OPTICAL PROXIMITY CORRECTION SYSTEM AND OPERATING METHOD

    公开(公告)号:US20230194975A1

    公开(公告)日:2023-06-22

    申请号:US17873260

    申请日:2022-07-26

    CPC classification number: G03F1/36 G06F30/392

    Abstract: An optical proximity correction system and an operating method are provided. Provided is an optical proximity correction system comprising, a plurality of patch blocks which include a plurality of patches including a segment information table, a plurality of slave devices which receive the segment information table from the plurality of patch blocks to generate a minimum patch table, and a master device which receives the minimum patch table from the plurality of slave devices, generates a segment average calculation table, and performs an optical proximity correction on the patches recorded in the segment average calculation table.

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