公开(公告)号：US20120017940A1

公开(公告)日：2012-01-26

申请号：US13178792

申请日：2011-07-08

Applicant: Sadayuki MATSUMIYA ,  Nobuyuki HAMA

Inventor： Sadayuki MATSUMIYA ,  Nobuyuki HAMA

IPC: B08B7/04

CPC classification number: G01B5/28 ,  B08B1/00 ,  B08B3/12 ,  B08B5/04

Abstract: A method for cleaning a skid of a surface roughness tester including the skid provided with a skid aperture in a vertical direction, and a stylus disposed in the skid aperture of the skid and capable of moving in the vertical direction, wherein the surface roughness tester measures surface roughness of an object by moving the skid along a surface of the object. The method includes removing a foreign substance existing in a gap between the skid aperture and the stylus after measuring the surface roughness of the object.

Abstract translation: 一种用于清洁表面粗糙度测试仪的滑块的方法，该表面粗糙度测试仪包括在垂直方向上设置有滑动孔的滑板，以及设置在滑板的滑动孔中并能够在垂直方向上移动的触针，其中表面粗糙度测量仪测量 通过沿着物体的表面移动滑板，物体的表面粗糙度。 该方法包括在测量物体的表面粗糙度之后去除存在于防滑孔和触针之间的间隙中的异物。

公开(公告)号：US20110083497A1

公开(公告)日：2011-04-14

申请号：US12900867

申请日：2010-10-08

Applicant: Sadayuki MATSUMIYA ,  Yoshiyuki OMORI ,  Sadaharu ARITA ,  Kotaro HIRANO ,  Yasushi FUKUMOTO ,  Koichi KOMATSU ,  Fumihiro TAKEMURA

Inventor： Sadayuki MATSUMIYA ,  Yoshiyuki OMORI ,  Sadaharu ARITA ,  Kotaro HIRANO ,  Yasushi FUKUMOTO ,  Koichi KOMATSU ,  Fumihiro TAKEMURA

IPC: G01B5/28

CPC classification number: G01B11/005 ,  G01B5/008 ,  G01B11/245 ,  G01B21/047

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract translation: 表面纹理测量机包括：台，具有触针的触点型检测器，图像探针，相对移动机构和控制器。 控制器包括：中心位置计算单元，当图像探测器进入圆形凹部或物体的圆形凸部的圆形轮廓上的至少三个点的位置数据时，将输入的位置数据近似为圆形 获得圆的中心位置; 以及触笔设置单元，其在计算中心位置之后，操作相对移动机构以将接触型检测器的触针定位在中心位置。

公开(公告)号：US20120099115A1

公开(公告)日：2012-04-26

申请号：US13279855

申请日：2011-10-24

Applicant: Sadayuki MATSUMIYA ,  Tatsuya NAGAHAMA ,  Atsushi USAMI

Inventor： Sadayuki MATSUMIYA ,  Tatsuya NAGAHAMA ,  Atsushi USAMI

IPC: G01B9/02 ,  G02B27/14

CPC classification number: G01B11/2441 ,  G01B5/0014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/0209

Abstract: Disclosed is an interference objective lens unit, comprising: an objective lens; a beam splitter that splits the light transmitted through the objective lens into a reference optical path in which a reference mirror is provided and a measuring optical path in which the measuring object is placed, and that superposes the split lights to output interference light; a first holder that holds the objective lens and that is formed by material having a first linear expansion coefficient; and a second holder that holds the reference mirror and that is formed by material having a second linear expansion coefficient different from the first linear expansion coefficient, wherein when a usage environment temperature changes, a difference in the linear expansion coefficients between the first holder and the second holder corrects an optical path difference between the reference optical path and the measuring optical path.

Abstract translation: 公开了一种干涉物镜单元，包括：物镜; 分束器，其将透过物镜的光分成其中设置参考反射镜的参考光路和放置测量对象的测量光路，并将分光灯叠加以输出干涉光; 保持物镜并由具有第一线性膨胀系数的材料形成的第一保持器; 以及第二保持器，其保持所述参考镜并且由具有不同于所述第一线性膨胀系数的第二线性膨胀系数的材料形成，其中当使用环境温度改变时，所述第一保持器和所述第二保持器之间的线膨胀系数的差异 第二支架校正参考光路和测量光路之间的光程差。