Pattern correction method of semiconductor device
    1.
    发明授权
    Pattern correction method of semiconductor device 失效
    半导体器件的图案校正方法

    公开(公告)号:US07065739B2

    公开(公告)日:2006-06-20

    申请号:US10331005

    申请日:2002-12-27

    IPC分类号: G06F17/50 G03F1/00

    CPC分类号: G03F1/36 G03F7/70441

    摘要: A pattern correction method executed by a computer includes a first correction and a second correction. The first correction is executed by calculating a correction value, in consideration for an optical proximity effect, for edges (first edges) meeting a condition among the edges constituting a designed pattern. Subsequently, The second correction is executed for an edge (second edge) which does not meet the condition, by use of the correction value of any one of the edges (first edges) adjacent to the second edge among the first edges for which the first correction is executed, thus connecting the corrected first edge and the corrected second edge by a line segment. The pattern is corrected to a shape suitable for a mask drawing and a check with simple processing.

    摘要翻译: 由计算机执行的图案校正方法包括第一校正和第二校正。 对于构成设计图案的边缘中满足条件的边缘(第一边缘),考虑光学邻近效应来计算校正值来执行第一校正。 随后,对于不符合条件的边缘(第二边缘),通过使用与第一边缘相邻的边缘(第一边缘)中的任何一个边缘(第一边缘)的第一边缘的第一边缘 执行校正,从而将校正的第一边缘和校正的第二边缘连接到线段。 该图案被校正为适于掩模绘图和具有简单处理的检查的形状。

    Mask data generating apparatus, a computer implemented method for generating mask data and a computer program for controlling the mask data generating apparatus
    2.
    发明授权
    Mask data generating apparatus, a computer implemented method for generating mask data and a computer program for controlling the mask data generating apparatus 失效
    掩模数据产生装置,用于产生掩模数据的计算机实现方法和用于控制掩模数据产生装置的计算机程序

    公开(公告)号:US06907596B2

    公开(公告)日:2005-06-14

    申请号:US10385624

    申请日:2003-03-12

    CPC分类号: G03F1/36

    摘要: A mask data generating apparatus comprising: a division module configured to extract a line segment and dividing the extracted line segment into a suitable length; a correction value calculation module configured to calculate correction value calculating points from each divided edge; a first calculated center point calculation module configured to set first calculated center points and a shape of a pattern; a first rectangular region preparation module configured to prepare first simulation regions and a plurality of first rectangular regions which overlap with each other; a second calculated center point calculation module configured to acquire second rectangular regions, and calculating second calculated center points based on the second rectangular regions; a second simulation region preparation module configured to acquire second simulation regions; a process simulation execution module configured to calculate a correction value; and a correction pattern preparation module configured to prepare the correction pattern.

    摘要翻译: 一种掩模数据生成装置,包括:分割模块,被配置为提取线段并将所提取的线段划分成合适的长度; 校正值计算模块,被配置为从每个分割边缘计算校正值计算点; 第一计算中心点计算模块,被配置为设置第一计算的中心点和图案的形状; 第一矩形区域准备模块,被配置为准备第一模拟区域和彼此重叠的多个第一矩形区域; 第二计算中心点计算模块,被配置为获取第二矩形区域,并且基于所述第二矩形区域计算第二计算的中心点; 配置成获取第二模拟区域的第二模拟区域准备模块; 被配置为计算校正值的过程模拟执行模块; 以及配置为准备校正图案的校正图案准备模块。

    Manufacturing method of semiconductor device
    3.
    发明授权
    Manufacturing method of semiconductor device 失效
    半导体器件的制造方法

    公开(公告)号:US07509623B2

    公开(公告)日:2009-03-24

    申请号:US11381262

    申请日:2006-05-02

    IPC分类号: G06F17/50 G03F1/00 G03F7/00

    CPC分类号: G03F1/36 G03F7/70441

    摘要: A pattern correction method executed by a computer includes a first correction and a second correction. The first correction is executed by calculating a correction value, in consideration for an optical proximity effect, for edges (first edges) meeting a condition among the edges constituting a designed pattern. Subsequently, The second correction is executed for an edge (second edge) which does not meet the condition, by use of the correction value of any one of the edges (first edges) adjacent to the second edge among the first edges for which the first correction is executed, thus connecting the corrected first edge and the corrected second edge by a line segment. The pattern is corrected to a shape suitable for a mask drawing and a check with simple processing.

