Thin film deposition source, deposition apparatus and deposition method using the same
    1.
    发明授权
    Thin film deposition source, deposition apparatus and deposition method using the same 有权
    薄膜沉积源,沉积装置和使用其的沉积方法

    公开(公告)号:US09309588B2

    公开(公告)日:2016-04-12

    申请号:US14037244

    申请日:2013-09-25

    Inventor: Jong Woo Lee

    CPC classification number: C23C14/044 C23C14/547

    Abstract: A thin film deposition source, a deposition apparatus and a deposition method using the same are disclosed. The deposition apparatus includes a deposition source including a plurality of jet nozzles that spray a deposition substance on a surface of a substrate and are arranged in a first direction, and at least one shutter controlling a jet region of the deposition substance by opening or shielding at least a portion of a jetting passageway of the deposition substance.

    Abstract translation: 公开了薄膜沉积源,沉积设备和使用其的沉积方法。 沉积装置包括沉积源,该沉积源包括多个喷射喷嘴,喷射喷嘴在基板的表面上喷涂沉积物质并沿第一方向布置;以及至少一个闸板,其通过打开或屏蔽沉积物质的喷射区域 至少一部分沉积物质的喷射通道。

    THIN FILM DEPOSITION APPARATUS AND METHOD
    2.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD 审中-公开
    薄膜沉积装置和方法

    公开(公告)号:US20160186313A1

    公开(公告)日:2016-06-30

    申请号:US15065773

    申请日:2016-03-09

    CPC classification number: C23C14/547 C23C14/24 C23C14/243 C23C14/545

    Abstract: A thin film deposition apparatus and method are disclosed. In one aspect, the deposition apparatus comprises a deposition source emitting a deposition material that is to be deposited on a surface of a substrate, a transfer unit moving the deposition source, a thickness measurement sensor measuring a thickness of the deposition material deposited on the surface of the substrate, and a transfer controller adjusting a moving speed of the transfer unit according to the thickness of the deposition material deposited on the surface of the substrate per unit of time.

    Abstract translation: 公开了一种薄膜沉积设备和方法。 在一个方面,沉积设备包括沉积源,其沉积在衬底的表面上,沉积源的移动单元,沉积在表面上的沉积材料的厚度的厚度测量传感器 以及转印控制器,其根据每单位时间内沉积在基板表面上的沉积材料的厚度调节转印单元的移动速度。

    THIN FILM DEPOSITION SOURCE, DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
    3.
    发明申请
    THIN FILM DEPOSITION SOURCE, DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME 有权
    薄膜沉积源,沉积装置和使用其的沉积方法

    公开(公告)号:US20140154403A1

    公开(公告)日:2014-06-05

    申请号:US14037244

    申请日:2013-09-25

    Inventor: Jong Woo Lee

    CPC classification number: C23C14/044 C23C14/547

    Abstract: A thin film deposition source, a deposition apparatus and a deposition method using the same are disclosed. The deposition apparatus includes a deposition source including a plurality of jet nozzles that spray a deposition substance on a surface of a substrate and are arranged in a first direction, and at least one shutter controlling a jet region of the deposition substance by opening or shielding at least a portion of a jetting passageway of the deposition substance.

    Abstract translation: 公开了薄膜沉积源,沉积设备和使用其的沉积方法。 沉积装置包括沉积源,该沉积源包括多个喷射喷嘴,喷射喷嘴在基板的表面上喷涂沉积物质并沿第一方向布置;以及至少一个闸板,其通过打开或屏蔽沉积物质的喷射区域 至少一部分沉积物质的喷射通道。

    ORGANIC LIGHT-EMITTING DISPLAY DEVICE WITH FRIT SEAL AND REINFORCING STRUCTURE
    5.
    发明申请
    ORGANIC LIGHT-EMITTING DISPLAY DEVICE WITH FRIT SEAL AND REINFORCING STRUCTURE 有权
    有机发光显示装置与密封和增强结构

    公开(公告)号:US20130237115A1

    公开(公告)日:2013-09-12

    申请号:US13858883

    申请日:2013-04-08

    Abstract: Disclosed is an organic light-emitting display device in which the substrate and the encapsulation substrate are attached to each other by using a frit. The organic light-emitting display device includes a first substrate including a pixel region in which an organic light-emitting diode is formed, and a non-pixel region. The organic light-emitting diode includes an organic light-emitting layer between a first electrode and a second electrode. A second substrate attached to the first substrate. A frit is provided between the non-pixel region of the first substrate and the second substrate to attach the first substrate and the second substrate. A reinforcement material of resin is formed outside the frit.

    Abstract translation: 公开了一种有机发光显示装置,其中基板和封装基板通过使用玻璃料彼此附接。 有机发光显示装置包括具有形成有机发光二极管的像素区域和非像素区域的第一基板。 有机发光二极管包括在第一电极和第二电极之间的有机发光层。 附着在第一基板上的第二基板。 在第一基板的非像素区域和第二基板之间设置玻璃料以附接第一基板和第二基板。 在玻璃料外部形成树脂的增强材料。

    THIN FILM DEPOSITION APPARATUS AND METHOD
    7.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD 审中-公开
    薄膜沉积装置和方法

    公开(公告)号:US20140170301A1

    公开(公告)日:2014-06-19

    申请号:US13797573

    申请日:2013-03-12

    CPC classification number: C23C14/547 C23C14/24 C23C14/243 C23C14/545

    Abstract: A thin film deposition apparatus and method are disclosed. In one aspect, the deposition apparatus comprises a deposition source emitting a deposition material that is to be deposited on a surface of a substrate, a transfer unit moving the deposition source, a thickness measurement sensor measuring a thickness of the deposition material deposited on the surface of the substrate, and a transfer controller adjusting a moving speed of the transfer unit according to the thickness of the deposition material deposited on the surface of the substrate per unit of time.

    Abstract translation: 公开了一种薄膜沉积设备和方法。 在一个方面,沉积设备包括沉积源,其沉积在衬底的表面上,沉积源的移动单元,沉积在表面上的沉积材料的厚度的厚度测量传感器 以及转印控制器,其根据每单位时间内沉积在基板表面上的沉积材料的厚度调节转印单元的移动速度。

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