Three-dimensional flash memory device including cell gate patterns having blocking barrier patterns and a method for manufacturing the same

    公开(公告)号:US11171152B2

    公开(公告)日:2021-11-09

    申请号:US16588067

    申请日:2019-09-30

    Abstract: A three-dimensional flash memory device is described that may include a substrate, a plurality of cell gate patterns and a plurality of mold insulating layers alternately stacked on the substrate, and a vertical channel structure in contact with side surfaces of the plurality of cell gate patterns and side surfaces of the plurality of mold insulating layers. Each of the plurality of cell gate patterns may include a cell gate electrode and a blocking barrier pattern adjacently disposed on one side surface of the cell gate electrode. An inner side surface of the blocking barrier pattern may include an upper inner side surface, a middle inner side surface, and a lower inner side surface. The middle inner side surface of the blocking barrier pattern may face the one side surface of the cell gate electrode. The blocking barrier pattern may have a portion protruding toward the cell gate electrode at a connection point between the upper inner side surface of the blocking barrier pattern and the middle inner side surface of the blocking barrier pattern.

    MEMORY DEVICE
    3.
    发明申请

    公开(公告)号:US20220130849A1

    公开(公告)日:2022-04-28

    申请号:US17350760

    申请日:2021-06-17

    Abstract: A memory device includes a cell region in which memory blocks, respectively including gate electrodes and insulating layers, alternately stacked on a substrate, and channel structures, extending in a first direction, perpendicular to an upper surface of the substrate, passing through the gate electrodes and the insulating layers, and connected to the substrate, are arranged. A peripheral circuit region includes a row decoder connected to the gate electrodes and a page buffer connected to the channel structures. The memory blocks include main blocks and at least one spare block, wherein a length of the spare block is shorter than a length of each of the main blocks, in a second direction, parallel to the upper surface of the substrate.

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