    摘要翻译: 由计算机执行的图案校正方法包括第一校正和第二校正。 对于构成设计图案的边缘中满足条件的边缘(第一边缘),考虑光学邻近效应来计算校正值来执行第一校正。 随后,对于不符合条件的边缘(第二边缘),通过使用与第一边缘相邻的边缘(第一边缘)中的任何一个边缘(第一边缘)的第一边缘的第一边缘 执行校正,从而将校正的第一边缘和校正的第二边缘连接到线段。 该图案被校正为适于掩模绘图和具有简单处理的检查的形状。

    Method of designing integrated circuit and apparatus for designing integrated circuit

    公开(公告)号:US06993728B2

    公开(公告)日:2006-01-31

    申请号:US10323735

    申请日:2002-12-20

    申请人: Susumu Watanabe

    发明人: Susumu Watanabe

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5068

    摘要: An integrated circuit design method and an integrated circuit design apparatus, for increasing an efficiency of parallel processing of LSI design layout data while retaining a hierarchical structure by use of a computer capable of processing the data in parallel, take a first construction of making an internal cell composed of divided cells obtained by dividing a design cell specified by design cell data among pieces of integrated circuit design layout data on the basis of a cell division judging criterion, and of non-divided design cells other than the divided cells, then creating a plurality of unit groups of which data quantities are substantially equal to each other by combining the internal cells, and executing hierarchical parallel processing of the data contained in the internal cell per unit group, and take a second construction of restoring a non-overlapped array data region left by excluding a data region having overlapped data from an array data region containing array data among pieces of integrated circuit design layout data, with a combination of a plurality of or a single piece of array cell or unit cell.

    Load detectable valve
    7.
    发明授权
    Load detectable valve 失效
    负载检测阀

    公开(公告)号:US5743133A

    公开(公告)日:1998-04-28

    申请号:US542938

    申请日:1995-10-13

    申请人: Susumu Watanabe

    发明人: Susumu Watanabe

    CPC分类号: F16K31/04 F16K37/0083

    摘要: In a valve used in a nuclear power plant, a valve body from which a valve stem projects upwards is connected with a valve drive device for driving the valve stem by a hollow cylinder which is provided concentrically with the valve stem. On the hollow cylinder, strain gauges are attached to detect both torque and thrust, thereby detecting load exactly.

    摘要翻译: 在用于核电厂的阀门中,阀杆向上突出的阀体与阀驱动装置连接,该阀驱动装置通过与阀杆同心设置的中空圆筒驱动阀杆。 在中空圆柱体上,连接有应变片以检测扭矩和推力,从而精确检测载荷。

    Stabilized particle of sodium percarbonate
    8.
    发明授权
    Stabilized particle of sodium percarbonate 失效
    过碳酸钠稳定颗粒

    公开(公告)号:US5462804A

    公开(公告)日:1995-10-31

    申请号:US239390

    申请日:1994-05-06

    摘要: A stabilized sodium percarbonate particle includes a sodium percarbonate particle having at least one coating layer thereon, wherein the at least one coating layer includes (a) a silicate; (b) magnesium sulfate; and (c) an alkali metal salt selected from the group consisting of alkali metal carbonates, alkali metal bicarbonates and alkali metal sulfate. The present sodium percarbonate particle is good in solubility and is excellent in its formulation stability with detergent.

    摘要翻译: 稳定的过碳酸钠颗粒包括其上具有至少一个涂层的过碳酸钠颗粒,其中所述至少一个涂层包括(a)硅酸盐; (b)硫酸镁; 和(c)选自碱金属碳酸盐,碱金属碳酸氢盐和碱金属硫酸盐的碱金属盐。 本发明的过碳酸钠颗粒的溶解性良好,其配方与洗涤剂的稳定性优异。

    Information processing apparatus and time measurement method
    10.
    发明授权
    Information processing apparatus and time measurement method 有权
    信息处理装置和时间测量方法

    公开(公告)号:US08825441B2

    公开(公告)日:2014-09-02

    申请号:US12548145

    申请日:2009-08-26

    申请人: Susumu Watanabe

    发明人: Susumu Watanabe

    摘要: An information processing apparatus includes a versatile Operating System (OS) that performs a time measurement process in response to a request from an application, a storage unit that stores a process load of the versatile OS and a delay time of the time measurement process in combination, a detecting unit that detects a process load of the versatile OS when the application requests the time measurement process, an acquiring unit that acquires a delay time that corresponds to the process load, which is detected by the detecting unit, as an expected delay time from the storage unit, and a requesting unit that requests the versatile OS to measure a requested measurement time that is obtained by subtracting the expected delay time, which is acquired by the acquiring unit, from a measurement time that is requested by the application.

    摘要翻译: 信息处理装置包括响应于来自应用的请求执行时间测量处理的通用操作系统(OS),存储多功能操作系统的处理负载的存储单元和组合的时间测量处理的延迟时间 检测单元,当所述应用请求所述时间测量处理时,检测所述多功能操作系统的处理负荷;获取单元,其获取与所述检测单元检测到的对应于所述处理负载的延迟时间作为预期延迟时间 以及请求单元,其请求通用OS测量通过从获取单元获取的预期延迟时间从应用请求的测量时间中获得的所请求的测量时间。