NONVOLATILE MEMORY DEVICES HAVING MAGNETIC TUNNEL JUNCTION MEMORY CELLS THEREIN

    公开(公告)号:US20220246837A1

    公开(公告)日:2022-08-04

    申请号:US17486034

    申请日:2021-09-27

    Abstract: A magnetic memory device includes a substrate having a first mold insulating film on a first region thereof, and a first structure on the substrate. The first structure includes a lower electrode, a magnetic tunnel junction (MTJ) structure on the lower electrode, and an upper electrode on the MTJ structure. A capping film is provided, which extends on the first mold insulating film and sidewalls of the first structure. A first etching stop layer is provided on the first structure and the capping film. A second mold insulating film is provided, which at least partially fills a space between the capping film and the first etching stop layer. A first metal structure is provided, which extends through a portion of the first etching stop layer and a portion of the second mold insulating film, and is electrically coupled to the MTJ structure.

Patent Agency Ranking