公开(公告)号：US20160240441A1

公开(公告)日：2016-08-18

申请号：US15136450

申请日：2016-04-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myung-Gil KANG ,  Sung-Bong KIM ,  Chang-Woo OH ,  Dong-Won KIM

IPC: H01L21/8234 ,  H01L29/66

CPC classification number: H01L21/823431 ,  H01L21/823418 ,  H01L21/845 ,  H01L27/0886 ,  H01L27/1211 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66795 ,  H01L29/775 ,  H01L29/7848 ,  H01L29/785 ,  H01L29/78696

Abstract: An integrated circuit device includes a first transistor having a first channel between a first source/drain, and a second transistor having a second channel between a second source/drain. The first transistor operates based on a first amount of current and the second transistor operates based on a second amount of current different from the first amount of current. The first and second channels have fixed channel widths. The fixed channel widths may be based on fins or nanowires included in the first and second transistors.

Abstract translation: 集成电路器件包括第一晶体管，其具有在第一源极/漏极之间的第一沟道和在第二源极/漏极之间具有第二沟道的第二晶体管。 第一晶体管基于第一电流量而工作，并且第二晶体管基于不同于第一电流量的第二电流量来操作。 第一和第二通道具有固定的通道宽度。 固定通道宽度可以基于包括在第一和第二晶体管中的翅片或纳米线。

公开(公告)号：US20140239255A1

公开(公告)日：2014-08-28

申请号：US14162052

申请日：2014-01-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myung-Gil KANG ,  Sung-Bong KIM ,  Chang-Woo OH ,  Dong-Won KIM

IPC: H01L29/775 ,  H01L27/088 ,  H01L29/78

CPC classification number: H01L21/823431 ,  H01L21/823418 ,  H01L21/845 ,  H01L27/0886 ,  H01L27/1211 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66795 ,  H01L29/775 ,  H01L29/7848 ,  H01L29/785 ,  H01L29/78696

Abstract: An integrated circuit device includes a first transistor having a first channel between a first source/drain, and a second transistor having a second channel between a second source/drain. The first transistor operates based on a first amount of current and the second transistor operates based on a second amount of current different from the first amount of current. The first and second channels have fixed channel widths. The fixed channel widths may be based on fins or nanowires included in the first and second transistors.

Abstract translation: 集成电路器件包括第一晶体管，其具有在第一源极/漏极之间的第一沟道和在第二源极/漏极之间具有第二沟道的第二晶体管。 第一晶体管基于第一电流量而工作，并且第二晶体管基于不同于第一电流量的第二电流量来操作。 第一和第二通道具有固定的通道宽度。 固定通道宽度可以基于包括在第一和第二晶体管中的翅片或纳米线。

公开(公告)号：US20130244396A1

公开(公告)日：2013-09-19

申请号：US13684667

申请日：2012-11-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chang-Woo OH ,  Sang-Hoon Lee ,  Sung-Bong Kim ,  Hyung-Suk Lee

IPC: H01L29/66

CPC classification number: H01L29/66795 ,  H01L29/785 ,  H01L29/7854

Abstract: A method of fabricating a fin field effect transistor may include forming a fin portion protruding from a substrate, forming a device isolation layer to cover a lower sidewall of the fin portion, forming a semiconductor layer using an epitaxial method to cover an upper sidewall and a top surface of the fin portion, selectively etching an upper portion of the device isolation layer to form a gap region between a top surface of the device isolation layer and a bottom surface of the semiconductor layer, and forming a gate electrode pattern on the semiconductor layer to fill the gap region. Related devices are also described.

Abstract translation: 制造鳍状场效应晶体管的方法可以包括形成从衬底突出的鳍部，形成器件隔离层以覆盖翅片部分的下侧壁，使用外延法形成半导体层以覆盖上侧壁和 选择性地蚀刻器件隔离层的上部以在器件隔离层的顶表面和半导体层的底表面之间形成间隙区域，并在半导体层上形成栅电极图案 填补空白区域。 还描述了相关设备。