; a first calculated center point calculation module configured to set first calculated center points and a shape of a pattern; a first rectangular region preparation module configured to prepare first simulation regions and a plurality of first rectangular regions which overlap with each other; a second calculated center point calculation module configured to acquire second rectangular regions, and calculating second calculated center points based on the second rectangular regions; a second simulation region preparation module configured to acquire second simulation regions; a process simulation execution module configured to calculate a correction value; and a correction pattern preparation module configured to prepare the correction pattern.
摘要:
A pattern correction method executed by a computer includes a first correction and a second correction. The first correction is executed by calculating a correction value, in consideration for an optical proximity effect, for edges (first edges) meeting a condition among the edges constituting a designed pattern. Subsequently, The second correction is executed for an edge (second edge) which does not meet the condition, by use of the correction value of any one of the edges (first edges) adjacent to the second edge among the first edges for which the first correction is executed, thus connecting the corrected first edge and the corrected second edge by a line segment. The pattern is corrected to a shape suitable for a mask drawing and a check with simple processing.
摘要:
An integrated circuit design method and an integrated circuit design apparatus, for increasing an efficiency of parallel processing of LSI design layout data while retaining a hierarchical structure by use of a computer capable of processing the data in parallel, take a first construction of making an internal cell composed of divided cells obtained by dividing a design cell specified by design cell data among pieces of integrated circuit design layout data on the basis of a cell division judging criterion, and of non-divided design cells other than the divided cells, then creating a plurality of unit groups of which data quantities are substantially equal to each other by combining the internal cells, and executing hierarchical parallel processing of the data contained in the internal cell per unit group, and take a second construction of restoring a non-overlapped array data region left by excluding a data region having overlapped data from an array data region containing array data among pieces of integrated circuit design layout data, with a combination of a plurality of or a single piece of array cell or unit cell.
摘要:
The present invention provides an effective oxygen generating materials, carbon dioxide absorbing materials, and transport system and transport method of live fishery products for use upon transporting live fishery products. An oxygen generating materials of the present invention is prepared by packaging solid peroxide and peroxide decomposition catalyst with a moisture-permeable material having a cup method moisture permeability (40° C., 90% RH) of more than 20 g/m2/24 hr and being impervious to water at normal pressure. Furthermore, a carbon dioxide absorbing materials are prepared by packaging alkaline earth metal hydroxide and/or oxide with a gas-permeable material having a Gurley method gas permeability (JIS P8117) of 0.1˜3000 sec./100 ml of gas and being impervious to water at normal pressure. Moreover, the transport system of live fishery products are a transport system wherein the oxygen generating materials and carbon dioxide absorbing materials pertaining to the present invention are sealed inside a transport bag.
摘要:
In a valve used in a nuclear power plant, a valve body from which a valve stem projects upwards is connected with a valve drive device for driving the valve stem by a hollow cylinder which is provided concentrically with the valve stem. On the hollow cylinder, strain gauges are attached to detect both torque and thrust, thereby detecting load exactly.
摘要:
A stabilized sodium percarbonate particle includes a sodium percarbonate particle having at least one coating layer thereon, wherein the at least one coating layer includes (a) a silicate; (b) magnesium sulfate; and (c) an alkali metal salt selected from the group consisting of alkali metal carbonates, alkali metal bicarbonates and alkali metal sulfate. The present sodium percarbonate particle is good in solubility and is excellent in its formulation stability with detergent.
摘要:
An information processing apparatus includes a versatile Operating System (OS) that performs a time measurement process in response to a request from an application, a storage unit that stores a process load of the versatile OS and a delay time of the time measurement process in combination, a detecting unit that detects a process load of the versatile OS when the application requests the time measurement process, an acquiring unit that acquires a delay time that corresponds to the process load, which is detected by the detecting unit, as an expected delay time from the storage unit, and a requesting unit that requests the versatile OS to measure a requested measurement time that is obtained by subtracting the expected delay time, which is acquired by the acquiring unit, from a measurement time that is requested by the application.