Out-of plane-accelerometer
    2.
    发明授权

    公开(公告)号:US10598689B2

    公开(公告)日:2020-03-24

    申请号:US15837007

    申请日:2017-12-11

    Abstract: Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.

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