Method of managing critical dimension error of photomask and method of manufacturing photomask using the method

    公开(公告)号:US11934095B2

    公开(公告)日:2024-03-19

    申请号:US17379339

    申请日:2021-07-19

    IPC分类号: G03F1/70

    CPC分类号: G03F1/70

    摘要: A method of managing a critical dimension error includes (i) defining, in a photomask, N openings having a width, where N is a natural number, (ii) using graphs for each of the N openings, each of the graphs being obtained by setting locations through an opening of the N openings as a first axis and an intensity of transmitting light as a second axis, obtaining ILSi proportional to an inclination of a tangent to a graph of the graphs at a location corresponding to an edge of an opening and Ii which is an intensity of transmitting light at the location, where i is a natural number from 1 to N, (iii) obtaining, with respect to each of the N openings, a real width CDi of the openings, and (iv) when






    I

    a

    v

    e


    =


    1
    N






    i
    =
    1

    N



    I
    i




    ,


    CD

    a

    v

    e


    =



    1
    N






    i
    =
    1

    N




    CD
    i






    and






    ILS

    a

    v

    e





    =


    1
    N






    i
    =
    1

    N



    ILS
    i





    ,




    obtaining AIMEEFi which is an aerial image mask error enhancement factor with respect to each of the N openings according to an equation below:









    AIMEEF
    i

    =


    -
    2






    I
    i

    -

    I

    a

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    e





    (


    C


    D
    i


    -

    C


    D

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    )

    ·

    ILS

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    v

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    ·

    I

    a

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    .






    [
    Equation
    ]

    DISPLAY DEVICE
    4.
    发明申请

    公开(公告)号:US20230022093A1

    公开(公告)日:2023-01-26

    申请号:US17717315

    申请日:2022-04-11

    IPC分类号: G06F3/041 H01L27/32

    摘要: A display device including: a display panel configured to display an image in units of a frame; an input sensor disposed on the display panel, and configured to sense an external input; a panel driver configured to control driving of the display panel in response to a synchronization signal; and a sensor controller configured to control driving of the input sensor, wherein the sensor controller receives the synchronization signal from the panel driver and outputs a plurality of transmission signals to the input sensor, and the plurality of transmission signals are varyingly generated based on the synchronization signal.

    DISPLAY DEVICE
    5.
    发明申请

    公开(公告)号:US20220271096A1

    公开(公告)日:2022-08-25

    申请号:US17455566

    申请日:2021-11-18

    IPC分类号: H01L27/32 H01L51/52 G06F3/044

    摘要: A display device includes a display panel and an input sensor disposed on the display panel. The input sensor includes a plurality of first areas repeatedly arranged in a first direction, a plurality of second areas repeatedly arranged in the first direction, an inorganic insulating layer disposed in the first areas, an organic insulating layer disposed in the first areas and the second areas, and a sensing electrode disposed on the organic insulating layer. The first areas are alternately arranged in the first direction with the second areas, and the input sensor includes openings in the second areas that are formed by removing portions of the inorganic insulating layer from the second areas.

    Electronic device having touch panel with main subsidiary electrodes

    公开(公告)号:US11360615B2

    公开(公告)日:2022-06-14

    申请号:US17180191

    申请日:2021-02-19

    IPC分类号: G06F3/044 G06F3/041 H01L27/32

    摘要: An electronic device may include a display panel, and an input sensor, in which a first region, a second region enclosing the first region, and a third region enclosing the second region are defined, on the display panel and including sensing electrodes including a first electrode including a first main electrode and a first subsidiary electrode, and a second electrode adjacent the first electrode, and including a second main electrode and a second subsidiary electrode between the first main electrode and the first subsidiary electrode in the first region.

    Electronic device
    7.
    发明授权

    公开(公告)号:US10665397B2

    公开(公告)日:2020-05-26

    申请号:US15638090

    申请日:2017-06-29

    摘要: An electronic device is provided, which includes a substrate, a protruding pattern, a first conductive pattern, an insulating layer, and a second conductive pattern. The protruding pattern is disposed on the substrate. The first conductive pattern is disposed on the substrate and covers the protruding pattern. The insulating layer is disposed on the first conductive pattern. The insulating layer includes an opening overlapping at least a portion of the protruding pattern. The second conductive pattern is disposed on the insulating layer. The second conductive pattern is connected to the first conductive pattern through the opening.

    Electronic device
    8.
    发明授权

    公开(公告)号:US10580594B2

    公开(公告)日:2020-03-03

    申请号:US16381527

    申请日:2019-04-11

    摘要: An electronic device is provided, which includes a substrate, a protruding pattern, a first conductive pattern, an insulating layer, and a second conductive pattern. The protruding pattern is disposed on the substrate. The first conductive pattern is disposed on the substrate and covers the protruding pattern. The insulating layer is disposed on the first conductive pattern. The insulating layer includes an opening overlapping at least a portion of the protruding pattern. The second conductive pattern is disposed on the insulating layer. The second conductive pattern is connected to the first conductive pattern through the opening.

    INSPECTION DEVICE AND INSPECTION METHOD USING THE SAME

    公开(公告)号:US20240061033A1

    公开(公告)日:2024-02-22

    申请号:US18450155

    申请日:2023-08-15

    IPC分类号: G01R31/28 G06F3/041

    摘要: Provided is an inspection device for inspecting a touch-sensing device including a plurality of touch sensors, the inspection device including a data receiver configured to receive raw data from a touch integrated circuit (IC) that is configured to supply a signal for inspection to the touch-sensing device, and that is configured to measure a value output from the touch-sensing device, and a data processor configured to determine operability of the touch-sensing device by using the raw data, and configured to remove noise from the raw data by using first data measured when the touch-sensing device is not electrically connected to the touch IC.